US5650851A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Speckle interference method for remote thickness measurement of a sheet and layer and an apparatus therefor
Assignee: National Research Council Canada
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Filing: 1995-06-26
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Granted: 1997-07-22
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Expires: 2015-06-26
Abstract
Abstract A method and an apparatus are disclosed for remotely determining the thickness of a transparent or semi-transparent suspended sheet or solid or liquid layer, e.g. ice, on a solid surface which is either light-absorbent or highly reflective. The invention proposes directing a coherent beam of light onto a location on the layer such that the beam undergoes partial reflection from the top of the layer and partial reflection from the bottom of the layer or the underlying surface. Due to the coherency of the beam, two overlapping speckle patterns are produced which give rise to an interference pattern having interference fringes. The pattern can be caused to shift across the field of view and the shift, determined by a number of the passing interference fringes can be interpreted in terms of the thickness of the layer.
Inventors
- 👤 Robert E. Gagnon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 05:13
CPC Classifications
B; B64; B64D; B64D15/00; B64D15/20; G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0675
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
195 words
A method of remotely determining the thickness of a transparent or semi-transparent layer of a liquid or a solid, the method comprising the steps of: a) irradiating a location on the layer with a beam of coherent light, b) allowing a part of said beam to reflect off of the top of said layer at the irradiated location to produce a first speckle pattern in a field of view at said location, and allowing another part of said beam to pass through said layer and reflect off of the bottom of said layer to produce a second speckle pattern in said field of view, in a manner for said first and second speckle patterns to produce, due to overlapping, an interference pattern in said field of view; c) changing a parameter of said beam, the parameter being such that a change thereof causes a change of optical path of said beam within said layer and thus causes the interference pattern to move across said field of view by a number of interference fringes, and d) determining the number of said interference fringes of step c), the number being indicative of a thickness of the layer.
Claim 2
Independent Claim
195 words
A method of remotely determining the thickness of a transparent or semi-transparent layer of a liquid or a solid, the method comprising the steps of: a) irradiating a location on the layer with a beam of coherent light, b) allowing a part of said beam to reflect off of the top of said layer at the irradiated location to produce a first speckle pattern in a field of view at said location, and allowing another part of said beam to pass through said layer and reflect off of the bottom of said layer to produce a second speckle pattern in said field of view, in a manner for said first and second speckle patterns to produce, due to overlapping, an interference pattern in said field of view; c) changing a parameter of said beam, the parameter being such that a change thereof causes a change of optical path of said beam within said layer and thus causes the interference pattern to move across said field of view by a number of interference fringes, and d) determining the number of said interference fringes of step c), the number being indicative of a thickness of the layer.
Claim 3
Dependent Claim
17 words
The method according to claim 1 wherein the parameter is the angle of incidence of said beam.
Claim 4
Dependent Claim
15 words
The method according to claim 1 wherein the parameter is the wavelength of the light.
Claim 5
Dependent Claim
24 words
The method according to claim 1 further comprising the step of calculating the thickness of said layer from said number of said interference fringes.
Claim 6
Dependent Claim
21 words
The method according to claim 1 wherein the step d) is performed by viewing said pattern with a defocused video camera.
Claim 7
Dependent Claim
31 words
The method according to claim 1, further comprising, varying said location on said layer and repeating step d) a number of times to reduce the effect of unevenness of said surface.
Claim 8
Independent Claim
342 words
A method of remotely determining the thickness of a transparent or semi-transparent layer of a liquid or a solid, the method comprising the steps of: a) irradiating a location on the layer with a first beam of coherent light, b) allowing a part of said first beam to reflect off of the top of said layer at the irradiated location to produce a first speckle pattern in a field of view at said location, and allowing another part of said first beam to pass through said layer and reflect off of the bottom of said layer to produce a second speckle pattern in said field of view, in a manner for said first and second speckle patterns to produce, due to overlapping, a first interference pattern in said field of view; c) irradiating said location on the layer with a second beam of coherent light of a different wavelength than that of said first beam, d) allowing a part of said second beam to reflect off of the top of said layer at the irradiated location to produce a third speckle pattern in a field of view at said location, and allowing another part of said second beam to pass through said layer and reflect off of the bottom of said layer to produce a fourth speckle pattern in said field of view, in a manner for said third and fourth speckle patterns to produce, due to overlapping, a second interference pattern in said field of view; e) varying the optical path of said first beam through the layer to cause said first interference pattern to move across said field of view by a number of interference fringes, f) determining the number of interference fringes of step e), g) determining the number of interference fringes of said second interference pattern that move across said field of view as a result of a change of thickness of said layer, h) determining the thickness of said layer by adjusting the number of fringes of step f) using the number of fringes of step g).
Claim 9
Independent Claim
342 words
A method of remotely determining the thickness of a transparent or semi-transparent layer of a liquid or a solid, the method comprising the steps of: a) irradiating a location on the layer with a first beam of coherent light, b) allowing a part of said first beam to reflect off of the top of said layer at the irradiated location to produce a first speckle pattern in a field of view at said location, and allowing another part of said first beam to pass through said layer and reflect off of the bottom of said layer to produce a second speckle pattern in said field of view, in a manner for said first and second speckle patterns to produce, due to overlapping, a first interference pattern in said field of view; c) irradiating said location on the layer with a second beam of coherent light of a different wavelength than that of said first beam, d) allowing a part of said second beam to reflect off of the top of said layer at the irradiated location to produce a third speckle pattern in a field of view at said location, and allowing another part of said second beam to pass through said layer and reflect off of the bottom of said layer to produce a fourth speckle pattern in said field of view, in a manner for said third and fourth speckle patterns to produce, due to overlapping, a second interference pattern in said field of view; e) varying the optical path of said first beam through the layer to cause said first interference pattern to move across said field of view by a number of interference fringes, f) determining the number of interference fringes of step e), g) determining the number of interference fringes of said second interference pattern that move across said field of view as a result of a change of thickness of said layer, h) determining the thickness of said layer by adjusting the number of fringes of step f) using the number of fringes of step g).
Claim 10
Independent Claim
130 words
A system for remotely determining the thickness of a transparent or semi-transparent layer of a liquid or a solid, the system comprising: a) means for irradiating a location on the layer with a beam of coherent light in a manner to produce two overlapping speckle patterns with a resulting interference pattern in a field of view, the pattern defining interference fringes, b) means for changing a parameter of the beam, the parameter being such that a change thereof causes a change of optical path of said beam within said layer and thus causes said interference pattern to move across the field of view by a number of said interference fringes, and c) means for determining the number of the interference fringes which move as a result of the parameter change.
Claim 11
Independent Claim
130 words
A system for remotely determining the thickness of a transparent or semi-transparent layer of a liquid or a solid, the system comprising: a) means for irradiating a location on the layer with a beam of coherent light in a manner to produce two overlapping speckle patterns with a resulting interference pattern in a field of view, the pattern defining interference fringes, b) means for changing a parameter of the beam, the parameter being such that a change thereof causes a change of optical path of said beam within said layer and thus causes said interference pattern to move across the field of view by a number of said interference fringes, and c) means for determining the number of the interference fringes which move as a result of the parameter change.
Claim 12
Dependent Claim
26 words
The system according to claim 8 wherein said means for changing a parameter of the beam is a means for changing the wavelength of said light.
Claim 13
Dependent Claim
21 words
The system according to claim 8 wherein the means for irradiating said location is a dye laser or a diode laser.
Claim 14
Dependent Claim
31 words
The system according to claim 8 wherein said means for changing a parameter of said beam is a means for changing the angle of incidence of said beam on said layer.
Claim 15
Dependent Claim
33 words
The system according to claim 8 wherein said means for irradiating said location and said means for determining the number of the interference fringes are disposed in substantially the same line of sight.
References Cited (Backward Citations)
US4660980A
Cited
US5276501A
Cited
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