US5651725A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus and method for polishing workpiece
Assignee: Ebara Corp
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Filing: 1996-04-10
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Granted: 1997-07-29
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Expires: 2016-04-10
Abstract
Abstract An apparatus and method for polishing a workpiece such as a semiconductor wafer to a flat mirror finish. The workpiece is held by a top ring, and a surface of the workpiece is polished by pressing the workpiece against an abrasive cloth mounted on a turntable while applying an abrasive solution onto the abrasive cloth. While the workpiece is being polished, a surface of the abrasive cloth is dressed while applying a dressing liquid onto the abrasive cloth. A polishing operation and a dressing operation are performed in such a state that the abrasive solution and the dressing liquid do not interfere with each other.
Inventors
- 👤 Ritsuo Kikuta
- 👤 You Ishii
- 👤 Tamami Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 15:53
CPC Classifications
B; B24; B24B; B24B53/00; B24B53/017
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
127 words
An apparatus for polishing a workpiece, comprising: a turntable with an abrasive cloth mounted on an upper surface thereof; a top ring disposed above said turntable and having a holding surface for holding a workpiece to be polished and pressing the workpiece against said abrasive cloth; a dressing head for dressing said abrasive cloth provided at a location away from said top ring; a partition wall for partitioning a surface of said abrasive cloth into a polishing area in which said top ring is operated and a dressing area in which said dressing head is operated; a nozzle for supplying an abrasive solution onto said polishing area on said abrasive cloth; and a nozzle for supplying a dressing liquid onto said dressing area on said abrasive cloth.
Claim 2
Independent Claim
127 words
An apparatus for polishing a workpiece, comprising: a turntable with an abrasive cloth mounted on an upper surface thereof; a top ring disposed above said turntable and having a holding surface for holding a workpiece to be polished and pressing the workpiece against said abrasive cloth; a dressing head for dressing said abrasive cloth provided at a location away from said top ring; a partition wall for partitioning a surface of said abrasive cloth into a polishing area in which said top ring is operated and a dressing area in which said dressing head is operated; a nozzle for supplying an abrasive solution onto said polishing area on said abrasive cloth; and a nozzle for supplying a dressing liquid onto said dressing area on said abrasive cloth.
Claim 3
Dependent Claim
39 words
An apparatus according to claim 1, wherein said partition wall comprises two partition members, one of which prevents the abrasive solution from entering said dressing area, the other of which prevents the dressing liquid from entering said polishing area.
Claim 4
Dependent Claim
25 words
An apparatus according to claim 2, wherein said partition members are provided away from each other and extend in a radial direction of said turntable.
Claim 5
Dependent Claim
14 words
An apparatus according to claim 3, wherein said partition member is an elongated member.
Claim 6
Dependent Claim
30 words
An apparatus according to claim 1, further comprising a gutter for recovering the abrasive solution and a gutter for recovering the dressing liquid, said gutters being disposed around said turntable.
Claim 7
Independent Claim
81 words
A method for polishing a workpiece, comprising the steps of: holding a workpiece by a top ring; polishing a surface of the workpiece by pressing the workpiece against an abrasive cloth mounted on a turntable while applying an abrasive solution onto said abrasive cloth; and dressing a surface of said abrasive cloth while applying a dressing liquid onto said abrasive cloth during polishing in such a state that the abrasive solution and the dressing liquid do not interfere with each other.
Claim 8
Independent Claim
81 words
A method for polishing a workpiece, comprising the steps of: holding a workpiece by a top ring; polishing a surface of the workpiece by pressing the workpiece against an abrasive cloth mounted on a turntable while applying an abrasive solution onto said abrasive cloth; and dressing a surface of said abrasive cloth while applying a dressing liquid onto said abrasive cloth during polishing in such a state that the abrasive solution and the dressing liquid do not interfere with each other.
Claim 9
Dependent Claim
38 words
A method according to claim 6, wherein interference of the abrasive solution and the dressing liquid is prevented by a partition wall which partitions a surface of said abrasive cloth into a polishing area and a dressing area.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-07-28 | 2001-01-27 | 2001-07-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-07-28 | 2005-01-27 | 2005-07-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-07-28 | 2009-01-27 | 2009-07-29 | $7700.00 | Window Closed / Lapsed |