US5672095A
Expired / Lapsed
US
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Elimination of pad conditioning in a chemical mechanical polishing process
Assignee: Intel Corp
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Filing: 1995-09-29
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Granted: 1997-09-30
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Expires: 2015-09-29
Abstract
Abstract A method and apparatus for polishing a film formed over a semiconductor substrate. The substrate is pressed up against an abrasive pad so that the film contacts the pad. The pad has a diameter which is less than approximately two times a diameter of the substrate. While pressure is applied to the back of the substrate, the pad is rotated with respect to the wafer and an abrasive ceria slurry is introduced onto the pad to polish the film.
Inventors
- 👤 Seiichi Morimoto
- 👤 Ebrahim Andideh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 06:45
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/04; B24B37/042
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
80 words
A method of polishing a film formed over a semiconductor substrate comprising the steps of: a) forcibly pressing the substrate against an abrasive pad such that the film is placed in contact with the pad, the pad having a diameter which is less than approximately two times a diameter of the substrate; b) introducing an abrasive slurry comprising ceria onto the pad; and c) rotating the pad with respect to the substrate to polish the film at an etch rate.
Claim 2
Independent Claim
80 words
A method of polishing a film formed over a semiconductor substrate comprising the steps of: a) forcibly pressing the substrate against an abrasive pad such that the film is placed in contact with the pad, the pad having a diameter which is less than approximately two times a diameter of the substrate; b) introducing an abrasive slurry comprising ceria onto the pad; and c) rotating the pad with respect to the substrate to polish the film at an etch rate.
Claim 3
Dependent Claim
42 words
The method of claim 1 further comprising the step of subjecting the pad to a break-in process before polishing a film formed over a semiconductor substrate in production, the break-in process saturating the pad with ceria thereby substantially stabilizing the etch rate.
Claim 4
Dependent Claim
36 words
The method of claim 2 further comprising the step of terminating the polishing of the film before the pad reaches an etch-stop layer after a predetermined period of time has elapsed in a timed etch process.
Claim 5
Dependent Claim
22 words
The method of claim 2 wherein steps a, b, and c are repeated a plurality of times for a plurality of substrates.
Claim 6
Dependent Claim
25 words
The method of claim 4 wherein the etch rate is substantially stabilized by the break-in process to a substrate-to-substrate uniformity of less than approximately 10%.
Claim 7
Dependent Claim
25 words
The method of claim 1 wherein the film comprises a material selected from a group consisting of oxide, polysilicon, amorphous silicon, and any combination thereof.
Claim 8
Dependent Claim
20 words
The method of claim 1 wherein the diameter of the pad is approximately 1.5 times the diameter of the substrate.
Claim 9
Dependent Claim
20 words
The method of claim 5 wherein the diameter of the pad is approximately 1.5 times the diameter of the substrate.
Claim 10
Dependent Claim
13 words
The method of claim 1 wherein the slurry further comprises silica and KOH.
Claim 11
Dependent Claim
17 words
The method of claim 1 wherein the pad remains essentially unconditioned during the polishing of the film.
Claim 12
Dependent Claim
21 words
The method of claim 4 wherein the pad remains essentially unconditioned during and between the polishing of the plurality of substrates.
Claim 13
Dependent Claim
22 words
The method of claim 1 wherein the pad is rotated at a speed in the range of approximately 20 to 400 rpm.
Claim 14
Independent Claim
115 words
A method of polishing a film formed over a semiconductor substrate comprising the steps of: a) breaking in an abrasive polishing pad by polishing a dummy wafer using an abrasive slurry comprising ceria; b) introducing an abrasive slurry comprising ceria onto the pad; c) forcibly pressing the substrate against the pad such that the film is placed in contact with the pad, the pad having a diameter which is less than or equal to two times a diameter of the substrate, the film comprising an oxide; and d) rotating the pad with respect to the substrate to polish the film at an etch rate, the pad remaining essentially unconditioned during the polishing of the film.
Claim 15
Independent Claim
115 words
A method of polishing a film formed over a semiconductor substrate comprising the steps of: a) breaking in an abrasive polishing pad by polishing a dummy wafer using an abrasive slurry comprising ceria; b) introducing an abrasive slurry comprising ceria onto the pad; c) forcibly pressing the substrate against the pad such that the film is placed in contact with the pad, the pad having a diameter which is less than or equal to two times a diameter of the substrate, the film comprising an oxide; and d) rotating the pad with respect to the substrate to polish the film at an etch rate, the pad remaining essentially unconditioned during the polishing of the film.
Claim 16
Dependent Claim
22 words
The method of claim 13 wherein steps b, c, and d are repeated a plurality of times for a plurality of substrates.
Claim 17
Dependent Claim
36 words
The method of claim 14 wherein breaking in the pad is performed until the etch rate is substantially stabilized to a substrate-to-substrate uniformity of less than approximately 5% before any semiconductor substrates in production are polished.
Claim 18
Dependent Claim
36 words
The method of claim 14 wherein breaking in the pad is performed until the etch rate is substantially stabilized to a substrate-to-substrate uniformity of less than approximately 3% before any semiconductor substrates in production are polished.
Claim 19
Dependent Claim
36 words
The method of claim 13 further comprising the step of terminating the polishing of the film before the pad reaches an etch-stop layer after a predetermined period of time has elapsed in a timed etch process.
Claim 20
Dependent Claim
20 words
The method of claim 13 wherein the diameter of the pad is approximately 1.5 times the diameter of the substrate.
Claim 21
Dependent Claim
20 words
The method of claim 13 wherein the diameter of the pad is approximately 1.5 times the diameter of the substrate.
Claim 22
Dependent Claim
27 words
The method of claim 13 wherein the slurry further comprises a compound selected from the group consisting of silica, KOH, NH 4 OH, and any combination thereof.
Claim 23
Dependent Claim
18 words
The method of claim 13 wherein the pad remains essentially unconditioned throughout the life span of the pad.
Claim 24
Dependent Claim
69 words
The method of claim 15 wherein breaking in the pad comprises rotating the dummy wafer at a speed in the range of approximately 25 to 100 rpm; rotating the pad at a speed in the range of approximately 200 to 400 rpm, and the dummy wafer is pressed against the pad at a pressure in the range of approximately 5 to 15 psi for approximately 2 to 10 minutes.
Claim 25
Independent Claim
84 words
An apparatus for polishing a film formed over a semiconductor substrate comprising: a carrier to which the substrate is attached, the carrier forcibly pressing the film in contact with an abrasive pad; a table to which the pad is attached, the pad having a diameter which is less than approximately two times a diameter of the substrate; a slurry distribution system which saturates the pad with a slurry comprising ceria; and a motor coupled to the table, the motor rotating the table and pad.
Claim 26
Independent Claim
84 words
An apparatus for polishing a film formed over a semiconductor substrate comprising: a carrier to which the substrate is attached, the carrier forcibly pressing the film in contact with an abrasive pad; a table to which the pad is attached, the pad having a diameter which is less than approximately two times a diameter of the substrate; a slurry distribution system which saturates the pad with a slurry comprising ceria; and a motor coupled to the table, the motor rotating the table and pad.
Claim 27
Dependent Claim
20 words
The apparatus of claim 23 wherein the diameter of the pad is approximately 1.5 times the diameter of the substrate.
Claim 28
Dependent Claim
27 words
The apparatus of claim 23 wherein the slurry further comprises a compound selected from the group consisting of silica, KOH, NH 4 OH, and any combination thereof.
Claim 29
Dependent Claim
25 words
The apparatus of claim 23 wherein the motor rotates the table and pad at a speed in the range of approximately 20 to 400 rpm.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-09-29 | 2001-03-31 | 2001-09-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-09-29 | 2005-03-31 | 2005-09-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-09-29 | 2009-03-31 | 2009-09-30 | $7700.00 | Window Closed / Lapsed |