US5646731A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Interferometric detecting/imaging method based on multi-pole sensing
Assignee: International Business Machines Corp
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Filing: 1995-08-04
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Granted: 1997-07-08
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Expires: 2015-08-04
Abstract
Abstract A method for detecting and/or imaging a workpiece. In a detection aspect, the method comprises the steps of sampling an electromagnetic wave packet representative of workpiece properties and comprising encoded wave information derivable from a multi-pole interactive coupling between a probe tip and the workpiece; decoding said electromagnetic wave packet by interrogating at least one of its phase and amplitude information; and, using the decoding information as a means for detecting the presence of the workpiece. In an imaging aspect, the method includes incorporating the previous steps in a scanning operation for developing an image representative of the workpiece.
Inventors
- 👤 Hemantha Kumar Wickramasinghe
- 👤 Frederic Zenhausern
- 👤 Yves Martin
- 👤 Martin Patrick O'Boyle
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 08:09
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/18; G01Q60/22; B; B82; B82Y; B82Y20/00; B82Y35/00
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
80 words
A method for detecting the presence of a workpiece, the method comprising the steps of: 1) sampling an electromagnetic wave packet representative of workpiece properties and comprising encoded wave information derivable from a multi-pole interactive coupling between a probe and the workpiece; 2) decoding said electromagnetic wave packet by interrogating at least one of its phase and amplitude information using an interference reference wave; and, 3) using said decoding information as a means for detecting the presence of said workpiece.
Claim 2
Independent Claim
80 words
A method for detecting the presence of a workpiece, the method comprising the steps of: 1) sampling an electromagnetic wave packet representative of workpiece properties and comprising encoded wave information derivable from a multi-pole interactive coupling between a probe and the workpiece; 2) decoding said electromagnetic wave packet by interrogating at least one of its phase and amplitude information using an interference reference wave; and, 3) using said decoding information as a means for detecting the presence of said workpiece.
Claim 3
Dependent Claim
29 words
A method according to claim 1, further comprising assembling a map of the workpiece surface from data obtained from steps (1&2) for developing an image representative of the workpiece.
Claim 4
Dependent Claim
18 words
The method according to claim 2, wherein developing the image includes a scanning operation comprising multiple sampling steps.
Claim 5
Dependent Claim
44 words
A method according to claim 1, wherein step (1) sampling comprises creating an interference effect between an incoming electromagnetic wave generated by a source and a scattered electromagnetic wave generated by an electromagnetic radiation interaction between a probe tip dipole and a workpiece dipole.
Claim 6
Dependent Claim
26 words
A method according to claim 4, wherein the sampling comprises a dipole coupling of two externally driven dipoles including respectively the probe tip and workpiece dipoles.
Claim 7
Dependent Claim
15 words
A method according to claim 5, wherein the sampling comprises a predominantly magnetic dipole coupling.
Claim 8
Dependent Claim
15 words
A method according to claim 5, wherein the sampling comprises a predominantly electric dipole coupling.
Claim 9
Dependent Claim
22 words
A method according to claim 1, wherein the encoded wave information comprises a scattered local evanescent or propagating or standing electromagnetic field.
Claim 10
Dependent Claim
18 words
A method according to claim 1, wherein step (2) comprises decoding said wave packet by employing an interferometer.
Claim 11
Dependent Claim
12 words
A method according to claim 9, comprising employing a differential Nomarski interferometer.
Claim 12
Dependent Claim
17 words
A method according to claim 9, wherein step 2 comprises decoding said wavepacket by employing self-interference interferometry.
Claim 13
Dependent Claim
43 words
A method according to claim 1, comprising generating a time-variable interactive coupling by modulating at least one of the wavelength of the electromagnetic wave packet, the relative positioning of probe and workpiece, and using an external applied electromagnetic field to the interaction region.
References Cited (Backward Citations)
US5340981A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-07-07 | 2001-01-06 | 2001-07-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-07-07 | 2005-01-06 | 2005-07-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-07-07 | 2009-01-06 | 2009-07-08 | $7700.00 | Window Closed / Lapsed |