US5631314A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Liquid coating composition for use in forming photoresist coating films and photoresist material using said composition
Assignee: Tokyo Ohka Kogyo Co Ltd
•
Filing: 1995-04-26
•
Granted: 1997-05-20
•
Expires: 2015-04-26
Abstract
Abstract A liquid coating composition for forming an anti-interference film over a photoresist film is prepared by combining a water-soluble, film-forming component with a specified fluorosurfactant or by combining said water-soluble, film-forming component with a fluoro-surfactant and a specified anionic surfactant. A coating film is formed from said liquid coating composition over a photoresist film to produce a photoresist material of a dual structure. The photoresist material is particularly effective in lessening the multiple-interference effect of light, thereby enabling the formation of very fine resist patterns having high fidelity to mask patterns.
Inventors
- 👤 Kazumasa Wakiya
- 👤 Masakazu Kobayashi
- 👤 Toshimasa Nakayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 09:28
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/0048; G03F7/09; G03F7/091
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
131 words
In a liquid coating composition for use in forming a photoresist coating film comprising a water-soluble, film-forming component and a fluorosurfactant, the improvement wherein said fluorosurfactant is at least one member selected from the group consisting of the salt of a compound represented by the following general formula (I): RfCOOH (I) (where Rf is a fluorohydrocarbon group having part or all of the hydrogen atoms in a C 2 -C 20 saturated or unsaturated hydrocarbon group replaced by fluorine atoms) with an alkanolamine and the salt of a compound represented by the following general formula (II): R'fSO.sub.3 H (II) (where R'f is a fluorohydrocarbon group having part or all of the hydrogen atoms in a C 2 -C 20 saturated or unsaturated hydrocarbon group replaced by fluorine atoms) with an alkanolamine.
Claim 2
Dependent Claim
131 words
In a liquid coating composition for use in forming a photoresist coating film comprising a water-soluble, film-forming component and a fluorosurfactant, the improvement wherein said fluorosurfactant is at least one member selected from the group consisting of the salt of a compound represented by the following general formula (I): RfCOOH (I) (where Rf is a fluorohydrocarbon group having part or all of the hydrogen atoms in a C 2 -C 20 saturated or unsaturated hydrocarbon group replaced by fluorine atoms) with an alkanolamine and the salt of a compound represented by the following general formula (II): R'fSO.sub.3 H (II) (where R'f is a fluorohydrocarbon group having part or all of the hydrogen atoms in a C 2 -C 20 saturated or unsaturated hydrocarbon group replaced by fluorine atoms) with an alkanolamine.
Claim 3
Dependent Claim
26 words
A liquid coating composition according to claim 1 wherein the compound represented by the general formula (I) is either perfluoroheptanoic acid or perfluorooctanoic acid or both.
Claim 4
Dependent Claim
35 words
A liquid coating composition according to claim 1 wherein the compound represented by the general formula (II) is at least one member selected from the group consisting of perfluoropropylsulfonic acid, perfluorooctylsulfonic acid and perfluorodecylsulfonic acid.
Claim 5
Dependent Claim
28 words
A liquid coating composition according to claim 1 wherein said alkanolamine is at least one member selected from the group consisting of monoethanolamine, N-methylethanolamine, N-ethylethanolamine, diethanolamine and triethanolamine.
Claim 6
Dependent Claim
151 words
In a liquid coating composition for use in forming a photoresist coating film comprising a water-soluble, film-forming component and a fluorosurfactant, the improvement wherein the composition further contains at least one anionic surfactant represented by the following general formula (III): ##STR7## (where R 1 is an alkyl group having 5 to 18 carbon atoms; R 2 is a hydrogen atom or an alkyl or alkoxy group having 5 to 18 carbon atoms; R 3 is an N-substituted or unsubstituted ammonium sulfonate group of the general formula --SO.sub.3 NZ.sub.4, each Z being, independently from the others, a hydrogen atom, alkyl group having 1 to 2 carbon atoms or hydroxyalkyl group having 1 to 2 carbon atoms; and R 4 and R 5 are each a hydrogen atom or an N-substituted or unsubstituted ammonium sulfonate group of the general formula --SO 3 NZ 4 , Z having the same meaning as defined above).
Claim 7
Dependent Claim
151 words
In a liquid coating composition for use in forming a photoresist coating film comprising a water-soluble, film-forming component and a fluorosurfactant, the improvement wherein the composition further contains at least one anionic surfactant represented by the following general formula (III): ##STR7## (where R 1 is an alkyl group having 5 to 18 carbon atoms; R 2 is a hydrogen atom or an alkyl or alkoxy group having 5 to 18 carbon atoms; R 3 is an N-substituted or unsubstituted ammonium sulfonate group of the general formula --SO.sub.3 NZ.sub.4, each Z being, independently from the others, a hydrogen atom, alkyl group having 1 to 2 carbon atoms or hydroxyalkyl group having 1 to 2 carbon atoms; and R 4 and R 5 are each a hydrogen atom or an N-substituted or unsubstituted ammonium sulfonate group of the general formula --SO 3 NZ 4 , Z having the same meaning as defined above).
Claim 8
Dependent Claim
55 words
A liquid coating composition according to claim 5 wherein R 1 , is an alkyl group having 5 to 18 carbon atoms; R 2 is a hydrogen atom; R 3 and R 4 are each a group of --SO 3 NH 4 ; and R 5 is a hydrogen atom in the general formula (III).
Claim 9
Dependent Claim
45 words
A liquid coating composition according to claim 5 wherein said fluorosurfactant is either a fluorine atom containing compound represented by the following general formula (IV): RfCOOM.sub.1 (IV) or a fluorine atom containing compound represented by the following general formula (V): R'fSO.sub.3 M.sub.2 (V) or both.
Claim 10
Dependent Claim
67 words
A liquid coating composition according to claim 7 wherein the fluorine atom containing compound represented by the general formula (IV) is the salt of a compound represented by the following general formula (I): RfCOOH (I) (where Rf is a fluorohydrocarbon group having part or all of the hydrogen atoms in a C 2 -C 20 saturated or unsaturated hydrocarbon group replaced by fluorine atoms) with an alkanolamine.
Claim 11
Dependent Claim
26 words
A liquid coating composition according to claim 8 wherein the compound represented by the general formula (I) is either perfluoroheptanoic acid or perfluorooctanoic acid or both.
Claim 12
Dependent Claim
68 words
A liquid coating composition according to claim 7 wherein the fluorine atom containing compound represented by the general formula (V) is the salt of a compound represented by the following general formula (II): R'fSO.sub.3 H (II) (where R'f is a fluorohydrocarbon group having part or all of the hydrogen atoms in a C 2 -C 20 saturated or unsaturated hydrocarbon group replaced by fluorine atoms) with an alkanolamine.
Claim 13
Dependent Claim
35 words
A liquid coating composition according to claim 10 wherein the compound represented by the general formula (II) is at least one member selected from the group consisting of perfluoropropylsulfonic acid, perfluorooctylsulfonic acid and perfluorodecylsulfonic acid.
Claim 14
Dependent Claim
175 words
In a liquid coating composition for use in forming a photoresist coating film comprising a water-soluble, film-forming component and a fluorosurfactant, the improvement wherein the composition further comprises at least one anionic surfactant represented by the following general formula (III): ##STR8## (where R 1 is an alkyl or alkoxy group having 5 to 18 carbon atoms; R 2 is a hydrogen atom or an alkyl or alkoxy group having 5 to 18 carbon atoms; R 3 is an N-substituted or unsubstituted ammonium sulfonate group of the general formula --SO.sub.3 NZ.sub.4, each Z being, independently from the others, a hydrogen atom, alkyl group having 1 to 2 carbon atoms or hydroxyalkyl group having 1 to 2 carbon atoms; and R 4 and R 5 are each a hydrogen atom or an N-substituted or unsubstituted ammonium sulfonate group of the general formula --SO 3 NZ 4 , Z having the same meaning as defined above) and an N-alkyl-2-pyrrolidone represented by the following general formula (VI): ##STR9## (where R 10 is a C 6 -C 20 alkyl group).
Claim 15
Dependent Claim
175 words
In a liquid coating composition for use in forming a photoresist coating film comprising a water-soluble, film-forming component and a fluorosurfactant, the improvement wherein the composition further comprises at least one anionic surfactant represented by the following general formula (III): ##STR8## (where R 1 is an alkyl or alkoxy group having 5 to 18 carbon atoms; R 2 is a hydrogen atom or an alkyl or alkoxy group having 5 to 18 carbon atoms; R 3 is an N-substituted or unsubstituted ammonium sulfonate group of the general formula --SO.sub.3 NZ.sub.4, each Z being, independently from the others, a hydrogen atom, alkyl group having 1 to 2 carbon atoms or hydroxyalkyl group having 1 to 2 carbon atoms; and R 4 and R 5 are each a hydrogen atom or an N-substituted or unsubstituted ammonium sulfonate group of the general formula --SO 3 NZ 4 , Z having the same meaning as defined above) and an N-alkyl-2-pyrrolidone represented by the following general formula (VI): ##STR9## (where R 10 is a C 6 -C 20 alkyl group).
Claim 16
Dependent Claim
21 words
A liquid coating composition according to claim 12 wherein the N-alkyl-2-pyrrolidone represented by the general formula (VI) is N-octyl-2-pyrrolidone or N-dodecyl-2-pyrrolidone.
Claim 17
Dependent Claim
45 words
A liquid coating composition according to claim 12 wherein said fluorosurfactant is either a fluorine atom containing compound represented by the following general formula (IV): RfCOOM.sub.1 (IV) or a fluorine atom containing compound represented by the following general formula (V): R'fSO.sub.3 M.sub.2 (V) or both.
Claim 18
Dependent Claim
67 words
A liquid coating composition according to claim 14 wherein the fluorine atom containing compound represented by the general formula (IV) is the salt of a compound represented by the following general formula (I): RfCOO (I) (where Rf is a fluorohydrocarbon group having part or all of the hydrogen atoms in a C 2 -C 20 saturated or unsaturated hydrocarbon group replaced by fluorine atoms) with an alkanolamine.
Claim 19
Dependent Claim
26 words
A liquid coating composition according to claim 15 wherein the compound represented by the general formula (I) is either perfluoroheptanoic acid or perfluorooctanoic acid or both.
Claim 20
Dependent Claim
68 words
A liquid coating composition according to claim 14 wherein the fluorine atom containing compound represented by the general formula (V) is the salt of a compound represented by the following general formula (II): R'fSO.sub.3 H (II) (where R'f is a fluorohydrocarbon group having part or all of the hydrogen atoms in a C 2 -C 20 saturated or unsaturated hydrocarbon group replaced by fluorine atoms) with an alkanolamine.
Claim 21
Dependent Claim
34 words
A liquid coating composition according to claim 17 wherein the compound represented by the general formula (II) is at least one member of the group consisting of perfluoropropylsulfonic acid, perfluorooctylsulfonic acid and perfluorodecylsulfonic acid.
References Cited (Backward Citations)
US4293657A
Cited
US4910122A
Cited
JPS6038821A
Cited
JPS6262520A
Cited
JPH03222409A
Cited
JPH04204454A
Cited
EP0522990A1
Cited
JPH0651523A
Cited
JPH0667439A
Cited
JPH0669120A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-05-19 | 2000-11-18 | 2001-05-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-05-19 | 2004-11-18 | 2005-05-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-05-19 | 2008-11-18 | 2009-05-20 | $7700.00 | Window Closed / Lapsed |