US5622653A
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Electro-conductive oxides and electrodes using the same
Assignee: Hoya Corp
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Filing: 1995-06-06
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Granted: 1997-04-22
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Expires: 2015-06-06
Abstract
Abstract Electro-conductive oxides showing excellent electro-conductivity, electrodes using the electro-conductive oxide and methods for manufacturing the same are described. The electro-conductive oxides are represented by the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3 y/ .spsb.2 + .spsb.3 z/ .spsb.2.sub.)-d. The above electro-conductive oxides show not only excellent electro-conductivity but also excellent transparency all over the visible region and therefore they are particularly useful as, for example, electrodes for liquid crystal displays, EL displays and solar cells, which require light transmission.
Inventors
- 👤 Masahiro Orita
- 👤 Hiroyuki Sakai
- 👤 Megumi Takeuchi
- 👤 Hiroaki Tanji
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 03:34
CPC Classifications
H; H01; H01B; H01B1/00; H01B1/06; H01B1/08; C; C01; C01G; C01G15/00; C01G15/006; H05; H05B; H05B33/00; H05B33/12; H05B33/26; H05B33/28; G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1343; G02F1/13439; Y; Y10; Y10S; Y10S428/00; Y10S428/917; Y10S428/918; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/24926; Y10T428/29; Y10T428/31504; Y10T428/31678; Y10T428/31681
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
88 words
An electro-conductive oxide represented by the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminium and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z :y) is within a range of 0.4 to 1.4:1 and the oxygen deficit amount (d) is within a range of from 3×10 -5 to 1×10 -1 times the value of (x+3y/2+3z/2).
Claim 2
Dependent Claim
88 words
An electro-conductive oxide represented by the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminium and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z :y) is within a range of 0.4 to 1.4:1 and the oxygen deficit amount (d) is within a range of from 3×10 -5 to 1×10 -1 times the value of (x+3y/2+3z/2).
Claim 3
Dependent Claim
130 words
An electro-conductive oxide represented by the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminium and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1 and the oxygen deficit amount (d) is within a range of from 0 to 1×10 -1 times the value of (x+3y/2+3z/2), in which a part of at least one of M(1), M(2) and In is replaced with one or more other elements, the elements replacing M(1) are of di- or higher valence and the elements replacing M(2) and In are of tri- or higher valence.
Claim 4
Dependent Claim
130 words
An electro-conductive oxide represented by the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminium and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1 and the oxygen deficit amount (d) is within a range of from 0 to 1×10 -1 times the value of (x+3y/2+3z/2), in which a part of at least one of M(1), M(2) and In is replaced with one or more other elements, the elements replacing M(1) are of di- or higher valence and the elements replacing M(2) and In are of tri- or higher valence.
Claim 5
Dependent Claim
45 words
An electro-conductive oxide of claim 2 wherein the oxygen deficit amount (d) and the replaced amounts of M(1), M(2) and In are selected so that the oxide has an amount of carrier electrons of from 1×10 18 /cm 3 to 1×10 22 /cm 3 .
Claim 6
Dependent Claim
143 words
An electro-conductive oxide represented by the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminium and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1 and the oxygen deficit amount (d) is within a range of from 0 to 1×10 -1 times the value of (x+3y/2+3z/2), wherein said electroconductive oxide is implanted with cations having a smaller ionic radius than the atoms of the oxide, and wherein the oxygen deficit amount (d) and the amount of implanted cations are selected so that the electroconductive oxide has an amount of carrier electrons of from 1×10 18 /cm 3 to 1×10 22 /cm 3 .
Claim 7
Dependent Claim
143 words
An electro-conductive oxide represented by the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminium and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1 and the oxygen deficit amount (d) is within a range of from 0 to 1×10 -1 times the value of (x+3y/2+3z/2), wherein said electroconductive oxide is implanted with cations having a smaller ionic radius than the atoms of the oxide, and wherein the oxygen deficit amount (d) and the amount of implanted cations are selected so that the electroconductive oxide has an amount of carrier electrons of from 1×10 18 /cm 3 to 1×10 22 /cm 3 .
Claim 8
Dependent Claim
46 words
An electro-conductive oxide of claim 1 which is represented by the general formula: InGaZn 0 .5 O 3 .5-d, which corresponds to the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein M(1) is zinc, M(2) is gallium, x is 0.5, y is 1 and z is 1.
Claim 9
Dependent Claim
46 words
An electro-conductive oxide of claim 2 which is represented by the general formula: InGaZn 0 .5 O 3 .5.spsb.-d, which corresponds to the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein M(1) is zinc, M(2) is gallium, x is 0.5, y is 1 and z is 1.
Claim 10
Dependent Claim
46 words
An electro-conductive oxide of claim 4 which is represented by the general formula: InGaZn 0 .5 O 3 .5.spsb.-d, which corresponds to the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein M(1) is zinc, M(2) is gallium, x is 0.5, y is 1 and z is 1.
Claim 11
Dependent Claim
46 words
An electro-conductive oxide of claim 1 which is represented by the general formula: InAlZn 0 .5 O 3 .5.spsb.-d, which corresponds to the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein M(1) is zinc, M(2) is alminium, x is 0.5, y is 1 and z is 1.
Claim 12
Dependent Claim
46 words
An electro-conductive oxide of claim 2 which is represented by the general formula: InAlZn 0 .5 O 3 .5.spsb.-d, which corresponds to the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein M(1) is zinc, M(2) is aluminium, x is 0.5, y is 1 and z is 1.
Claim 13
Dependent Claim
46 words
An electro-conductive oxide of claim 4 which is represented by the general formula: InAlZn 0 .5 O 3 .5.spsb.-d, which corresponds to the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein M(1) is zinc, M(2) is aluminium, x is 0.5, y is 1 and z is 1.
Claim 14
Dependent Claim
37 words
An electro-conductive oxide of claim 1 which is represented by the general formula: M(1)M(2)InO 4 .spsb.-d, which corresponds to the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein x is 1, y is 1 and z is 1.
Claim 15
Dependent Claim
37 words
An electro-conductive oxide of claim 2 which is represented by the general formula: M(1)M(2)InO 4 .spsb.-d, which corresponds to the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein x is 1, y is 1 and z is 1.
Claim 16
Dependent Claim
37 words
An electro-conductive oxide of claim 4 which is represented by the general formula: M(1)M(2)InO 4 .spsb.-d, which corresponds to the general formula: M(1).sub.x M(2).sub.y In.sub.z O.sub.(x+.spsb.3.sub.y/.spsb.2.sub.+.spsb.3.sub.z/.spsb.2.sub.)-d wherein x is 1, y is 1 and z is 1.
References Cited (Backward Citations)
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