Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
84 words
A resist processing method comprising the steps of: supplying a resist processing solution onto an object and performing a process on said object; and supplying a cleaning solution onto said object to clean said object; wherein said processing step at least partially overlaps with the cleaning step, and resist processing solution is not a cleaning solution, and a supply amount of at least one of said resist processing solution and said cleaning solution is changed while said processing step overlaps with said cleaning step.
Claim 2
Dependent Claim
84 words
A resist processing method comprising the steps of: supplying a resist processing solution onto an object and performing a process on said object; and supplying a cleaning solution onto said object to clean said object; wherein said processing step at least partially overlaps with the cleaning step, and resist processing solution is not a cleaning solution, and a supply amount of at least one of said resist processing solution and said cleaning solution is changed while said processing step overlaps with said cleaning step.
Claim 3
Dependent Claim
62 words
A resist processing method, comprising sequential steps of: supplying a resist processing solution onto an object and performing a process on said object; supplying a cleaning solution onto said object while supplying said processing solution onto said object; stopping supplying said resist processing solution; and cleaning said object with said cleaning solution, wherein said resist processing solution is not a cleaning solution.
Claim 4
Dependent Claim
62 words
A resist processing method, comprising sequential steps of: supplying a resist processing solution onto an object and performing a process on said object; supplying a cleaning solution onto said object while supplying said processing solution onto said object; stopping supplying said resist processing solution; and cleaning said object with said cleaning solution, wherein said resist processing solution is not a cleaning solution.
Claim 5
Dependent Claim
41 words
A method according to claim 2, further comprising an initial step of supplying a first cleaning solution onto said object, cleaning said object and stopping supply of said cleaning solution all prior to the step of supplying said resist processing solution.
Claim 6
Dependent Claim
74 words
A method according to claim 2, further comprising a first step of supplying a first cleaning solution onto said object to clean said object prior to the step of supplying said resist processing solution, wherein said step of supplying said resist processing solution overlaps with the initial supplying of said a first cleaning solution, and wherein said initial supplying of a first cleaning solution is stopped while said resist processing solution is being supplied.
Claim 7
Dependent Claim
25 words
A method according to claim 1, wherein a supply amount of said process solution is gradually increased while the processing step overlaps the cleaning step.
Claim 8
Dependent Claim
25 words
A method according to claim 1, wherein a supply amount of said process solution is gradually decreased while the processing step overlaps the cleaning step.
Claim 9
Dependent Claim
25 words
A method according to claim 1, wherein a supply amount of said cleaning solution is gradually decreased while the processing step overlaps the cleaning step.
Claim 10
Dependent Claim
36 words
A method according to claim 1, wherein a supply amount of said process solution is gradually decreased and a supply amount of said cleaning solution is gradually increased while the processing step overlaps the cleaning step.