US5601740A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for wirebonding, for severing bond wires, and for forming balls on the ends of bond wires
Assignee: FormFactor Inc
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Filing: 1995-12-18
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Granted: 1997-02-11
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Expires: 2015-12-18
Abstract
Abstract The efficacy of electrical discharges for severing bond wires and/or for forming balls at the ends of bond wires (including bond wires already severed by alternative mechanisms) is improved by performing the electrical discharges in the presence of ultraviolet light. A "spark gap" is formed between an EFO electrode and the wire, one of which serves as the cathode of the spark gap. Preferably, the ultraviolet light is directed at the element serving as the cathode of the spark gap. Providing photoemission at the cathode element of the spark gap stabilizes arc/plasma formation and produces more reliable and predictable results. This technique may be used in conjunction with negative EFO systems or with positive EFO systems, and may benefit from either direct or field-assisted photoemission.
Inventors
- 👤 Benjamin N. Eldridge
- 👤 Gaetan L. Mathieu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 23:46
CPC Classifications
B; B23; B23K; B23K20/00; B23K20/002; B23K20/004; H; H05; H05K; H05K3/00; H05K3/22; H05K3/24; H05K3/30; H05K3/306; H05K3/308; H05K3/32; H05K3/325; H05K3/326; H05K3/34; H05K3/341; H05K3/3421; H05K3/3426; H05K3/40; H05K3/4007; H05K3/4015; H05K7/00; H05K7/02; H05K7/10; H05K7/1053; H05K7/1061; H05K7/1069; H10; H10P; H10P74/00; H10P74/23; H10W; H10W70/00; H10W70/099; H10W72/00; H10W72/071; H10W72/075; H10W74/00; H10W74/01; H10W74/012; H10W74/10; H10W74/15; H10W90/00; H10W90/701; B23K2101/00; B23K2101/36; B23K2101/40; C; C25; C25D; C25D21/00; C25D21/02; G; G01; G01R; G01R3/00; G01R31/00; G01R31/28; G01R31/2851; G01R31/2884; H01; H01R; H01R12/00; H01R12/50; H01R12/51; H01R12/52; H05K1/00; H05K1/02; H05K1/14; H05K1/141; H05K2201/00; H05K2201/03; H05K2201/0332; H05K2201/0388; H05K2201/0397; H05K2201/06; H05K2201/068; H05K2201/10; H05K2201/10227; H05K2201/1031; H05K2201/10318; H05K2201/10378; H05K2201/10613; H05K2201/10621; H05K2201/10719; H05K2201/10734; H05K2201/10742; H05K2201/1075; H05K2201/10757; H05K2201/10878; H05K2201/10886; H05K2201/10909; H05K2201/10946; H05K3/10; H05K3/20; H05K3/36; H05K3/368; H05K3/4092; H10W70/60; H10W70/67; H10W70/68; H10W70/682; H10W72/01; H10W72/012; H10W72/01221; H10W72/01225; H10W72/015; H10W72/01551; H10W72/0711; H10W72/07141; H10W72/072; H10W72/07231; H10W72/07236; H10W72/07502; H10W72/07511; H10W72/07531; H10W72/07532; H10W72/07551; H10W72/07554; H10W72/20; H10W72/251; H10W72/252; H10W72/50; H10W72/521; H10W72/522; H10W72/541; H10W72/547; H10W72/551; H10W72/552; H10W72/5522; H10W72/553; H10W72/555; H10W72/851; H10W72/853; H10W72/856; H10W90/20; H10W90/22; H10W90/721; H10W90/722; H10W90/751; H10W90/754; Y; Y02; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
57 words
Method of performing wirebonding, comprising: bonding a bond wire to a terminal of an electronic component with a capillary; playing the bond wire out of the capillary; severing the bond wire with a discharge from an electrode; and while severing the bond wire, illuminating at least one of the electrode and the bond wire with ultraviolet light.
Claim 2
Dependent Claim
57 words
Method of performing wirebonding, comprising: bonding a bond wire to a terminal of an electronic component with a capillary; playing the bond wire out of the capillary; severing the bond wire with a discharge from an electrode; and while severing the bond wire, illuminating at least one of the electrode and the bond wire with ultraviolet light.
Claim 3
Dependent Claim
50 words
Method, according to claim 1, wherein: the electrode and the bond wire function, in use, as a spark gap, and a one of the electrode and the bond wire function as a cathode of the spark gap; and the ultraviolet light is directed at the cathode of the spark gap.
Claim 4
Dependent Claim
16 words
Method, according to claim 1, wherein: the ultraviolet light has a wavelength of 184 nanometers (nm).
Claim 5
Dependent Claim
18 words
Method, according to claim 1, wherein: the ultraviolet light is caused to flood-illuminate the electrode and the wire.
Claim 6
Dependent Claim
23 words
Method, according to claim 1, wherein: the ultraviolet light is focused on the at least one of the electrode and the bond wire.
Claim 7
Dependent Claim
44 words
Method of forming a ball at an end of a wirebond wire, comprising: causing an electrical discharge between an electrode and a bond wire; and while causing the electrical discharge, illuminating at least one of the electrode and the bond wire with ultraviolet light.
Claim 8
Dependent Claim
44 words
Method of forming a ball at an end of a wirebond wire, comprising: causing an electrical discharge between an electrode and a bond wire; and while causing the electrical discharge, illuminating at least one of the electrode and the bond wire with ultraviolet light.
Claim 9
Dependent Claim
50 words
Method, according to claim 6, wherein: the electrode and the bond wire function, in use, as a spark gap, and a one of the electrode and the bond wire function as a cathode of the spark gap; and the ultraviolet light is directed at the cathode of the spark gap.
Claim 10
Dependent Claim
16 words
Method, according to claim 6, wherein: the ultraviolet light has a wavelength of 184 nanometers (nm).
Claim 11
Dependent Claim
18 words
Method, according to claim 6, wherein: the ultraviolet light is caused to flood-illuminate the electrode and the wire.
Claim 12
Dependent Claim
23 words
Method, according to claim 6, wherein: the ultraviolet light is focused on the at least one of the electrode and the bond wire.
Claim 13
Dependent Claim
124 words
Method of severing and forming balls at the end of bond wires, comprising: bonding a bond wire to a terminal of an electronic component with a capillary of a wire bonder; with an electrode, causing a first electrical discharge to sever the bond wire so that a first portion of the bond wire is bonded to the electronic component and a second portion of the bond wire extends from the capillary of the wire bonder; causing a second electrical discharge to form a ball at the end of second portion of the bond wire; and while performing at least one of the first electrical discharge and the second electrical discharge, illuminating at least one of the electrode and the bond wire with ultraviolet light.
Claim 14
Dependent Claim
124 words
Method of severing and forming balls at the end of bond wires, comprising: bonding a bond wire to a terminal of an electronic component with a capillary of a wire bonder; with an electrode, causing a first electrical discharge to sever the bond wire so that a first portion of the bond wire is bonded to the electronic component and a second portion of the bond wire extends from the capillary of the wire bonder; causing a second electrical discharge to form a ball at the end of second portion of the bond wire; and while performing at least one of the first electrical discharge and the second electrical discharge, illuminating at least one of the electrode and the bond wire with ultraviolet light.
Claim 15
Dependent Claim
50 words
Method, according to claim 11, wherein: the electrode and the bond wire function, in use, as a spark gap, and a one of the electrode and the bond wire function as a cathode of the spark gap; and the ultraviolet light is directed at the cathode of the spark gap.
Claim 16
Dependent Claim
16 words
Method, according to claim 11, wherein: the ultraviolet light has a wavelength of 184 nanometers (nm).
Claim 17
Dependent Claim
18 words
Method, according to claim 11, wherein: the ultraviolet light is caused to flood-illuminate the electrode and the wire.
Claim 18
Dependent Claim
23 words
Method, according to claim 11, wherein: the ultraviolet light is focused on the at least one of the electrode and the bond wire.
Claim 19
Dependent Claim
46 words
Wirebonder for bonding wires to terminals of electronic components, comprising: a capillary for feeding and bonding a wire; an EFO electrode; an ultraviolet light source; and means for directing light from the ultraviolet light source towards at least one of the EFO electrode and the wire.
Claim 20
Dependent Claim
46 words
Wirebonder for bonding wires to terminals of electronic components, comprising: a capillary for feeding and bonding a wire; an EFO electrode; an ultraviolet light source; and means for directing light from the ultraviolet light source towards at least one of the EFO electrode and the wire.
Claim 21
Dependent Claim
48 words
Wirebonder, according to claim 16, wherein: the EFO electrode and the wire function, in use, as a spark gap, a one of the EFO electrode and the wire functioning as a cathode of the spark gap; and the light is directed at the cathode of the spark gap.
Claim 22
Dependent Claim
16 words
Wirebonder, according to claim 16, wherein: the ultraviolet light has a wavelength of 184 nanometers (nm).
Claim 23
Dependent Claim
18 words
Wirebonder, according to claim 16, wherein: the ultraviolet light is caused to flood-illuminate the electrode and the wire.
Claim 24
Dependent Claim
23 words
Wirebonder, according to claim 16, wherein: the ultraviolet light is focused on the at least one of the electrode and the bond wire.
Claim 25
Dependent Claim
66 words
Method of controlling formation of a spark between an electrode of a wire bonder and a wire supplied by the wire bonder, comprising: prior to initiating a spark between an electrode and a wire of a wire bonder, illuminating at least one of the electrode and the wire with light having a characteristic which will enhance formation of the spark; wherein: the light is ultraviolet light.
Claim 26
Dependent Claim
66 words
Method of controlling formation of a spark between an electrode of a wire bonder and a wire supplied by the wire bonder, comprising: prior to initiating a spark between an electrode and a wire of a wire bonder, illuminating at least one of the electrode and the wire with light having a characteristic which will enhance formation of the spark; wherein: the light is ultraviolet light.
Claim 27
Dependent Claim
15 words
Method, according to claim 21, wherein: the light has a wavelength of 184 nanometers (nm).
Claim 28
Dependent Claim
17 words
Method, according to claim 21, wherein: the light is caused to flood-illuminate the electrode and the wire.
Claim 29
Dependent Claim
13 words
Method, according to claim 21, wherein: the light is focused on the electrode.
Claim 30
Dependent Claim
50 words
Method, according to claim 21, wherein: the electrode and the bond wire function, in use, as a spark gap, and a one of the electrode and the bond wire function as a cathode of the spark gap; and the ultraviolet light is directed at the cathode of the spark gap.
Claim 31
Dependent Claim
54 words
Method of stabilizing wire-cutting uniformity and spark breakdown in a wire bonder, comprising with an electrode, providing a high voltage arc to sever the wire; and in conjunction with providing the high voltage, providing light in a region where it is desired to form the high voltage arc; wherein: the light is ultraviolet light.
Claim 32
Dependent Claim
54 words
Method of stabilizing wire-cutting uniformity and spark breakdown in a wire bonder, comprising with an electrode, providing a high voltage arc to sever the wire; and in conjunction with providing the high voltage, providing light in a region where it is desired to form the high voltage arc; wherein: the light is ultraviolet light.
Claim 33
Dependent Claim
15 words
Method, according to claim 26 wherein: the light has a wavelength of 184 nanometers (nm).
Claim 34
Dependent Claim
24 words
Method, according to claim 26, wherein: the light is caused to flood-illuminate the region where it is desired to form the high voltage arc.
Claim 35
Dependent Claim
20 words
Method, according to claim 26, wherein: the light is focused on at least one of the wire and the electrode.
Claim 36
Dependent Claim
48 words
Method, according to claim 26, wherein: the electrode and the wire function, in use, as a spark gap, and a one of the electrode and the wire function as a cathode of the spark gap; and the ultraviolet light is directed at the cathode of the spark gap.
Claim 37
Dependent Claim
43 words
Method of stimulating production of photo-electrons at a cathode element of an EFO system of a wire bonder, comprising: illuminating the cathode element of the EFO component with ultraviolet light having sufficient energy to stimulate the production of photo-electrons at the cathode element.
Claim 38
Dependent Claim
43 words
Method of stimulating production of photo-electrons at a cathode element of an EFO system of a wire bonder, comprising: illuminating the cathode element of the EFO component with ultraviolet light having sufficient energy to stimulate the production of photo-electrons at the cathode element.
Claim 39
Dependent Claim
32 words
Method, according to claim 31, further comprising: limiting the light energy to be below the absorption cutoff for any medium between a light source providing the light energy and the cathode element.
Claim 40
Dependent Claim
27 words
Method, according to claim 31, wherein: the cathode element has a work function; and the light energy is greater than the work function of the cathode element.
Claim 41
Dependent Claim
27 words
Method, according to claim 31, wherein: the cathode element has a work function; and the work function of the cathode element is greater than the light energy.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-11 | 2000-08-12 | 2001-02-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-11 | 2004-08-12 | 2005-02-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-11 | 2008-08-12 | 2009-02-11 | $7700.00 | Window Closed / Lapsed |