Method of manufacturing metallic source line, self-aligned contact for flash memory devices

Claim 1

A method for manufacturing integrated circuit memory devices which comprises the steps of: providing a semiconductor substrate having memory devices thereon to which electrical connections must be made, forming a tunnel oxide layer on said substrate, forming a blanket, doped, floating gate layer said tunnel oxide layer on said substrate, forming an intergate dielectric layer over said first, blanket, doped, floating gate layer, forming a blanket control gate electrode layer over said intergate dielectric layer, forming a silicon dioxide dielectric layer over said control gate electrode layer, forming a silicon nitride (Si 3 N 4 ) layer over said silicon dioxide layer, forming a source/drain mask over said silicon nitride layer with source/drain openings therein, etching to form an array of stacks of said silicon nitride (Si 3 N 4 ) layer, said silicon dioxide dielectric layer, control gate electrode layer, said intergate dielectric layer, and said floating gate layer down to said tunnel oxide layer, said stacks having sidewalls with trench spaces therebetween, ion implantation of source/drain dopant ions between said stacks forming alternating source regions and drain regions below said trench spaces between said sidewalls, forming spacer dielectric structures adjacent to said sidewalls, forming a blanket dielectric layer over said stacks, said trench spaces and said sidewalls, etching source line openings down to said source regions and etching drain plug openings down to said drain regions through said blanket dielectric layer down to said source regions and said drain regions, forming a conductive metal blanket layer over said device extending down into contact with said source regions through said source line openings and down into contact with said drain regions through said drain plug openings, etching back said conductive metal layer leaving drain plugs and source lines, said drain plugs being over said drain regions comprising conductive metal in said plug openings between said stacks and said source lines being over said source regions comprising conductive metal in said source line openings between said stacks and said spacers, depositing an intermetal dielectric layer over said device including said drain plugs and said source lines, forming a via mask with via openings over said drain plugs upon said intermetal dielectric layer, etching through said via openings in said via mask through said intermetal dielectric layer forming openings therethrough to said drain plugs, stripping said via mask, and depositing of metal over said intermetal dielectric layer into said via openings extending down into contact with said drain plugs, whereby said memory devices include metallic source lines and self-aligned contacts.

Claim 2

A method for manufacturing integrated circuit memory devices which comprises the steps of: providing a semiconductor substrate having memory devices thereon to which electrical connections must be made, forming a tunnel oxide layer on said substrate, forming a blanket, doped, floating gate layer said tunnel oxide layer on said substrate, forming an intergate dielectric layer over said first, blanket, doped, floating gate layer, forming a blanket control gate electrode layer over said intergate dielectric layer, forming a silicon dioxide dielectric layer over said control gate electrode layer, forming a silicon nitride (Si 3 N 4 ) layer over said silicon dioxide layer, forming a source/drain mask over said silicon nitride layer with source/drain openings therein, etching to form an array of stacks of said silicon nitride (Si 3 N 4 ) layer, said silicon dioxide dielectric layer, control gate electrode layer, said intergate dielectric layer, and said floating gate layer down to said tunnel oxide layer, said stacks having sidewalls with trench spaces therebetween, ion implantation of source/drain dopant ions between said stacks forming alternating source regions and drain regions below said trench spaces between said sidewalls, forming spacer dielectric structures adjacent to said sidewalls, forming a blanket dielectric layer over said stacks, said trench spaces and said sidewalls, etching source line openings down to said source regions and etching drain plug openings down to said drain regions through said blanket dielectric layer down to said source regions and said drain regions, forming a conductive metal blanket layer over said device extending down into contact with said source regions through said source line openings and down into contact with said drain regions through said drain plug openings, etching back said conductive metal layer leaving drain plugs and source lines, said drain plugs being over said drain regions comprising conductive metal in said plug openings between said stacks and said source lines being over said source regions comprising conductive metal in said source line openings between said stacks and said spacers, depositing an intermetal dielectric layer over said device including said drain plugs and said source lines, forming a via mask with via openings over said drain plugs upon said intermetal dielectric layer, etching through said via openings in said via mask through said intermetal dielectric layer forming openings therethrough to said drain plugs, stripping said via mask, and depositing of metal over said intermetal dielectric layer into said via openings extending down into contact with said drain plugs, whereby said memory devices include metallic source lines and self-aligned contacts.

Claim 21

A method for manufacturing integrated circuit memory devices which comprises the steps of: providing a semiconductor substrate having a devices therein to which electrical connections must be made, forming a tunnel oxide layer on said substrate, forming a blanket, doped, polysilicon layer over said tunnel oxide layer on said substrate, forming an intergate dielectric layer over said polysilicon layer, forming a polycide layer over said intergate dielectric layer, forming a silicon dioxide dielectric layer over said polycide layer said silicon dioxide layer comprises a TEOS (tetraethylorthosilicate) dielectric layer at a temperature between about 650° and 750° C. in an LPCVD reactor by decomposing tetraethoxysilane, Si(OC 2 H 5 ) 4 vaporized from a liquid source producing a complex mixture of organic and organosilicon compounds, forming a silicon nitride (Si 3 N 4 ) layer over said silicon dioxide layer, forming a source/drain mask over said silicon nitride layer with source/drain openings therein, etching to form an array of stacks of said silicon nitride (Si 3 N 4 ) layer, said silicon dioxide dielectric layer, polycide layer, said intergate dielectric layer, and said polysilicon layer down to said tunnel oxide layer, said stacks having sidewalls with trench spaces therebetween, ion implantation of source/drain dopant ions with an MDD ion implanting process between said stacks forming alternating source regions and drain regions below said trench spaces between said sidewalls, forming spacer dielectric structures adjacent to said sidewalls, forming a blanket dielectric layer over said stacks, said trench spaces and said sidewalls, said blanket dielectric layer comprising BPTEOS, etching source line openings down to said source regions and etching drain plug openings down to said drain regions through said blanket dielectric layer down to said source regions and said drain regions, forming a conductive metal blanket layer over said device extending down into contact with said source regions through said source line openings and down into contact with said drain regions through said drain plug openings, etching back said conductive metal layer leaving drain plugs and source lines, said drain plugs being over said drain regions comprising conductive metal in said plug openings between said stacks and said source lines being over said source regions comprising conductive metal in said source line openings between said stacks and said spacers, depositing an intermetal dielectric layer over said device including said drain plugs and said source lines, said intermetal dielectric layer comprising a PEOX/SOG/PEOX dielectric formed with a first PEOX layer with a thickness between about 2,000 Å and about 3,000 Å, a SOG layer with a thickness between about 3,000 Å and about 4,000 Å and a second PEOX layer with a thickness between about 5,000 Å and about 6,000 Å, forming a via mask with via openings over said drain plugs upon said intermetal dielectric layer, etching through said via openings in said via mask through said intermetal dielectric layer forming openings therethrough to said drain plugs, stripping said via mask, and depositing of metal over said intermetal dielectric layer into said via openings extending down into contact with said drain plugs, whereby said memory devices include metallic source lines and self-aligned contacts.

Claim 22

A method for manufacturing integrated circuit memory devices which comprises the steps of: providing a semiconductor substrate having a devices therein to which electrical connections must be made, forming a tunnel oxide layer on said substrate, forming a blanket, doped, polysilicon layer over said tunnel oxide layer on said substrate, forming an intergate dielectric layer over said polysilicon layer, forming a polycide layer over said intergate dielectric layer, forming a silicon dioxide dielectric layer over said polycide layer said silicon dioxide layer comprises a TEOS (tetraethylorthosilicate) dielectric layer at a temperature between about 650° and 750° C. in an LPCVD reactor by decomposing tetraethoxysilane, Si(OC 2 H 5 ) 4 vaporized from a liquid source producing a complex mixture of organic and organosilicon compounds, forming a silicon nitride (Si 3 N 4 ) layer over said silicon dioxide layer, forming a source/drain mask over said silicon nitride layer with source/drain openings therein, etching to form an array of stacks of said silicon nitride (Si 3 N 4 ) layer, said silicon dioxide dielectric layer, polycide layer, said intergate dielectric layer, and said polysilicon layer down to said tunnel oxide layer, said stacks having sidewalls with trench spaces therebetween, ion implantation of source/drain dopant ions with an MDD ion implanting process between said stacks forming alternating source regions and drain regions below said trench spaces between said sidewalls, forming spacer dielectric structures adjacent to said sidewalls, forming a blanket dielectric layer over said stacks, said trench spaces and said sidewalls, said blanket dielectric layer comprising BPTEOS, etching source line openings down to said source regions and etching drain plug openings down to said drain regions through said blanket dielectric layer down to said source regions and said drain regions, forming a conductive metal blanket layer over said device extending down into contact with said source regions through said source line openings and down into contact with said drain regions through said drain plug openings, etching back said conductive metal layer leaving drain plugs and source lines, said drain plugs being over said drain regions comprising conductive metal in said plug openings between said stacks and said source lines being over said source regions comprising conductive metal in said source line openings between said stacks and said spacers, depositing an intermetal dielectric layer over said device including said drain plugs and said source lines, said intermetal dielectric layer comprising a PEOX/SOG/PEOX dielectric formed with a first PEOX layer with a thickness between about 2,000 Å and about 3,000 Å, a SOG layer with a thickness between about 3,000 Å and about 4,000 Å and a second PEOX layer with a thickness between about 5,000 Å and about 6,000 Å, forming a via mask with via openings over said drain plugs upon said intermetal dielectric layer, etching through said via openings in said via mask through said intermetal dielectric layer forming openings therethrough to said drain plugs, stripping said via mask, and depositing of metal over said intermetal dielectric layer into said via openings extending down into contact with said drain plugs, whereby said memory devices include metallic source lines and self-aligned contacts.

Claim 23

A method for manufacturing integrated circuit memory devices which comprises the steps of: providing a semiconductor substrate having memory devices thereon to which electrical connections must be made, forming a tunnel oxide layer on said substrate, forming a blanket, doped, floating gate layer over said tunnel oxide layer on said substrate, forming an intergate dielectric layer over said first, blanket, doped, floating gate layer, forming a blanket control gate electrode layer over said intergate dielectric layer, forming at least a first dielectric layer over said control gate electrode layer, forming a source/drain mask over said dielectric layer with source/drain openings therein, etching to form an array of stacks of said dielectric layer, said control gate electrode layer, said intergate dielectric layer, and said floating gate layer down to said tunnel oxide layer, said stacks having sidewalls with trench spaces therebetween, ion implantation of source/drain dopant ions between said stacks forming alternating source regions and drain regions below said trench spaces between said sidewalls, forming spacer dielectric structures adjacent to said sidewalls, forming a blanket second dielectric layer over said stacks, said trench spaces and said sidewalls, etching source line openings down to said source regions and etching drain plug openings down to said drain regions through said blanket dielectric layer down to said source regions and said drain regions, forming a conductive metal blanket layer over said device extending down into contact with said source regions through said source line openings and down into contact with said drain regions through said drain plug openings, etching back said conductive metal layer leaving drain plugs and source lines, said drain plugs being over said drain regions comprising conductive metal in said plug openings between said stacks and said source lines being over said source regions comprising conductive metal in said source line openings between said stacks and said spacers, depositing an intermetal dielectric layer over said device including said drain plugs and said source lines, forming a via mask with via openings over said drain plugs upon said intermetal dielectric layer, etching through said via openings in said via mask through said intermetal dielectric layer forming openings therethrough to said drain plugs, stripping said via mask, and depositing of metal over said intermetal dielectric layer into said via openings extending down into contact with said drain plugs, whereby said memory devices include metallic source lines and self-aligned contacts.

Claim 24

A method for manufacturing integrated circuit memory devices which comprises the steps of: providing a semiconductor substrate having memory devices thereon to which electrical connections must be made, forming a tunnel oxide layer on said substrate, forming a blanket, doped, floating gate layer over said tunnel oxide layer on said substrate, forming an intergate dielectric layer over said first, blanket, doped, floating gate layer, forming a blanket control gate electrode layer over said intergate dielectric layer, forming at least a first dielectric layer over said control gate electrode layer, forming a source/drain mask over said dielectric layer with source/drain openings therein, etching to form an array of stacks of said dielectric layer, said control gate electrode layer, said intergate dielectric layer, and said floating gate layer down to said tunnel oxide layer, said stacks having sidewalls with trench spaces therebetween, ion implantation of source/drain dopant ions between said stacks forming alternating source regions and drain regions below said trench spaces between said sidewalls, forming spacer dielectric structures adjacent to said sidewalls, forming a blanket second dielectric layer over said stacks, said trench spaces and said sidewalls, etching source line openings down to said source regions and etching drain plug openings down to said drain regions through said blanket dielectric layer down to said source regions and said drain regions, forming a conductive metal blanket layer over said device extending down into contact with said source regions through said source line openings and down into contact with said drain regions through said drain plug openings, etching back said conductive metal layer leaving drain plugs and source lines, said drain plugs being over said drain regions comprising conductive metal in said plug openings between said stacks and said source lines being over said source regions comprising conductive metal in said source line openings between said stacks and said spacers, depositing an intermetal dielectric layer over said device including said drain plugs and said source lines, forming a via mask with via openings over said drain plugs upon said intermetal dielectric layer, etching through said via openings in said via mask through said intermetal dielectric layer forming openings therethrough to said drain plugs, stripping said via mask, and depositing of metal over said intermetal dielectric layer into said via openings extending down into contact with said drain plugs, whereby said memory devices include metallic source lines and self-aligned contacts.