US5609689A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum process apparaus
Assignee: Tokyo Electron Ltd
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Filing: 1996-06-03
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Granted: 1997-03-11
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Expires: 2016-06-03
Abstract
Abstract A cooling table for cooling a processed object of process in a vacuum reserve chamber is provided with support members, which support the object with predetermined gaps between the object and the table, so that the processed object can be cooled without directly touching the cooling table. Accordingly, no chemical reactions attributable to the plane contact between the object of process and the cooling table can be caused, so that the object cannot be contaminated. Even if the object is somewhat warped and subjected to fine vibrations by rapid cooling, moreover, it never rubs against the cooling table, so that no particles can be produced. Further, a preheating device for preheating the unprocessed object is provided overlying the cooling table. Thus, the vacuum reserve chamber can be used for preheating the unprocessed object as well as for cooling the processed object, so that the throughput can be improved.
Inventors
- 👤 Susumu Kato
- 👤 Hirofumi Yamaguchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:34
CPC Classifications
H; H10; H10P; H10P95/00; H10P72/00; H10P72/04; H10P72/0451; H10P72/0452; H10P72/0454; C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; C23C14/56; C23C14/568; H10P72/0466; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/139
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
93 words
A vacuum process apparatus, which is provided with a plurality of vacuum process chambers for subjecting an object of process to predetermined processes, comprising: a vacuum reserve chamber for delivering the object in a substantially vacuum state to the vacuum process chambers and receiving the processed object substantially at the atmospheric pressure from the vacuum process chambers; a cooling table for cooling the processed object in the vacuum reserve chamber; and support members arranged so as to support the object over the cooling table with predetermined gaps between the object and the table.
Claim 2
Dependent Claim
93 words
A vacuum process apparatus, which is provided with a plurality of vacuum process chambers for subjecting an object of process to predetermined processes, comprising: a vacuum reserve chamber for delivering the object in a substantially vacuum state to the vacuum process chambers and receiving the processed object substantially at the atmospheric pressure from the vacuum process chambers; a cooling table for cooling the processed object in the vacuum reserve chamber; and support members arranged so as to support the object over the cooling table with predetermined gaps between the object and the table.
Claim 3
Dependent Claim
27 words
The vacuum process apparatus according to claim 1, wherein each said support member includes a projection formed on the cooling table so as to support the object.
Claim 4
Dependent Claim
24 words
The vacuum process apparatus according to claim 1, wherein each said support member includes a regulating portion for restraining diametrical movement of the object.
Claim 5
Dependent Claim
16 words
The vacuum process apparatus according to claim 1, wherein said support members are formed of quartz.
Claim 6
Dependent Claim
85 words
A vacuum process apparatus, which is provided with a plurality of vacuum process chambers for subjecting an object of process to predetermined processes, comprising: a vacuum reserve chamber for delivering the object in a substantially vacuum state to the vacuum process chambers and receiving the processed object substantially at the atmospheric pressure from the vacuum process chambers; a cooling table for cooling the processed object in the vacuum reserve chamber; and preheating means arranged over the cooling table so as to preheat the unprocessed object.
Claim 7
Dependent Claim
85 words
A vacuum process apparatus, which is provided with a plurality of vacuum process chambers for subjecting an object of process to predetermined processes, comprising: a vacuum reserve chamber for delivering the object in a substantially vacuum state to the vacuum process chambers and receiving the processed object substantially at the atmospheric pressure from the vacuum process chambers; a cooling table for cooling the processed object in the vacuum reserve chamber; and preheating means arranged over the cooling table so as to preheat the unprocessed object.
Claim 8
Dependent Claim
41 words
The vacuum process apparatus according to claim 5, further comprising a first ring-shaped support portion for supporting the unprocessed object in the vacuum reserve chamber and a second ring-shaped support portion for supporting the processed object in the vacuum reserve chamber.
Claim 9
Dependent Claim
37 words
The vacuum process apparatus according to claim 6, wherein each of said first and second ring-shaped support portions includes projections arranged so as to support the object with predetermined gaps between the object and the support portion.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-03-10 | 2000-09-09 | 2001-03-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-10 | 2004-09-09 | 2005-03-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-10 | 2008-09-09 | 2009-03-11 | $7700.00 | Window Closed / Lapsed |