US5606128A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor acceleration detecting device
Assignee: Mitsubishi Electric Corp
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Filing: 1995-12-26
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Granted: 1997-02-25
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Expires: 2015-12-26
Abstract
Abstract A semiconductor acceleration detecting device provided with a pedestal electrically and mechanically connected to an electrode mounted on a base with an electrically conductive adhesive, a semiconductor chip electrically and mechanically connected to the pedestal with an electrically conductive adhesive like a cantilever, and a strain gauge for detecting deformation of the semiconductor chip due to an applied acceleration. Current used for detecting detachment flows from the electrode into a wire connected to a grounding terminal through the pedestal and the semiconductor chip. Moreover, a detachment between the base and the pedestal or between the pedestal and the semiconductor chip is sensed by detecting whether the current flows normally. Thereby, erroneous acceleration of the object can be prevented from being measured.
Inventors
- 👤 Toru Araki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 13:49
CPC Classifications
G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/12; G01P15/122; G01P21/00
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
109 words
A semiconductor acceleration detecting device comprising: a substrate for being mounted to an object, said substrate having electrical conducting means provided thereon; a pedestal mechanically and electrically connected to said conducting means; a beam mounted on said pedestal; a weight on said beam; acceleration detecting means on said beam for detecting an acceleration applied to the object according to deflection of said weight; a constant current source for feeding a current through a path including said substrate, said pedestal, and said beam; and detachment means for detecting detachment between said substrate and said pedestal and/or between said pedestal and said beam by detecting the current flowing through the path.
Claim 2
Dependent Claim
109 words
A semiconductor acceleration detecting device comprising: a substrate for being mounted to an object, said substrate having electrical conducting means provided thereon; a pedestal mechanically and electrically connected to said conducting means; a beam mounted on said pedestal; a weight on said beam; acceleration detecting means on said beam for detecting an acceleration applied to the object according to deflection of said weight; a constant current source for feeding a current through a path including said substrate, said pedestal, and said beam; and detachment means for detecting detachment between said substrate and said pedestal and/or between said pedestal and said beam by detecting the current flowing through the path.
Claim 3
Dependent Claim
25 words
The semiconductor acceleration detecting device according to claim 1, further comprising electrically conductive connecting means connecting said pedestal to said substrate and to said beam.
Claim 4
Dependent Claim
20 words
The semiconductor acceleration detecting device according to claim 2, wherein said electrically conductive connecting means comprises an electrically conductive adhesive.
Claim 5
Dependent Claim
17 words
The semiconductor acceleration detecting device according to claim 2, wherein said electrically conductive connecting means comprises solder.
Claim 6
Dependent Claim
22 words
The semiconductor acceleration detecting device according to claim 2, wherein said electrically conductive connecting means comprises an electrically conductive brazing filler material.
Claim 7
Dependent Claim
24 words
The semiconductor acceleration detecting device according to claim 1, wherein said acceleration detecting means and said detachment detection means are in a single chip.
Claim 8
Dependent Claim
22 words
The semiconductor acceleration detecting device according to claim 1, wherein said acceleration detecting means and said detachment detection means are separate chips.
Claim 9
Dependent Claim
58 words
The semiconductor acceleration detecting device according to claim 1, wherein said detachment detection means comprises: reference voltage generating means for outputting a reference voltage; and comparison judgment means for comparing a voltage depending on resistance of the path and the reference voltage and for outputting a comparison judgment signal indicating whether the current flows normally through the path.
Claim 10
Dependent Claim
67 words
The semiconductor acceleration detecting device according to claim 1, wherein said detachment detection means comprises: a current mirror circuit having a pair of PNP transistors having collector currents varying with resistance of the path; and an NPN transistor controlled in response to the collector currents of said current mirror circuit wherein a collector potential of said NPN transistor is an output signal of said detachment detection means.
Claim 11
Dependent Claim
15 words
The semiconductor acceleration detecting device according to claim 1, wherein said pedestal comprises a semiconductor.
Claim 12
Dependent Claim
16 words
The semiconductor acceleration detecting device according to claim 1, wherein said pedestal comprises an electrical conductor.
References Cited (Backward Citations)
JPH04284644A
Cited
JPH0593738A
Cited
US5499526A
Cited
JPH05249141A
Cited
US5460044A
Cited
US5415044A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-25 | 2000-08-26 | 2001-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-25 | 2004-08-26 | 2005-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-25 | 2008-08-26 | 2009-02-25 | $7700.00 | Window Closed / Lapsed |