US5653813A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cyclone evaporator
Assignee: Novellus Systems Inc
•
Filing: 1995-04-03
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Granted: 1997-08-05
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Expires: 2015-04-03
Abstract
Abstract A cyclone evaporator includes an evaporator body with an evaporation chamber therein. The evaporation chamber preferably includes a thermally conductive sidewall having a generally cylindrical upper portion and a downwardly tapered lower portion. The evaporator body further includes a cover having a vapor outlet opening into the evaporation chamber and an outlet tube. The outlet tube circumscribes the vapor outlet and extends into a lower portion of the evaporation chamber. A liquid precursor passage and a carrier gas passage extend through the evaporator body and open into the evaporation chamber. In one embodiment, the carrier gas passage is positioned to direct carrier gas parallel to liquid precursor flow and intersect the liquid precursor at a liquid precursor passage outlet within the evaporation chamber. In another embodiment, the carrier gas passage is positioned to direct carrier gas across an outlet of liquid precursor passage. In both embodiments, the carrier gas facilitates atomization of the liquid precursor and flows cyclonically to distribute the atomized liquid precursor within the evaporation chamber. The liquid precursor deposits on the thermally conductive evaporation chamber wall and evaporates to form a gas precursor. The gas precursor flows with the carrier gas and exits the cyclone evaporator through the outlet tube and the vapor outlet. The cyclone evaporator is particularly advantageous for evaporating low vapor pressure liquids useful in semiconductor fabrication processes such as chemical vapor deposition.
Inventors
- 👤 Jeffrey C. Benzing
- 👤 Edward J. McInerney
- 👤 Michael N. Susoeff
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 05:25
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/4481; H; H10; H10P; H10P14/00; H10P14/20; C23C16/4486
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
161 words
A chemical vapor deposition system comprising: a carrier gas source; a chemical vapor deposition reactor assembly having a gas precursor inlet; an evaporator body; an evaporation chamber disposed within the evaporator body, a wall of the evaporation chamber comprising a curved surface; a heater arranged so as to transmit heat to at least a portion of the wall; an atomizer having a carrier gas inlet and a liquid precursor inlet, and further having an opening into the evaporation chamber, the atomizer positioned so as to direct a stream of the carrier gas along a path generally tangent to the curved surface; a vapor outlet extending through the evaporator body from the evaporation chamber; a liquid precursor distribution system coupled between the liquid precursor source and the liquid precursor inlet; a carrier gas distribution system coupled between the carrier gas source and the carrier gas inlet; and a gas precursor distribution system coupled between the vapor outlet and the gas precursor inlet.
Claim 2
Dependent Claim
161 words
A chemical vapor deposition system comprising: a carrier gas source; a chemical vapor deposition reactor assembly having a gas precursor inlet; an evaporator body; an evaporation chamber disposed within the evaporator body, a wall of the evaporation chamber comprising a curved surface; a heater arranged so as to transmit heat to at least a portion of the wall; an atomizer having a carrier gas inlet and a liquid precursor inlet, and further having an opening into the evaporation chamber, the atomizer positioned so as to direct a stream of the carrier gas along a path generally tangent to the curved surface; a vapor outlet extending through the evaporator body from the evaporation chamber; a liquid precursor distribution system coupled between the liquid precursor source and the liquid precursor inlet; a carrier gas distribution system coupled between the carrier gas source and the carrier gas inlet; and a gas precursor distribution system coupled between the vapor outlet and the gas precursor inlet.
Claim 3
Dependent Claim
45 words
The chemical vapor deposition system as in claim 1 wherein the liquid precursor source is a container enclosing a pressurized low vapor pressure liquid, and the low vapor pressure liquid is selected from the group consisting of Copper I (hexafluoroacetylacetonate) Trimethylvinysilane, triisobutylaluminum, tetraethylorthosilicate, and tetradiethylaminotitanium.
Claim 4
Dependent Claim
19 words
The chemical vapor deposition system as in claim 1 wherein the carrier gas source is a container enclosing nitrogen.
Claim 5
Dependent Claim
133 words
An evaporator for vaporizing a liquid precursor comprising: a body; a chamber formed within the body, the chamber being bounded by a wall, at least a portion of the wall being formed in a truncated conical shape which defines a wide end and a narrow end of the chamber; an atomizer assembly having a carrier gas inlet and a liquid precursor inlet, the atomizer assembly being positioned so as to direct a stream comprising a carrier gas and entrained liquid precursor droplets into the chamber along a fixed path generally tangential to a curved surface of said wall, such that the carrier gas flows along a cyclonic path in a direction from the wide end towards the narrow end of the chamber; and a vapor outlet extending through the body from the chamber.
Claim 6
Dependent Claim
133 words
An evaporator for vaporizing a liquid precursor comprising: a body; a chamber formed within the body, the chamber being bounded by a wall, at least a portion of the wall being formed in a truncated conical shape which defines a wide end and a narrow end of the chamber; an atomizer assembly having a carrier gas inlet and a liquid precursor inlet, the atomizer assembly being positioned so as to direct a stream comprising a carrier gas and entrained liquid precursor droplets into the chamber along a fixed path generally tangential to a curved surface of said wall, such that the carrier gas flows along a cyclonic path in a direction from the wide end towards the narrow end of the chamber; and a vapor outlet extending through the body from the chamber.
Claim 7
Dependent Claim
73 words
The evaporator as in claim 4 wherein the atomizer assembly comprises: a liquid precursor passage extending through the body and having an outlet portion opening into the chamber; a carrier gas passage extending through the body and having an outlet portion opening into the chamber, the carrier gas passage being positioned to atomize liquid precursor and to distribute the atomized liquid precursor on at least a portion of the wall of the chamber.
Claim 8
Dependent Claim
70 words
The evaporator as in claim 5, the atomizer assembly further including a liquid precursor/carrier gas conduit, wherein the carrier gas passage is disposed within the liquid precursor/carrier gas conduit, and the liquid precursor passage is disposed within the carrier gas passage, the atomizer assembly further including a co-axial atomizer nozzle having a first end coupled to the liquid precursor/carrier gas conduit and a second end opening into the evaporator chamber.
Claim 9
Dependent Claim
19 words
The evaporator as in claim 4 further comprising a heating element thermally coupled to the wall of the chamber.
Claim 10
Dependent Claim
25 words
The evaporator as in claim 7 wherein: the evaporator is thermally conductive; and the heating element comprises a heating collar clamped to the evaporator body.
Claim 11
Dependent Claim
103 words
An evaporator as in claim 4 wherein: the chamber is at least partially defined by a generally vertical wall; the atomizer assembly includes a liquid precursor channel disposed in the body and in flow communication with the liquid precursor inlet, the liquid precursor channel comprising a liquid precursor tube which extends through the wall into the chamber, and a carrier gas channel in flow communication with the carrier gas inlet, the carrier gas channel being oriented perpendicular to the liquid precursor channel and extending through the wall into the chamber at a location proximate to a downstream end of the liquid precursor channel.
Claim 12
Dependent Claim
30 words
The evaporator as in claim 9 wherein the liquid precursor tube includes a 45 degree beveled dispensing end positioned proximate to the carrier gas channel to facilitate a Venturi effect.
Claim 13
Dependent Claim
66 words
An evaporator as in claim 9 wherein the liquid precursor inlet and carrier gas inlet are disposed in an upper region of the chamber, and wherein the vapor outlet comprises: an outlet port disposed in an upper region of the evaporator body; and a conduit extending from the outlet port and through an upper region of the chamber into a lower region of the evaporator chamber.
Claim 14
Dependent Claim
35 words
An evaporator as in claim 9 wherein: the vertical wall is a cylindrical wall in an upper region of the chamber, and the chamber further includes a lower region defined by a truncated, conical wall.
Claim 15
Dependent Claim
41 words
The evaporator as in claim 4 wherein the vapor outlet extends through the cover and opens into the chamber, and the body includes a cover, the evaporator further comprising: an outlet tube circumscribing the vapor outlet and extending into the chamber.
Claim 16
Dependent Claim
12 words
The evaporator as in claim 4, wherein the evaporator body is aluminum.
Claim 17
Dependent Claim
109 words
An evaporator comprising: a body; an evaporation surface supported by the body, the evaporation surface being curved and having a first section that defines a first contained space of a cross-sectional area, and having a second section that defines a second contained space of a cross-sectional area less than the cross-sectional area of the first contained space; a first port directed generally tangentially to the first section evaporator surface; and a second port for conducting a gas from the evaporator, the second port having an inlet disposed in the second contained space, space, the second port extending through the first contained space to a region external to the evaporator.
Claim 18
Dependent Claim
109 words
An evaporator comprising: a body; an evaporation surface supported by the body, the evaporation surface being curved and having a first section that defines a first contained space of a cross-sectional area, and having a second section that defines a second contained space of a cross-sectional area less than the cross-sectional area of the first contained space; a first port directed generally tangentially to the first section evaporator surface; and a second port for conducting a gas from the evaporator, the second port having an inlet disposed in the second contained space, space, the second port extending through the first contained space to a region external to the evaporator.
Claim 19
Dependent Claim
38 words
An evaporator as in claim 15, the first section being of a first diameter and curved about an axis, and the second section being of a second diameter less than the first diameter and curved about an axis.
Claim 20
Dependent Claim
61 words
An evaporator as in claim 15 wherein the evaporator surface is curved about an axis, the first section being of a first diameter over a first portion of the axis, and the second section being contiguous to the first section and of a diameter decreasing from the first diameter over a second portion of the axis extending from the first portion.
Claim 21
Dependent Claim
21 words
An evaporator as in claim 17 wherein the first section is a cylinder and the second section is a truncated cone.
Claim 22
Dependent Claim
10 words
An evaporator as in claim 15 further comprising an atomizer.
Claim 23
Dependent Claim
62 words
An evaporator as in claim 19 wherein the atomizer comprises: a first conduit having an inlet end and outlet end, the outlet being outlet orifice of the atomizer; and a second conduit having an inlet end and an outlet end, the second conduit being traverse to the first conduit and the outlet end of the second conduit terminating in the first conduit.
Claim 24
Dependent Claim
70 words
An evaporator as in claim 19 wherein the atomizer comprises: a first conduit having an inlet end and an outlet end, the outlet end being the outlet orifice of the atomizer; and a second conduit having an inlet end and an outlet end, the second conduit being disposed within the first conduit and the outlet end of the second conduit being coterminous with the outlet end of the first conduit.
Claim 25
Dependent Claim
58 words
An evaporator, comprising: means for introducing liquid precursor into the evaporator; means for introducing carrier gas into the evaporator to entrain the liquid precursor; means for facilitating angular acceleration of the carrier gas to deposit the entrained liquid precursor on a surface of the evaporator; and means for heating the evaporator surface to evaporate the deposited liquid precursor.
Claim 26
Dependent Claim
58 words
An evaporator, comprising: means for introducing liquid precursor into the evaporator; means for introducing carrier gas into the evaporator to entrain the liquid precursor; means for facilitating angular acceleration of the carrier gas to deposit the entrained liquid precursor on a surface of the evaporator; and means for heating the evaporator surface to evaporate the deposited liquid precursor.
Claim 27
Dependent Claim
45 words
The evaporator as in claim 22 further comprising: means for forming a low pressure region within a lower portion of the evaporator; and means for drawing the evaporated liquid precursor out of the evaporator through a vapor outlet in an upper portion of the evaporator.
Claim 28
Dependent Claim
144 words
An evaporator for supplying a precursor gas to a chemical vapor deposition reactor, the evaporator comprising: an evaporation chamber comprising an upper portion comprising a cylindrical wall and a lower portion comprising a truncated conical wall; a first inlet line for carrying a precursor liquid and a second inlet line for carrying a carrier gas, the first and second lines having downstream terminals proximate to each other such that a flow of the precursor liquid through the first line interacts with a flow of the carrier gas through the second line at the terminal of the first line so as to create a mixed flow comprising droplets of the precursor liquid entrained in the carrier gas; a heater for supplying thermal energy to a wall of the evaporation chamber; and an outlet line for conducting the precursor gas to the chemical vapor deposition reactor.
Claim 29
Dependent Claim
144 words
An evaporator for supplying a precursor gas to a chemical vapor deposition reactor, the evaporator comprising: an evaporation chamber comprising an upper portion comprising a cylindrical wall and a lower portion comprising a truncated conical wall; a first inlet line for carrying a precursor liquid and a second inlet line for carrying a carrier gas, the first and second lines having downstream terminals proximate to each other such that a flow of the precursor liquid through the first line interacts with a flow of the carrier gas through the second line at the terminal of the first line so as to create a mixed flow comprising droplets of the precursor liquid entrained in the carrier gas; a heater for supplying thermal energy to a wall of the evaporation chamber; and an outlet line for conducting the precursor gas to the chemical vapor deposition reactor.
Claim 30
Dependent Claim
42 words
The evaporator as in claim 24 wherein a downstream end of the second line is oriented such that a flowpath of the carrier gas is generally tangent to a portion of the cylindrical wall as the carrier gas enters the evaporation chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-04 | 2001-02-03 | 2001-08-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-04 | 2005-02-03 | 2005-08-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-04 | 2009-02-03 | 2009-08-05 | $7700.00 | Window Closed / Lapsed |