US5679815A
Expired / Lapsed
US
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Tantalum and niobium reagents useful in chemical vapor deposition processes, and process for depositing coatings using the same
Assignee: Entegris Inc
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Filing: 1994-09-16
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Granted: 1997-10-21
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Expires: 2014-09-16
Abstract
Abstract Niobium and tantalum compounds suitable for use as chemical vapor deposition source reagents, and a process for depositing niobium- or tantalum-containing coatings using the compounds. The compounds have formula M(OR.sup.1).sub.x (R.sup.2 --C(GH)--C--C(G)--R.sup.3).sub.y wherein M is tantalum or niobium; G is oxygen or sulfur; and R 1 , R 2 , and R 3 are independently selected hydrocarbyl, fluoroalkyl or alkoxy groups.
Inventors
- 👤 Peter S. Kirlin
- 👤 Brian A. Vaartstra
- 👤 Douglas Gordon
- 👤 Timothy E. Glassman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:18
CPC Classifications
C; C07; C07F; C07F9/00; C23; C23C; C23C16/00; C23C16/06; C23C16/18; C23C16/22; C23C16/30; C23C16/40; C23C16/405
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
130 words
A compound selected from those of the formula: M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is oxygen or sulfur; R 1 is C 1 -C 6 hydrocarbyl or fluoroalkyl; and R 2 and R 3 are independently selected from C 2 -C 6 hydrocarbyl, C 2 -C 6 fluoroalkyl and C 1 -C 6 alkoxy groups, with the provisos that when G is oxygen: R 2 and R 3 are not simultaneously both phenyl; when either one of R 2 and R 3 is ethoxy, the other is not phenyl; when either one of R 2 and R 3 is t-butyl, the other is not heptafluoropropyl; and when either one of R 2 and R 3 is ethyl, the other is not methyl.
Claim 2
Dependent Claim
130 words
A compound selected from those of the formula: M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is oxygen or sulfur; R 1 is C 1 -C 6 hydrocarbyl or fluoroalkyl; and R 2 and R 3 are independently selected from C 2 -C 6 hydrocarbyl, C 2 -C 6 fluoroalkyl and C 1 -C 6 alkoxy groups, with the provisos that when G is oxygen: R 2 and R 3 are not simultaneously both phenyl; when either one of R 2 and R 3 is ethoxy, the other is not phenyl; when either one of R 2 and R 3 is t-butyl, the other is not heptafluoropropyl; and when either one of R 2 and R 3 is ethyl, the other is not methyl.
Claim 3
Dependent Claim
10 words
A compound according to claim 1, wherein M is tantalum.
Claim 4
Dependent Claim
10 words
A compound according to claim 1, wherein G is oxygen.
Claim 5
Dependent Claim
18 words
A compound according to claim 1, wherein said compound is free of mixture with hydrolytic condensation products thereof.
Claim 6
Dependent Claim
38 words
A compound according to claim 1, wherein R 1 , R 2 , and R 3 are each independently selected from C 2 -C 6 hydrocarbyl selected from the group consisting of alkyl, aryl, alkaryl, aralkyl, and alkenyl.
Claim 7
Dependent Claim
111 words
A compound selected from those of the formula: M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is niobium; G is oxygen or sulfur; R 1 is C 1 -C 6 hydrocarbyl or fluoroalkyl; and R 2 and R 3 are independently selected from C 2 -C 6 hydrocarbyl, C 2 -C 6 fluoroalkyl and C 1 -C 6 alkoxy groups, with the provisos that when G is oxygen: R 2 and R 3 are not simultaneously both phenyl; when either one of R 2 and R 3 is ethoxy, the other is not phenyl; when either one of R 2 and R 3 is t-butyl, the other is not heptafluoropropyl.
Claim 8
Dependent Claim
111 words
A compound selected from those of the formula: M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is niobium; G is oxygen or sulfur; R 1 is C 1 -C 6 hydrocarbyl or fluoroalkyl; and R 2 and R 3 are independently selected from C 2 -C 6 hydrocarbyl, C 2 -C 6 fluoroalkyl and C 1 -C 6 alkoxy groups, with the provisos that when G is oxygen: R 2 and R 3 are not simultaneously both phenyl; when either one of R 2 and R 3 is ethoxy, the other is not phenyl; when either one of R 2 and R 3 is t-butyl, the other is not heptafluoropropyl.
Claim 9
Dependent Claim
58 words
A compound of the formula: M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is sulfur; R 1 is C 1 -C 6 hydrocarbyl or fluoroalkyl; and R 2 and R 3 are independently selected from C 2 -C 6 hydrocarbyl, C 2 -C 6 fluoroalkyl and C 1 -C 6 alkoxy groups.
Claim 10
Dependent Claim
58 words
A compound of the formula: M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is sulfur; R 1 is C 1 -C 6 hydrocarbyl or fluoroalkyl; and R 2 and R 3 are independently selected from C 2 -C 6 hydrocarbyl, C 2 -C 6 fluoroalkyl and C 1 -C 6 alkoxy groups.
Claim 11
Dependent Claim
47 words
A compound selected from those of the formula: M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is oxygen or sulfur; R 1 is selected from the group consisting of ethyl and isopropyl; and R 2 and R 3 are both tert-butyl.
Claim 12
Dependent Claim
47 words
A compound selected from those of the formula: M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is oxygen or sulfur; R 1 is selected from the group consisting of ethyl and isopropyl; and R 2 and R 3 are both tert-butyl.
Claim 13
Dependent Claim
10 words
Tantalum tetraisopropoxytetramethylheptanedionate, free of mixture with hydrolytic condensation products thereof.
Claim 14
Dependent Claim
10 words
Tantalum tetraisopropoxytetramethylheptanedionate, free of mixture with hydrolytic condensation products thereof.
Claim 15
Dependent Claim
2 words
Tantalum tetraisopropoxytetramethylheptanedionate.
Claim 16
Dependent Claim
2 words
Tantalum tetraisopropoxytetramethylheptanedionate.
Claim 17
Dependent Claim
55 words
A compound selected from those of the formula: M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is oxygen or sulfur; R 1 is selected from methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, and tert-butyl; and R 2 and R 3 are independently selected from tert-butyl, sec-butyl, isopropyl, cyclohexyl, and neopentyl.
Claim 18
Dependent Claim
55 words
A compound selected from those of the formula: M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is oxygen or sulfur; R 1 is selected from methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, and tert-butyl; and R 2 and R 3 are independently selected from tert-butyl, sec-butyl, isopropyl, cyclohexyl, and neopentyl.
Claim 19
Dependent Claim
30 words
A compound according to claim 11, wherein: R 1 is selected from ethyl, isopropyl, and tert-butyl; and R 2 and R 3 are independently selected from tert-butyl, sec-butyl, and isopropyl.
Claim 20
Dependent Claim
142 words
A composition comprising: (A) a compound selected from those of the formula M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is oxygen or sulfur; R 1 is C 1 -C 6 hydrocarbyl or fluoroalkyl; and R 2 and R 3 are independently selected from C 2 -C 6 hydrocarbyl, C 2 -C 6 fluoroalkyl and C 1 -C 6 alkoxy groups; with the provisos that when G is oxygen: R 2 and R 3 are not simultaneously both phenyl; when either one of R 2 and R 3 is ethoxy, the other is not phenyl; when either one of R 2 and R 3 is t-butyl, the other is not heptafluoropropyl; and when either one of R 2 and R 3 is ethyl, the other is not methyl; and (B) a solvent for said compound (A).
Claim 21
Dependent Claim
142 words
A composition comprising: (A) a compound selected from those of the formula M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is oxygen or sulfur; R 1 is C 1 -C 6 hydrocarbyl or fluoroalkyl; and R 2 and R 3 are independently selected from C 2 -C 6 hydrocarbyl, C 2 -C 6 fluoroalkyl and C 1 -C 6 alkoxy groups; with the provisos that when G is oxygen: R 2 and R 3 are not simultaneously both phenyl; when either one of R 2 and R 3 is ethoxy, the other is not phenyl; when either one of R 2 and R 3 is t-butyl, the other is not heptafluoropropyl; and when either one of R 2 and R 3 is ethyl, the other is not methyl; and (B) a solvent for said compound (A).
Claim 22
Dependent Claim
18 words
A composition according to claim 13, wherein said compound is free of mixture with hydrolytic condensation products thereof.
Claim 23
Dependent Claim
67 words
A composition comprising: (A) a compound selected from those of the formula M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is oxygen or sulfur; R 1 is selected from methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, and tert-butyl; and R 2 and R 3 are independently selected from tert-butyl, sec-butyl, isopropyl, cyclohexyl, and neopentyl; and (B) a solvent for said compound (A).
Claim 24
Dependent Claim
67 words
A composition comprising: (A) a compound selected from those of the formula M(OR.sup.1).sub.x (R.sup.2 --C(G)--CH--C(G)--R.sup.3).sub.5-x wherein: x is from 1-4; M is tantalum or niobium; G is oxygen or sulfur; R 1 is selected from methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, and tert-butyl; and R 2 and R 3 are independently selected from tert-butyl, sec-butyl, isopropyl, cyclohexyl, and neopentyl; and (B) a solvent for said compound (A).
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2000-10-20 | 2001-04-21 | 2001-10-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-20 | 2005-04-21 | 2005-10-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-20 | 2009-04-21 | 2009-10-21 | $7700.00 | Window Closed / Lapsed |