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US5677221A
Expired / Lapsed
US
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Method of manufacture DRAM capacitor with reduced layout area
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1996-06-19
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Granted: 1997-10-14
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Expires: 2016-06-19
Abstract
Abstract A method of manufacturing a capacitor for use in a DRAM. The method includes forming an isolation layer over a substrate, forming a nitride layer over the isolation layer, forming a hole in the isolation and nitride layers, forming a polysilicon plug in the hole, growing an oxide plug from an upper portion of the polysilicon plug, removing the nitride layer, forming a polysilicon spacer around the oxide plug, and removing the silicon dioxide plug. Additional steps include depositing a dielectric layer onto the polysilicon sidewall and plug, and depositing a third polysilicon layer onto the dielectric layer.
Inventors
- 👤 Horng-Huei Tseng
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:16
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/033; H10D; H10D1/00; H10D1/01; H10D1/041; H10D1/042; H10D1/60; H10D1/68; H10D1/692; H10D1/711; H10D1/716
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
151 words
A method for manufacturing an integrated circuit capacitor on a semiconductor substrate, the method comprising: forming an isolation layer on said semiconductor substrate; forming a first nitride layer on said isolation layer; etching said first nitride layer and said isolation layer so as to form a contact hole; forming a first polysilicon layer on said first nitride layer, wherein said contact hole is substantially filled with polysilicon from said first polysilicon layer; etching back said first polysilicon layer, wherein a polysilicon plug is formed in said contact hole; forming an oxide plug from said polysilicon plug, wherein said oxide plug extends out of said contact hole; removing said first nitride layer; forming a second polysilicon layer on said isolation layer and said silicon dioxide plug; etching said second polysilicon layer so as to form a spacer on the side wall of said silicon dioxide plug; and removing said silicon dioxide plug.
Claim 2
Independent Claim
151 words
A method for manufacturing an integrated circuit capacitor on a semiconductor substrate, the method comprising: forming an isolation layer on said semiconductor substrate; forming a first nitride layer on said isolation layer; etching said first nitride layer and said isolation layer so as to form a contact hole; forming a first polysilicon layer on said first nitride layer, wherein said contact hole is substantially filled with polysilicon from said first polysilicon layer; etching back said first polysilicon layer, wherein a polysilicon plug is formed in said contact hole; forming an oxide plug from said polysilicon plug, wherein said oxide plug extends out of said contact hole; removing said first nitride layer; forming a second polysilicon layer on said isolation layer and said silicon dioxide plug; etching said second polysilicon layer so as to form a spacer on the side wall of said silicon dioxide plug; and removing said silicon dioxide plug.
Claim 3
Dependent Claim
41 words
The method of claim 1 further comprising: forming a dielectric film on a surface of said first conductive layer and said side wall spacer; forming a third polysilicon layer on said dielectric film; and patterning and etching said third polysilicon layer.
Claim 4
Dependent Claim
19 words
The method of claim 1, wherein removing said silicon dioxide plug comprises removing a portion of said isolation layer.
Claim 5
Dependent Claim
37 words
The method of claim 1, further comprising: forming an oxide layer before said isolation layer is formed; and etching said oxide layer to form a contact window, wherein said contact window exposes a portion of said substrate.
Claim 6
Dependent Claim
19 words
The method of claim 4, wherein said oxide layer has a thickness of about 500 to about 2000 angstroms.
Claim 7
Dependent Claim
12 words
The method of claim 5, wherein said oxide layer is undoped oxide.
Claim 8
Dependent Claim
38 words
The method of claim 1, further comprising: forming a second nitride layer before forming said isolation layer; and etching said second nitride layer to form a contact window, wherein said contact window exposes a portion of said substrate.
Claim 9
Dependent Claim
11 words
The method of claim 7, further comprising removing said isolation layer.
Claim 10
Dependent Claim
13 words
The method of claim 1, wherein said isolation layer comprises borophosphosilicate glass (BPSG).
Claim 11
Dependent Claim
19 words
The method of claim 9, wherein said isolation layer has a thickness of about 3000 to about 6000 angstroms.
Claim 12
Dependent Claim
20 words
The method of claim 1, wherein said first nitride layer has a thickness of about 3000 to about 8000 angstroms.
Claim 13
Dependent Claim
17 words
The method of claim 1, wherein said polysilicon has a width about 0.3 to about 0.7 micrometers.
Claim 14
Dependent Claim
13 words
The method of claim 1, wherein oxide plug is formed by thermal oxidation.
Claim 15
Dependent Claim
21 words
The method of claim 1 wherein said thermal oxidation is performed with a temperature of about 750° to about 850° C.
Claim 16
Dependent Claim
20 words
The method of claim 1, wherein said second polysilicon layer has a thickness of about 500 to about 2000 angstroms.
Claim 17
Dependent Claim
22 words
The method of claim 2, wherein said first polysilicon layer, said second polysilicon layer and said third polysilicon layer comprise doped polysilicon.
Claim 18
Dependent Claim
23 words
The method of claim 16 wherein said first polysilicon layer, said second polysilicon layer or said third polysilicon layer comprise in-situ doped polysilicon.
Claim 19
Dependent Claim
15 words
The method of claim 2, wherein said dielectric film comprises Ta 2 O 5 .
Claim 20
Independent Claim
132 words
A method of forming a polysilicon structure on a substrate, said method comprising: forming an isolation layer on said substrate; forming a nitride layer on said isolation layer; forming a hole through said nitride layer and said isolation to expose said substrate; forming a first polysilicon layer on said nitride layer, wherein said hole is substantially filled with polysilicon from said first polysilicon layer; etching back said first polysilicon layer to form a polysilicon plug in said hole; growing an oxide plug from an upper portion of said polysilicon plug; removing said nitride layer; forming a second polysilicon layer on said isolation layer and said oxide plug; etching said second polysilicon layer so as to form a spacer on a side wall of said oxide plug; and removing said silicon dioxide plug.
Claim 21
Independent Claim
132 words
A method of forming a polysilicon structure on a substrate, said method comprising: forming an isolation layer on said substrate; forming a nitride layer on said isolation layer; forming a hole through said nitride layer and said isolation to expose said substrate; forming a first polysilicon layer on said nitride layer, wherein said hole is substantially filled with polysilicon from said first polysilicon layer; etching back said first polysilicon layer to form a polysilicon plug in said hole; growing an oxide plug from an upper portion of said polysilicon plug; removing said nitride layer; forming a second polysilicon layer on said isolation layer and said oxide plug; etching said second polysilicon layer so as to form a spacer on a side wall of said oxide plug; and removing said silicon dioxide plug.
Claim 22
Independent Claim
82 words
A method of forming a polysilicon structure on a substrate, said method comprising: forming a plug having polysilicon portion contacting said substrate and an oxide portion on top of said polysilicon portion; forming a polysilicon spacer on a side wall of said plug, said spacer contacting at least an upper portion of said polysilicon portion and a lower portion of said oxide portion; and removing said oxide portion, wherein said polysilicon spacer is attached to said upper portion of said polysilicon portion.
Claim 23
Independent Claim
82 words
A method of forming a polysilicon structure on a substrate, said method comprising: forming a plug having polysilicon portion contacting said substrate and an oxide portion on top of said polysilicon portion; forming a polysilicon spacer on a side wall of said plug, said spacer contacting at least an upper portion of said polysilicon portion and a lower portion of said oxide portion; and removing said oxide portion, wherein said polysilicon spacer is attached to said upper portion of said polysilicon portion.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-10-13 | 2001-04-14 | 2001-10-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-13 | 2005-04-14 | 2005-10-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-13 | 2009-04-14 | 2009-10-14 | $7700.00 | Window Closed / Lapsed |