Abstract A method for manufacturing self-aligned optic fiber-optic element coupling devices is described. The method comprises the steps of forming a first insulating film on a silicon substrate, forming metal pads on the first insulating film to have a predetermined separation distance, forming a second insulating film on the first insulating film and the metal pads, forming a photosensitive film to have first openings and a second opening, the first openings positioned on the metal pads with the metal pads partially covered with the second insulating films and the second opening positioned between the first openings on the first and second insulating films and extended to a side of the silicon substrate, removing the first and second insulating films exposed by the first and second openings using the photosensitive film as mask to exposure the silicon substrate and the metal pads, removing the photosensitive film, forming a V-shape groove in the exposed portion of the silicon substrate using the first and second insulating films as etching mask, and forming solder bumps on the metal pads.
A method for manufacturing a self-aligned optic fiber-optic element coupling device comprising the steps of: forming a first insulating film on a silicon substrate; forming two spaced apart metal pads on the first insulating film; forming a second insulating film on the first insulating film and on at least a part of the metal pads; applying a patterned photosensitive film on the surface of said second insulating film such that a plurality of first openings positioned on the metal pads with the metal pads partially covered with a portion of the second insulating film and a second opening positioned between the first openings and extending to a side of the silicon substrate are defined; removing the second insulating film defined by said first openings and removing the first and second insulating films defined by the second opening; removing the photosensitive film; forming a V-shaped groove in the exposed portion of the silicon substrate using the first and second insulating films as a mask; and forming solder bumps on the metal pads.
Claim 2
Independent Claim
171 words
A method for manufacturing a self-aligned optic fiber-optic element coupling device comprising the steps of: forming a first insulating film on a silicon substrate; forming two spaced apart metal pads on the first insulating film; forming a second insulating film on the first insulating film and on at least a part of the metal pads; applying a patterned photosensitive film on the surface of said second insulating film such that a plurality of first openings positioned on the metal pads with the metal pads partially covered with a portion of the second insulating film and a second opening positioned between the first openings and extending to a side of the silicon substrate are defined; removing the second insulating film defined by said first openings and removing the first and second insulating films defined by the second opening; removing the photosensitive film; forming a V-shaped groove in the exposed portion of the silicon substrate using the first and second insulating films as a mask; and forming solder bumps on the metal pads.
Claim 3
Dependent Claim
14 words
The method of claim 1 wherein the silicon substrate has a (100) crystal plane.
Claim 4
Dependent Claim
31 words
The method of claim 1, wherein the V-shaped groove forming step includes forming the V-shaped groove in the <100> direction to be parallel to a flat plane of the silicon substrate.
Claim 5
Dependent Claim
23 words
The method of claim 3, further comprising a step of etching the silicon substrate with KOH or EDP to form the V-shaped groove.