US5637023A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Field emission element and process for manufacturing same
Assignee: Futaba Corp
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Filing: 1994-07-07
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Granted: 1997-06-10
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Expires: 2014-07-07
Abstract
Abstract A field emission element features an emitter which has rectangular projections at its distal end capable of readily controlling the interval between electrodes in increments as small as sub-microns, in order to reduce the voltage at which the device starts field emission at the required level and to improve emission uniformity. An emitter (2,20), a collector (3,21) and a gate (5,22) are arranged on a substrate (1), which is formed with a recess (4) in proximity to the electrodes (2,3,20,21) other than the gate (5). The gate (5) is provided in the recess (4).
Inventors
- 👤 Shigeo Itoh
- 👤 Teruo Watanabe
- 👤 Hisashi Nakata
- 👤 Norio Nishimura
- 👤 Junji Itoh
- 👤 Seigo Kanemaru
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 14:23
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/02; H01J9/022; H01J9/025; H01J3/00; H01J3/02; H01J3/021; H01J3/022
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
94 words
A process for manufacturing a field emission element comprising the steps of: depositing a first conductive material into electrodes including an emitter; subjecting the substrate to etching in both the depth direction and in directions parallel to the plane of the substrate while using the electrodes; forming a second conductive material on the substrate while using the electrodes as a mask so that the second conductive material has a film thickness smaller than the depth of the etching of the substrate; and working the second conductive material into a gate located between the electrodes.
Claim 2
Dependent Claim
94 words
A process for manufacturing a field emission element comprising the steps of: depositing a first conductive material into electrodes including an emitter; subjecting the substrate to etching in both the depth direction and in directions parallel to the plane of the substrate while using the electrodes; forming a second conductive material on the substrate while using the electrodes as a mask so that the second conductive material has a film thickness smaller than the depth of the etching of the substrate; and working the second conductive material into a gate located between the electrodes.
Claim 3
Dependent Claim
18 words
A process as claimed in claim 1, in which the worked electrodes comprise an emitter and a collector.
Claim 4
Dependent Claim
20 words
A process as claimed in claim 1 oe claim 2, in which the worked electrodes comprise a plurality of emitters.
Claim 5
Dependent Claim
54 words
A process as claimed in any of claim 1 or 2, in which the worked electrodes are formed into an approximate configuration before the etching step and the formation of the second conductive material on the substrate, then precisely working the worked electrodes into a desired configuration prior to the formation of the gate.
Claim 6
Dependent Claim
23 words
A process as claimed in claim 2, in which at least one emitter is formed into a rectangular shape when viewed from above.
Claim 7
Dependent Claim
33 words
A process as claimed in claim 2, in which at least one emitter is formed into a serrated shape and its respective gate is formed into a corresponding shape, when viewed from above.
Claim 8
Dependent Claim
36 words
A process as claimed in claim 2, in which at least one emitter is formed into a pectinate shape when viewed from the above so that it is provided with rectangular projections at its distal end.
Claim 9
Dependent Claim
17 words
A process as claimed in claim 2, in which a phosphor layer is formed on the collector.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-06-09 | 2000-12-09 | 2001-06-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-06-09 | 2004-12-09 | 2005-06-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-06-09 | 2008-12-09 | 2009-06-10 | $7700.00 | Window Closed / Lapsed |