US5650362A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Oriented conductive film and process for preparing the same
Assignee: EpiPhotonics Corp
•
Filing: 1995-05-11
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Granted: 1997-07-22
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Expires: 2015-05-11
Abstract
Abstract An oriented conductive thin film useful as a thin film electrode or a thin film resistor may be made by coating a single crystal substrate with a metal oxide precursor solution containing an organometallic compound, and subjecting the coating layer to thermal decomposition, followed by annealing the coated substrate. The result is an epitaxial or oriented perovskite ABO3 structure oxide conductive thin film. A further layer of an epitaxial or oriented ABO3 type ferroelectric thin film can be formed on the conductive thin film.
Inventors
- 👤 Keiichi Nashimoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 06:53
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/40; H10D1/47; H10D1/474; H10D1/60; H10D1/68; H10D1/692; H10D1/682; H10N; H10N30/00; H10N30/01; H10N30/06; H10N30/80; H10N30/87; H10N30/877; H10N30/878; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12528; Y10T428/12535; Y10T428/12583; Y10T428/1259; Y10T428/12771
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
56 words
A process for preparing a mono-axially oriented conductive thin film comprising coating a single crystal substrate with a metal oxide precursor solution comprising an unhydrolyzed organometallic compound and subjecting the coating layer to thermal decomposition followed by annealing the coated substrate to form an epitaxial or mono-axially oriented perovskite ABO 3 structure oxide conductive thin film.
Claim 2
Dependent Claim
56 words
A process for preparing a mono-axially oriented conductive thin film comprising coating a single crystal substrate with a metal oxide precursor solution comprising an unhydrolyzed organometallic compound and subjecting the coating layer to thermal decomposition followed by annealing the coated substrate to form an epitaxial or mono-axially oriented perovskite ABO 3 structure oxide conductive thin film.
Claim 3
Dependent Claim
50 words
A process as claimed in claim 1, wherein said organometallic compound is a mixture of organometallic compounds selected from the group consisting of metal alkoxides and organic acid metal salts, or a reaction product of organometallic compounds selected from the group consisting of metal alkoxides and organic acid metal salts.
Claim 4
Dependent Claim
24 words
A process as claimed in claim 1, wherein said single crystal substrate is an oxide single crystal substrate or a semiconductor single crystal substrate.
Claim 5
Dependent Claim
23 words
A process as claimed in claim 1, wherein said single crystal substrate has an epitaxial or oriented buffer layer on the surface thereof.
Claim 6
Dependent Claim
20 words
A process as claimed in claim 1, wherein said oxide conductive thin film is a film of BaPbO 3 .
Claim 7
Dependent Claim
40 words
A process as claimed in claim 1, wherein said process further comprises forming an epitaxial or oriented thin film of a perovskite ABO 3 structure ferroelectric substance on said epitaxial or oriented perovskite ABO 3 structure oxide conductive thin film.
Claim 8
Dependent Claim
45 words
A process as claimed in claim 1, wherein said thermal decomposition is carried out by heating the coated substrate at a rate of temperature rise of from 0.1 to 500° C./sec and maintaining the coated substrate at a temperature of from 100° to 500° C.
Claim 9
Dependent Claim
44 words
A process as claimed in claim 1, wherein said annealing is carried out by heating the coated substrate at a rate of temperature rise of from 0.1° to 500° C./sec and maintaining the coated substrate at a temperature of from 300° to 1200° C.
Claim 10
Dependent Claim
21 words
A process as claimed in claim 1, wherein said oriented conductive thin film has a thickness of up to 0.1 micron.
Claim 11
Dependent Claim
21 words
A process as claimed in claim 1, wherein said oriented conductive thin film has a thickness of up to 0.35 micron.
Claim 12
Dependent Claim
21 words
A process as claimed in claim 1, wherein said oriented conductive thin film has a thickness of up to 1 micron.
Claim 13
Dependent Claim
14 words
A process as claimed in claim 1, wherein said process is a non-aqueous process.
Claim 14
Dependent Claim
19 words
A process as claimed in claim 1, wherein said organometallic compound is not hydrolyzed prior to said thermal decomposition.
Claim 15
Dependent Claim
18 words
A process as claimed in claim 1, wherein said organometallic compound is not hydrolyzed prior to said annealing.
Claim 16
Dependent Claim
57 words
A non-aqueous process for preparing a mono-axially oriented conductive thin film comprising coating a single crystal substrate with a metal oxide precursor solution comprising an unhydrolyzed organometallic compound and subjecting the coating layer to thermal decomposition followed by annealing the coated substrate to form an epitaxial or mono-axially oriented perovskite ABO 3 structure oxide conductive thin film.
Claim 17
Dependent Claim
57 words
A non-aqueous process for preparing a mono-axially oriented conductive thin film comprising coating a single crystal substrate with a metal oxide precursor solution comprising an unhydrolyzed organometallic compound and subjecting the coating layer to thermal decomposition followed by annealing the coated substrate to form an epitaxial or mono-axially oriented perovskite ABO 3 structure oxide conductive thin film.
Claim 18
Dependent Claim
22 words
A process as claimed in claim 15, wherein said organometallic compound is not hydrolyzed prior to formation of said conductive thin film.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2000-07-21 | 2001-01-20 | 2001-07-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-07-21 | 2005-01-20 | 2005-07-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-07-21 | 2009-01-20 | 2009-07-22 | $7700.00 | Window Closed / Lapsed |