US5669408A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Pressure type flow rate control apparatus
Assignee: Tokyo Electron Ltd
•
Filing: 1996-06-10
•
Granted: 1997-09-23
•
Expires: 2016-06-10
Abstract
Abstract A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) provided at the upstream side of the orifice, a pressure detector (3) provided between the control valve and the orifice, and an operation control device (6) for calculating a flow rate Qc from the detected pressure P1 of the pressure detector as Qc=KP1 (K being a constant) and issuing a difference as a control signal Qy between a flow rate command signal Qs and the calculated flow rate Qc to a drive unit of the control valve. The orifice upstream side pressure P1 is adjusted by opening and closing the control valve, thereby controlling the orifice downstream side flow rate.
Inventors
- 👤 Koji Nishino
- 👤 Nobukazu Ikeda
- 👤 Akihiro Morimoto
- 👤 Yukio Minami
- 👤 Koji Kawada
- 👤 Ryosuke Dohi
- 👤 Hiroyuki Fukuda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 16:08
CPC Classifications
G; G05; G05D; G05D7/00; G05D7/06; G05D7/0617; G05D7/0629; G05D7/0635; Y; Y10; Y10T; Y10T137/00; Y10T137/5109; Y10T137/7722; Y10T137/7737; Y10T137/7758; Y10T137/7759; Y10T137/7761; Y10T137/7762; Y10T137/7769; Y10T137/777; Y10T137/8593; Y10T137/87917
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
257 words
A pressure type flow rate control apparatus for controlling flow rate of a fluid comprising: means for forming an orifice; means for maintaining a pressure P1 upstream of the orifice at more than twice a pressure p2 downstream of the orifice and for maintaining the pressure P2 downstream of the orifice at or less than atmospheric pressure; a control valve positioned upstream of the orifice for controlling flow to the orifice; a pressure detector for measuring pressure P1 between the control valve and the orifice; and, a calculation control means for receiving the measured pressure P1 and for calculating flow rate Qc through the orifice on the basis of the measured pressure P1 by a formula Qc=KP1, K being a constant, for receiving a flow rate command signal and for outputting a difference Qy between the flow rate command signal Qs and the calculated flow rate signal Qc to a drive unit for opening and closing the control valve; wherein the pressure P1 upstream of the orifice is adjusted by opening and closing of the control valve, thereby controlling the flow rate downstream of the orifice; wherein the calculation control means includes a temperature correction circuit for correcting the value of the calculated flow rate Qc depending on a gas temperature T1 at the upstream side of the orifice; and, wherein the control valve is coupled to an output of an inverting amplifier for receiving an output signal therefrom, said inverting amplifier receiving detected values of the upstream side pressure P1 and the downstream side pressure P2.
Claim 2
Dependent Claim
257 words
A pressure type flow rate control apparatus for controlling flow rate of a fluid comprising: means for forming an orifice; means for maintaining a pressure P1 upstream of the orifice at more than twice a pressure p2 downstream of the orifice and for maintaining the pressure P2 downstream of the orifice at or less than atmospheric pressure; a control valve positioned upstream of the orifice for controlling flow to the orifice; a pressure detector for measuring pressure P1 between the control valve and the orifice; and, a calculation control means for receiving the measured pressure P1 and for calculating flow rate Qc through the orifice on the basis of the measured pressure P1 by a formula Qc=KP1, K being a constant, for receiving a flow rate command signal and for outputting a difference Qy between the flow rate command signal Qs and the calculated flow rate signal Qc to a drive unit for opening and closing the control valve; wherein the pressure P1 upstream of the orifice is adjusted by opening and closing of the control valve, thereby controlling the flow rate downstream of the orifice; wherein the calculation control means includes a temperature correction circuit for correcting the value of the calculated flow rate Qc depending on a gas temperature T1 at the upstream side of the orifice; and, wherein the control valve is coupled to an output of an inverting amplifier for receiving an output signal therefrom, said inverting amplifier receiving detected values of the upstream side pressure P1 and the downstream side pressure P2.
Claim 3
Dependent Claim
21 words
A pressure type flow rate control apparatus as in claim 1, wherein a means for forming the orifice can be exchanged.
Claim 4
Dependent Claim
53 words
A pressure type flow rate control apparatus as in claim 1, wherein a mounting hole of the pressure detector and a mounting hole of an orifice-forming member are provided in a valve body of the control valve, with the valve body of the control valve being formed in the shape of a block.
Claim 5
Dependent Claim
43 words
A pressure type flow rate control apparatus as in claim 1, wherein an orifice-corresponding valve is provided at the downstream side of the orifice, and the orifice is positioned in a fluid inlet of a valve main body of the orifice corresponding valve.
Claim 6
Dependent Claim
34 words
A pressure type flow rate control apparatus as in claim 3 wherein an orifice forming member can be exchangebly inserted into the orifice mounting hole of the valve main body of the control valve.
References Cited (Backward Citations)
US4431020A
Cited
US4573491A
Cited
US4508127A
Cited
US4895500A
Cited
US4836233A
Cited
US5146941A
Cited
US5148829A
Cited
US5190068A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-09-22 | 2001-03-24 | 2001-09-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-09-22 | 2005-03-24 | 2005-09-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-09-22 | 2009-03-24 | 2009-09-23 | $7700.00 | Window Closed / Lapsed |