Process and apparatus for etching metal in integrated circuit structure with high selectivity to photoresist and good metal etch residue removal

Claim 2

A process for patterning a masked metal layer to form a layer of metal interconnects for an integrated circuit structure which removes metal etch residues, while inhibiting or eliminating erosion of the photoresist mask, which comprises: forming a plasma in an etching chamber by applying a source of RF power to an electrode in said etching chamber spaced from a substrate to be etched in said etching chamber; connecting a source of basic RF bias power to a second electrode in said etching chamber comprising the support of the substrate being etched; providing an amplitude modulation of said basic RF bias power supplied to said second electrode comprising superimposing on said basic RF bias power short pulses of RF bias power of sufficient magnitude and of sufficient duration to remove metal etch residues as they form during the etch process while minimizing erosion of the photoresist etch mask or undercutting the metal layer.

Claim 3

The process of claim 1 wherein the repetition rate of said pulses of high bias power will comprise a minimum rate sufficient to avoid undercutting of said metal layer.

Claim 4

The process of claim 2 wherein the repetition rate of said pulses of high bias power will comprise a minimum rate of about 5 kHz to minimize undercutting of said metal layer.

Claim 5

The process of claim 2 wherein said pulse magnitude of said pulse of Rf power will comprise a minimum equivalent bias power level of at least about 200 watts to ensure removal of metal etch residues.

Claim 6

The process of claim 2 wherein said pulse magnitude of said pulse of Rf power will comprise a maximum equivalent bias power level of about 1000 watts to prevent erosion of said resist mask or undercutting of said metal layer.

Claim 7

The process of claim 2 wherein said pulse magnitude of said pulse of Rf power will comprise a minimum equivalent bias power level of at least about 200 watts to ensure removal of metal etch residues to a maximum equivalent bias power level of about 1000 watts to prevent erosion of said resist mask or undercutting of said metal layer.

Claim 8

The process of claim 2 wherein said pulse duration of said pulse of Rf power will comprise a minimum of at least about 5% of the duty cycle of said pulse to ensure adequate removal of said metal etch residues.

Claim 9

The process of claim 7 wherein said pulse duration of said pulse of Rf power will comprise a minimum of at least about 20% of the duty cycle of said pulse to ensure adequate removal of said metal etch residues.

Claim 10

The process of claim 2 wherein said pulse duration of said pulse of Rf power will comprise a maximum of about 40% of the duty cycle of said pulse to prevent erosion of said photoresist mask or undercutting of said metal layer.

Claim 11

The process of claim 9 wherein said pulse duration of said pulse of Rf power will comprise a maximum of about 30% of the duty cycle of said pulse to prevent erosion of said photoresist mask or undercutting of said metal layer.

Claim 12

The process of claim 2 wherein said pulse duration of said pulse of Rf power will comprise a minimum of at least about 5% of the duty cycle of said pulse to ensure adequate removal of said metal etch residues and a maximum of about 40% of the duty cycle of said pulse to prevent erosion of said photoresist mask or undercutting of said metal layer.

Claim 13

The process of claim 2 wherein the equivalent bias power level of the basic bias power supplied to said substrate support comprises about 100 watts.

Claim 14

A process for patterning a masked metal layer to form a layer of metal interconnects for an integrated circuit structure which removes metal etch residues, while inhibiting or eliminating erosion of the photoresist mask, which comprises: a) forming a plasma in an etching chamber by applying a source of RF power to an electrode in said etching chamber spaced from a substrate to be etched in said etching chamber; b) supplying basic RF bias power to a second electrode in said etching chamber comprising the substrate support of the substrate being etched; and c) providing an amplitude modulation of said basic RF bias power supplied to said second electrode comprising superimposing on said basic RF bias power short pulses of RF power of an equivalent bias power level of from about 200 watts to about 1000 watts, a repetition rate of at least about 5 kHz, and of a duration of from about 5% to about 40% of the duty cycle of said pulses to remove metal etch residues as they form during the etch process while minimizing erosion of the photoresist etch mask or undercutting the metal layer.

Claim 15

A process for patterning a masked metal layer to form a layer of metal interconnects for an integrated circuit structure which removes metal etch residues, while inhibiting or eliminating erosion of the photoresist mask, which comprises: a) forming a plasma in an etching chamber by applying a source of RF power to an electrode in said etching chamber spaced from a substrate to be etched in said etching chamber; b) supplying basic RF bias power to a second electrode in said etching chamber comprising the substrate support of the substrate being etched; and c) providing an amplitude modulation of said basic RF bias power supplied to said second electrode comprising superimposing on said basic RF bias power short pulses of RF power of an equivalent bias power level of from about 200 watts to about 1000 watts, a repetition rate of at least about 5 kHz, and of a duration of from about 5% to about 40% of the duty cycle of said pulses to remove metal etch residues as they form during the etch process while minimizing erosion of the photoresist etch mask or undercutting the metal layer.

Claim 16

The process of claim 13 wherein the equivalent bias power level of the basic bias power supplied to said substrate support comprises about 100 watts.

Claim 17

RF etching apparatus for patterning a masked metal layer to form a layer of metal interconnects for an integrated circuit structure which removes metal etch residues, while inhibiting or eliminating erosion of the photoresist mask, which comprises: a) a plasma etch chamber; b) an RF power supply, capable of generating a plasma within said chamber, electrically connected to a showerhead electrode in said etch chamber; c) an RF bias power source electrically connected to an substrate support electrode in said plasma etch chamber facing said showerhead electrode to provide a constant RF bias power to said substrate support; d) apparatus for providing an amplitude modulation of the RF bias power supplied to said substrate support electrode within said plasma etch chamber which supports a substrate being etched comprising a pulsed RF power source capable of superimposing short pulses of RF bias power on said constant RF bias power of sufficient bias power level (pulse height) and of sufficient duration (pulse width) to remove metal etch residues as they form during the etch process without, however, eroding the photoresist etch mask or undercutting the metal layer.

Claim 18

RF etching apparatus for patterning a masked metal layer to form a layer of metal interconnects for an integrated circuit structure which removes metal etch residues, while inhibiting or eliminating erosion of the photoresist mask, which comprises: a) a plasma etch chamber; b) an RF power supply, capable of generating a plasma within said chamber, electrically connected to a showerhead electrode in said etch chamber; c) an RF bias power source electrically connected to an substrate support electrode in said plasma etch chamber facing said showerhead electrode to provide a constant RF bias power to said substrate support; d) apparatus for providing an amplitude modulation of the RF bias power supplied to said substrate support electrode within said plasma etch chamber which supports a substrate being etched comprising a pulsed RF power source capable of superimposing short pulses of RF bias power on said constant RF bias power of sufficient bias power level (pulse height) and of sufficient duration (pulse width) to remove metal etch residues as they form during the etch process without, however, eroding the photoresist etch mask or undercutting the metal layer.

Claim 19

The apparatus of claim 15 wherein said RF power source capable of superimposing short pulses of RF bias power is capable of providing such pulses at a minimum repetition rate sufficient to prevent undercutting of said metal layer.

Claim 20

The apparatus of claim 16 wherein said repetition rate of said pulses of high power bias range will comprise a minimum rate of about 5 kHz to prevent undercutting of said metal layer.

Claim 21

The apparatus of claim 16 wherein said pulse magnitude of said pulse of Rf power will comprise a minimum equivalent bias power level of at least about 200 watts to ensure removal of metal etch residues.

Claim 22

The apparatus of claim 16 wherein said pulse magnitude of said pulse of Rf power will comprise a maximum equivalent bias power level of about 1000 watts to prevent erosion of said resist mask or undercutting of said metal layer.

Claim 23

The apparatus of claim 16 wherein said pulse duration of said pulse of Rf power will comprise a minimum of at least about 5% of the duty cycle of said pulse to ensure adequate removal of said metal etch residues.

Claim 24

The apparatus of claim 16 wherein said pulse duration of said pulse of Rf power will comprise a maximum of about 40% of the duty cycle of said pulse to prevent erosion of said photoresist mask or undercutting of said metal layer.

Claim 25

Plasma etching apparatus for patterning a masked metal layer to form a layer of metal interconnects for an integrated circuit structure which removes metal etch residues, while inhibiting or eliminating erosion of the photoresist mask, which comprises: a) a plasma etch chamber; b) an RF power supply, capable of generating a plasma within said chamber, electrically connected to a showerhead electrode in said etch chamber; c) an RF bias power source electrically connected to an substrate support electrode in said plasma etch chamber facing said showerhead electrode to provide a constant RF bias power to said substrate support; d) apparatus for providing an amplitude modulation of the RF bias power supplied to said substrate support electrode within said plasma etch chamber which supports a substrate being etched comprising a pulsed RF power source capable of superimposing short pulses of RF bias power of a magnitude (pulse height) equivalent to from about 200 watts to about 1000 watts for a six inch diameter substrate, a repetition rate of at least about 5 kHz, and of a duration (pulse width) of from about 5% to about 40% of the duty cycle of said pulses to remove metal etch residues as they form during the etch process without, however, eroding the photoresist etch mask or undercutting the metal layer.

Claim 26

Plasma etching apparatus for patterning a masked metal layer to form a layer of metal interconnects for an integrated circuit structure which removes metal etch residues, while inhibiting or eliminating erosion of the photoresist mask, which comprises: a) a plasma etch chamber; b) an RF power supply, capable of generating a plasma within said chamber, electrically connected to a showerhead electrode in said etch chamber; c) an RF bias power source electrically connected to an substrate support electrode in said plasma etch chamber facing said showerhead electrode to provide a constant RF bias power to said substrate support; d) apparatus for providing an amplitude modulation of the RF bias power supplied to said substrate support electrode within said plasma etch chamber which supports a substrate being etched comprising a pulsed RF power source capable of superimposing short pulses of RF bias power of a magnitude (pulse height) equivalent to from about 200 watts to about 1000 watts for a six inch diameter substrate, a repetition rate of at least about 5 kHz, and of a duration (pulse width) of from about 5% to about 40% of the duty cycle of said pulses to remove metal etch residues as they form during the etch process without, however, eroding the photoresist etch mask or undercutting the metal layer.