US5639345A
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US
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Two step etch back process having a convex and concave etch profile for improved etch uniformity across a substrate
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1996-01-11
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Granted: 1997-06-17
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Expires: 2016-01-11
Abstract
Abstract A novel method for improving the etch back uniformity for inter-metal-dielectric planarization was accomplished. Conventional single etch backs use a high polymer chemistry gas mixture (CF4/CHF3) to etch back the planar spin-on-glass (SOG) layer to a conformal insulating barrier layer over a patterned metal. The polymer producing etch gas eliminates micro-loading effects by providing the required selectivity (about 1.6) between the insulating barrier layer and SOG for good planarization, but results in poor etch back uniformity (about 12 to 15%) across the wafer when the SOG is etched. The improved method, of this invention, uses a partial first etch back in a downstream etcher using CF4/O2 having a etch rate that decreases from center to edge of wafer, thereby forming a convex SOG etch rate profile. The remaining SOG layer is then etched to the insulating barrier layer in the CF4/CHF3 etch gas having an etch rate that increases from center to edge of wafer. The characterisic convex etch rate profile of the first etch back compensates for the second etch back (concave etch rate profile) resulting in excellent total etch back uniformity (about 4%), while the second etch back in CF4/CHF3 provides the required selectivity for planarization.
Inventors
- 👤 Yuan-Chang Huang
- 👤 Yu Chen-Hua Douglas
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 14:16
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/092; Y; Y10; Y10S; Y10S438/00; Y10S438/941
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
273 words
A method for improving the etch back uniformity for an inter-metal-dielectric (IMD) layer on a semiconductor substrate over a patterned electrically conducting layer, comprising the steps of: providing a partially completed semiconductor substrate having semiconductor devices formed in and on said substrate surface, and further having a patterned electrically conducting layer electrically interconnecting said semiconductor devices; depositing a conformal insulating barrier layer over said patterned conducting layer, and elsewhere on said substrate; coating a spin-on-glass (SOG) on said insulating barrier layer, and thereby filling recesses formed by said patterned electrically conducting layer on said substrate; baking said spin-on-glass layer, and thereby out gassing and curing said spin-on-glass layer; repeating said coating of said spin-on-glass and said curing to provide a sufficiently thick spin-on-glass layer to form a planar surface over said recesses; etching back partially said spin-on-glass (SOG) layer, using a first etch back having an etch rate profile across said substrate wherein said etch rate decreases from the center to the perimeter of said substrate, thereby said remaining SOG layer increases in thickness from center to said perimeter of said substrate, thereby said SOG layer having a convex shape; etching back said SOG layer to the surface of said insulating barrier layer over said patterned electrically conducting layer using a second etch back having a etch rate profile across said substrate which increases in etch rate from said center to said perimeter of said substrate, said second etch back forming a planarized surface, with the surface of said SOG in said recesses coplanar with the surface of said insulating barrier layer, and thereby completing said improved etch back for said inter-metal-dielectric layer.
Claim 2
Independent Claim
273 words
A method for improving the etch back uniformity for an inter-metal-dielectric (IMD) layer on a semiconductor substrate over a patterned electrically conducting layer, comprising the steps of: providing a partially completed semiconductor substrate having semiconductor devices formed in and on said substrate surface, and further having a patterned electrically conducting layer electrically interconnecting said semiconductor devices; depositing a conformal insulating barrier layer over said patterned conducting layer, and elsewhere on said substrate; coating a spin-on-glass (SOG) on said insulating barrier layer, and thereby filling recesses formed by said patterned electrically conducting layer on said substrate; baking said spin-on-glass layer, and thereby out gassing and curing said spin-on-glass layer; repeating said coating of said spin-on-glass and said curing to provide a sufficiently thick spin-on-glass layer to form a planar surface over said recesses; etching back partially said spin-on-glass (SOG) layer, using a first etch back having an etch rate profile across said substrate wherein said etch rate decreases from the center to the perimeter of said substrate, thereby said remaining SOG layer increases in thickness from center to said perimeter of said substrate, thereby said SOG layer having a convex shape; etching back said SOG layer to the surface of said insulating barrier layer over said patterned electrically conducting layer using a second etch back having a etch rate profile across said substrate which increases in etch rate from said center to said perimeter of said substrate, said second etch back forming a planarized surface, with the surface of said SOG in said recesses coplanar with the surface of said insulating barrier layer, and thereby completing said improved etch back for said inter-metal-dielectric layer.
Claim 3
Dependent Claim
20 words
The method of claim 1, wherein the thickness of said patterned conducting layer is between about 4000 to 8000 Angstroms.
Claim 4
Dependent Claim
25 words
The method of claim 1, wherein said insulating barrier layer is composed of silicon oxide having a thickness from between about 7000 to 14000 Angstroms.
Claim 5
Dependent Claim
27 words
The method of claim 1, wherein said spin-on-glass is a multiple coating of a siloxane type having a total thickness of between about 3000 to 7000 Angstroms.
Claim 6
Dependent Claim
17 words
The method of claim 1, wherein said first etch back is performed in a downstream plasma etcher.
Claim 7
Dependent Claim
26 words
The method of claim 5, wherein the etch gas mixture used in said downstream etcher is carbon tetrafluoride (CF 4 ) and oxygen (O 2 ).
Claim 8
Dependent Claim
18 words
The method of claim 1, wherein said second etch back is performed in a reactive ion etcher (RIE).
Claim 9
Dependent Claim
27 words
The method of claim 7, wherein the etching gas mixture used in said reactive ion etcher is trifluoromethane (CF 3 H) and carbon tetrafluoride (CF 4 ).
Claim 10
Dependent Claim
29 words
The method of claim 1, wherein the etch rate ratio of said insulating barrier layer to said spin-on-glass is between about 1.2 to 1.9. for said second etch back.
Claim 11
Independent Claim
238 words
A method for improving the etch back uniformity for an inter-metal-dielectric (IMD) layer on a semiconductor substrate over a patterned conducting layer, comprising the steps of: providing a partially completed semiconductor substrate having semiconductor devices formed in and on said substrate surface, and further having a patterned conducting layer electrically interconnecting said semiconductor devices; depositing a conformal insulating barrier layer over said patterned conducting layer, and elsewhere on said substrate, said insulating barrier layer composed of silicon oxide (SiO 2 ); coating a spin-on-glass (SOG) layer on said first insulating layer, and thereby filling recesses formed by said patterned conducting layer on said substrate; baking said first spin-on-glass layer, and thereby out gassing and curing said spin-on-glass layer; repeating said coating of said spin-on-glass and said curing to provide a sufficiently thick spin-on-glass layer to form a planar surface over said recesses; etching back partially said spin-on-glass (SOG) layer, using a first etch back in a downstream plasma etcher, thereby said remaining SOG layer increases in thickness from center to perimeter of said substrate; etching back said SOG layer to the surface of said insulating barrier layer over said patterned conducting layer using a second etch back in a reactive ion etcher, said etch back forming a planarized surface, with said surface of said SOG in said recesses coplanar with the surface of said insulating barrier layer, and thereby completing said improved etch back of said spin-on-glass layer.
Claim 12
Independent Claim
238 words
A method for improving the etch back uniformity for an inter-metal-dielectric (IMD) layer on a semiconductor substrate over a patterned conducting layer, comprising the steps of: providing a partially completed semiconductor substrate having semiconductor devices formed in and on said substrate surface, and further having a patterned conducting layer electrically interconnecting said semiconductor devices; depositing a conformal insulating barrier layer over said patterned conducting layer, and elsewhere on said substrate, said insulating barrier layer composed of silicon oxide (SiO 2 ); coating a spin-on-glass (SOG) layer on said first insulating layer, and thereby filling recesses formed by said patterned conducting layer on said substrate; baking said first spin-on-glass layer, and thereby out gassing and curing said spin-on-glass layer; repeating said coating of said spin-on-glass and said curing to provide a sufficiently thick spin-on-glass layer to form a planar surface over said recesses; etching back partially said spin-on-glass (SOG) layer, using a first etch back in a downstream plasma etcher, thereby said remaining SOG layer increases in thickness from center to perimeter of said substrate; etching back said SOG layer to the surface of said insulating barrier layer over said patterned conducting layer using a second etch back in a reactive ion etcher, said etch back forming a planarized surface, with said surface of said SOG in said recesses coplanar with the surface of said insulating barrier layer, and thereby completing said improved etch back of said spin-on-glass layer.
Claim 13
Dependent Claim
20 words
The method of claim 10, wherein the thickness of said patterned conducting layer is between about 4000 to 8000 Angstroms.
Claim 14
Dependent Claim
18 words
The method of claim 10, wherein said silicon oxide barrier layer is deposited by chemical vapor deposition (CVD).
Claim 15
Dependent Claim
27 words
The method of claim 10, wherein said spin-on-glass is a multiple coating of a siloxane type having a total thickness of between about 3000 to 7000 Angstroms.
Claim 16
Dependent Claim
26 words
The method of claim 10, wherein the etch gas mixture used in said downstream etcher is carbon tetrafluoride (CF 4 ) and oxygen (O 2 ).
Claim 17
Dependent Claim
27 words
The method of claim 10, wherein the etching gas mixture used in said reactive ion etcher is trifluoromethane (CF 3 H) and carbon tetrafluoride (CF 4 ).
Claim 18
Independent Claim
286 words
A method for forming a planar inter-metal-dielectric layer on a patterned electrically conducting layer on a substrate, comprising the steps of: providing a semiconductor substrate having semiconductor devices formed in and on said substrate surface; depositing an electrically conducting layer; patterning said electrically conducting layer by masking and anisotropic plasma etching, thereby electrically interconnecting said semiconductor devices; depositing a conformal insulating barrier layer over said patterned conducting layer, and elsewhere on said substrate; coating a spin-on-glass (SOG) on said insulating layer, and thereby filling recesses formed by said patterned conducting layer on said substrate; baking said first spin-on-glass layer, and thereby out gassing and curing said spin-on-glass layer; repeating said coating of said spin-on-glass and said curing to provide a sufficiently thick spin-on-glass layer to form a planar surface over said recesses; etching back partially said spin-on-glass (SOG), using a first etch back etch rate profile across said substrate wherein said etch rate decreases from the center to the perimeter of said substrate, thereby said remaining SOG layer increases in thickness from center to said perimeter of said substrate, thereby said SOG layer having a convex shape; etching back said SOG layer to the surface of said first insulating barrier layer over said patterned conducting layer using a second etch back having a etch rate profile across said substrate which increases in etch rate from said center to said perimeter of said said substrate, said second etch back forming a planarized surface, the surface of said SOG in said recesses being coplanar with the surface of said insulating barrier layer, depositing a second insulating barrier layer on said SOG and said insulating barrier layer, and thereby providing a planar surface for subsequent patterned electrically conducting layers.
Claim 19
Independent Claim
286 words
A method for forming a planar inter-metal-dielectric layer on a patterned electrically conducting layer on a substrate, comprising the steps of: providing a semiconductor substrate having semiconductor devices formed in and on said substrate surface; depositing an electrically conducting layer; patterning said electrically conducting layer by masking and anisotropic plasma etching, thereby electrically interconnecting said semiconductor devices; depositing a conformal insulating barrier layer over said patterned conducting layer, and elsewhere on said substrate; coating a spin-on-glass (SOG) on said insulating layer, and thereby filling recesses formed by said patterned conducting layer on said substrate; baking said first spin-on-glass layer, and thereby out gassing and curing said spin-on-glass layer; repeating said coating of said spin-on-glass and said curing to provide a sufficiently thick spin-on-glass layer to form a planar surface over said recesses; etching back partially said spin-on-glass (SOG), using a first etch back etch rate profile across said substrate wherein said etch rate decreases from the center to the perimeter of said substrate, thereby said remaining SOG layer increases in thickness from center to said perimeter of said substrate, thereby said SOG layer having a convex shape; etching back said SOG layer to the surface of said first insulating barrier layer over said patterned conducting layer using a second etch back having a etch rate profile across said substrate which increases in etch rate from said center to said perimeter of said said substrate, said second etch back forming a planarized surface, the surface of said SOG in said recesses being coplanar with the surface of said insulating barrier layer, depositing a second insulating barrier layer on said SOG and said insulating barrier layer, and thereby providing a planar surface for subsequent patterned electrically conducting layers.
Claim 20
Dependent Claim
27 words
The method of claim 16, wherein said spin-on-glass is a multiple coating of a siloxane type having a total thickness of between about 3000 to 7000 Angstroms.
Claim 21
Dependent Claim
17 words
The method of claim 16 wherein said first etch back is performed in a downstream plasma etcher.
Claim 22
Dependent Claim
26 words
The method of claim 18, wherein the etch gas mixture used in said downstream etcher is carbon tetrafluoride (CF 4 ) and oxygen (O 2 ).
Claim 23
Dependent Claim
18 words
The method of claim 16 wherein said second etch back is performed in a reactive ion etcher (RIE).
Claim 24
Dependent Claim
27 words
The method of claim 20, wherein the etching gas mixture used in said reactive ion etcher is trifluoromethane (CF 3 H) and carbon tetrafluoride (CF 4 ).
Claim 25
Dependent Claim
24 words
The method of claim 16, wherein the etch rate ratio of said insulating barrier layer to said spin-on-glass is between about 1.2 to 1.9.
References Cited (Backward Citations)
US4775550A
Cited
US5366850A
Cited
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