US5674638A
Expired / Lapsed
US
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Fluorinated diamond-like carbon protective coating for magnetic recording media devices
Assignee: International Business Machines Corp
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Filing: 1995-10-02
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Granted: 1997-10-07
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Expires: 2015-10-02
Abstract
Abstract An improved wear-resistant protective coating for the surfaces of magnetic recording media devices that is formed of fluorinated diamond-like carbon and deposited by a plasma enhanced chemical vapor deposition process or other suitable methods to provide superior friction-reducing and stiction-reducing properties.
Inventors
- 👤 Alfred Grill
- 👤 Vishnubhai Vitthalbhai Patel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 08:39
CPC Classifications
G; G11; G11B; G11B5/00; G11B5/62; G11B5/127; G11B5/31; G11B5/3103; G11B5/3106; G11B5/187; G11B5/255; G11B5/72; G11B5/726; G11B5/7262; G11B5/7264; G11B5/84; G11B5/8408; Y; Y10; Y10S; Y10S427/00; Y10S427/103; Y10S427/106; Y10S428/00; Y10S428/90; Y10T; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
26 words
A device having a wear resistant fluorinated diamond-like carbon film coated on its surface, said film comprises between about 10 and about 70 atomic percent fluorine.
Claim 2
Independent Claim
26 words
A device having a wear resistant fluorinated diamond-like carbon film coated on its surface, said film comprises between about 10 and about 70 atomic percent fluorine.
Claim 3
Dependent Claim
24 words
A device according to claim 1, wherein an atomic ratio of F/(F+C) in the film is preferably between about 10 and about 40 percent.
Claim 4
Dependent Claim
33 words
A device according to claim 1, wherein said film contains hydrogen at an atomic concentration between about 0 and about 40 atomic percent and preferably between about 0 and about 20 atomic percent.
Claim 5
Dependent Claim
42 words
A device according to claim 1, wherein said film having a wear rate of not more than 70 nm/thousand rotations when tested in a pin-on-disk tribotester by a pin made of 410C ball bearing steel under an initial load of 300 MPa.
Claim 6
Dependent Claim
21 words
A device according to claim 1, wherein said film preferably having a wear rate of not more than 1 nm/thousand rotations.
Claim 7
Dependent Claim
12 words
A device according to claim 1, wherein said film having reduced wettability.
Claim 8
Dependent Claim
15 words
A device according to claim 1, wherein said film having low friction and improved wear-resistance.
Claim 9
Dependent Claim
26 words
A device according to claim 1, wherein said film is deposited on a layer of non-fluorinated diamond-like carbon film coated on a surface of said device.
Claim 10
Independent Claim
34 words
A method of making a wear resistant fluorinated diamond-like carbon film by an ion assisted deposition technique utilizing a reactant mixture selected from the group consisting of hexafluorobenzene with hydrogen and pentafluorobenzene with hydrogen.
Claim 11
Independent Claim
34 words
A method of making a wear resistant fluorinated diamond-like carbon film by an ion assisted deposition technique utilizing a reactant mixture selected from the group consisting of hexafluorobenzene with hydrogen and pentafluorobenzene with hydrogen.
Claim 12
Dependent Claim
18 words
A method according to claim 9 further comprising the step of exposing a substrate to a negative bias.
Claim 13
Dependent Claim
20 words
A method according to claim 9, wherein said ion assisted deposition technique is a plasma assisted chemical vapor deposition technique.
Claim 14
Dependent Claim
19 words
A method according to claim 9, wherein said film is deposited over a layer of non-fluorinated diamond-like carbon film.
Claim 15
Independent Claim
25 words
A method of using a wear resistant fluorinated diamond-like carbon film comprises between about 10 and about 70 atomic percent fluorine as a protective coating.
Claim 16
Independent Claim
25 words
A method of using a wear resistant fluorinated diamond-like carbon film comprises between about 10 and about 70 atomic percent fluorine as a protective coating.
Claim 17
Dependent Claim
17 words
A method according to claim 13, wherein said film is used as a low friction wear-resistant coating.
Claim 18
Dependent Claim
15 words
A method according to claim 13, wherein said film is used as a reduced-stiction coating.
Claim 19
Dependent Claim
19 words
A method according to claim 13, wherein said film is deposited on a layer of non-fluorinated diamond-like carbon film.
Claim 20
Dependent Claim
22 words
A fluorinated diamond-like carbon film containing between about 10 and about 70 atomic percent fluorine throughout the entire thickness of the film.
Claim 21
Dependent Claim
22 words
A fluorinated diamond-like carbon film containing between about 10 and about 70 atomic percent fluorine throughout the entire thickness of the film.
Claim 22
Independent Claim
32 words
A method of making a fluorinated diamond-like carbon film by an ion assisted deposition technique utilizing a reactant mixture selected from the group consisting of hexafluorobenzene with hydrogen and pentafluorobenzene with hydrogen.
Claim 23
Independent Claim
32 words
A method of making a fluorinated diamond-like carbon film by an ion assisted deposition technique utilizing a reactant mixture selected from the group consisting of hexafluorobenzene with hydrogen and pentafluorobenzene with hydrogen.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2000-10-06 | 2001-04-07 | 2001-10-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-06 | 2005-04-07 | 2005-10-07 | $3760.00 | Window Closed / Lapsed |
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