US5647724A — Substrate transport apparatus with dual substrate…

Claim 1

Independent Claim 49 words

A substrate transport apparatus comprising: a movable arm assembly having a general X-shaped section with proximal arms rotatably connected to each other at a center of the X-shaped section; and two substrate holders, each of the holders being connected to a different pair of ends of the X-shaped section.

Claim 2

Dependent Claim 49 words

A substrate transport apparatus comprising: a movable arm assembly having a general X-shaped section with proximal arms rotatably connected to each other at a center of the X-shaped section; and two substrate holders, each of the holders being connected to a different pair of ends of the X-shaped section.

Claim 3

Dependent Claim 32 words

An apparatus as in claim 1 wherein the movable arm assembly includes two pairs of distal arms connecting the substrate holders to the different pairs of the ends of the X-shaped section.

Claim 4

Dependent Claim 20 words

An apparatus as in claim 2 wherein the distal arms are pivotably connected to the ends of the X-shaped section.

Claim 5

Dependent Claim 21 words

An apparatus as in claim 1 wherein the X-shaped section has three arms pivotably connected together by a coaxial drive shaft.

Claim 6

Dependent Claim 29 words

An apparatus as in claim 1 wherein the two substrate holders are located in parallel paths of extension and retraction with one path located directly above the other path.

Claim 7

Dependent Claim 74 words

An apparatus as in claim 1 wherein the proximal arms each have an upper arm section and a lower arm section, the lower arm section of a first one of the proximal arms is adapted to pass beneath the upper arm section of a second one of the proximal arms and, the lower arm section of the second proximal arm is adapted to pass beneath the upper arm section of the first proximal arm.

Claim 8

Dependent Claim 19 words

An apparatus as in claim 6 wherein the lower arm sections have overhang sections that project towards the center.

Claim 9

Dependent Claim 100 words

A substrate transport apparatus comprising: a coaxial drive shaft assembly having a first drive shaft and a second drive shaft; a movable arm assembly with four proximal arm sections fixedly connected to the coaxial drive shaft assembly, each of the proximal arm sections extending from the shaft assembly at a different height of the shaft assembly, first and third ones of the proximal arm sections being fixedly connected to the first drive shaft and, second and fourth ones of the proximal arm sections being fixedly connected to the second drive shaft; and substrate holders connected to the movable arm assembly.

Claim 10

Dependent Claim 100 words

A substrate transport apparatus comprising: a coaxial drive shaft assembly having a first drive shaft and a second drive shaft; a movable arm assembly with four proximal arm sections fixedly connected to the coaxial drive shaft assembly, each of the proximal arm sections extending from the shaft assembly at a different height of the shaft assembly, first and third ones of the proximal arm sections being fixedly connected to the first drive shaft and, second and fourth ones of the proximal arm sections being fixedly connected to the second drive shaft; and substrate holders connected to the movable arm assembly.

Claim 11

Dependent Claim 17 words

An apparatus as in claim 8 wherein the movable arm assembly has a general changeable X-shaped configuration.

Claim 12

Dependent Claim 31 words

An apparatus as in claim 8 wherein the movable arm assembly includes two pairs of distal arms connecting two of the substrate holders to different pairs of the proximal arm sections.

Claim 13

Dependent Claim 19 words

An apparatus as in claim 8 wherein the four proximal arm sections are comprised of only three arm members.

Claim 14

Dependent Claim 41 words

An apparatus as in claim 8 wherein the apparatus has two substrate holders connected to the movable arm assembly, the two substrate holders are located in parallel paths of extension and retraction with one path located directly above the other path.

Claim 15

Dependent Claim 25 words

An apparatus as in claim 8 wherein two of the proximal arm sections have upper overhang sections that project towards the coaxial drive shaft assembly.

Claim 16

Independent Claim 56 words

A method of transporting substrates into and out of processing chambers in a substrate processing apparatus, the method comprising steps of: moving crossed arms of a general X-shaped movable arm assembly in opposite directions of rotation about a center of the general X-shape; and moving two substrate holders in opposite directions as the arms are moved.

Claim 17

Independent Claim 56 words

A method of transporting substrates into and out of processing chambers in a substrate processing apparatus, the method comprising steps of: moving crossed arms of a general X-shaped movable arm assembly in opposite directions of rotation about a center of the general X-shape; and moving two substrate holders in opposite directions as the arms are moved.

Claim 18

Dependent Claim 30 words

A method as in claim 14 wherein the step of moving the crossed arms comprises rotating two coaxial drive shafts connected to the crossed arms in opposite directions of rotation.

Claim 19

Dependent Claim 36 words

A method as in claim 14 wherein the step of moving the two substrate holders comprises moving the holders along substantially parallel paths with one of the holders moving above the other one of the holders.

Claim 20

Independent Claim 77 words

A method of transporting substrates into and out of processing chambers in a substrate processing apparatus, the method comprising steps of: providing a substrate transport apparatus with a movable arm assembly having a reconfigurable general X-shaped section and two substrate holders movable between extended and retracted positions; and moving the two substrate holders in opposite unison between their extended and retracted positions with a second one of the holders moving above a first one of the holders.

Claim 21

Independent Claim 77 words

A method of transporting substrates into and out of processing chambers in a substrate processing apparatus, the method comprising steps of: providing a substrate transport apparatus with a movable arm assembly having a reconfigurable general X-shaped section and two substrate holders movable between extended and retracted positions; and moving the two substrate holders in opposite unison between their extended and retracted positions with a second one of the holders moving above a first one of the holders.

Claim 22

Independent Claim 98 words

A method of transporting substrates into and out of processing chambers in a substrate processing apparatus, the method comprising steps of: moving drive arms of a movable arm assembly in opposite directions of rotation about a center of the movable arm assembly, wherein the step of moving the drive arms comprises rotating two coaxial drive shafts connected to the drive arms in opposite directions of rotation; and moving two substrate holders on a same side of the movable arm assembly in opposite directions relative to the center of the movable arm assembly as the drive arms are moved.

Claim 23

Independent Claim 98 words

A method of transporting substrates into and out of processing chambers in a substrate processing apparatus, the method comprising steps of: moving drive arms of a movable arm assembly in opposite directions of rotation about a center of the movable arm assembly, wherein the step of moving the drive arms comprises rotating two coaxial drive shafts connected to the drive arms in opposite directions of rotation; and moving two substrate holders on a same side of the movable arm assembly in opposite directions relative to the center of the movable arm assembly as the drive arms are moved.

Claim 24

Dependent Claim 36 words

A method as in claim 18 wherein the step of moving the two substrate holders comprises moving the holders along substantially parallel paths with one of the holders moving above the other one of the holders.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2000-07-14	2001-01-13	2001-07-15	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2004-07-14	2005-01-13	2005-07-15	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2008-07-14	2009-01-13	2009-07-15	$7700.00	Window Closed / Lapsed

Substrate transport apparatus with dual substrate holders

Abstract

Inventors

Bibliographic Details

Claims Analysis

References Cited (Backward Citations)

USPTO Annuity & Maintenance Windows

Assigned Categories & Tags

Assign Category Tag