US5601732A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Protecting film for wafer and method for grinding surface of wafer with the same
Assignee: Sony Corp
•
Filing: 1995-11-09
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Granted: 1997-02-11
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Expires: 2015-11-09
Abstract
Abstract Upon grinding a back of a substrate, a protecting tape made of a material soluble to IPA (isopropanol), for example, a vinyl acetate thermoplastic adhesive is appended on the surface of a pattern-formed layer of a wafer, grinding the back, dipping the wafer in a cleaning vessel containing IPA, and dissolving and removing the protecting tape from the wafer, thereby giving no damages to the wafer, and reducing the number of operation steps.
Inventors
- 👤 Masahiro Yoshida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 17:03
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/04; B24B37/042; B24B7/00; B24B7/20; B24B7/22; B24B7/228; H; H10; H10P; H10P52/00; H10P72/00; H10P72/70; H10P72/74; H10P72/7422
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
43 words
A protecting tape for a substrate surface which is appended to a surface of a substrate for protecting the surface of the substrate upon grinding a back of the substrate, wherein said protecting tape is formed with a material soluble to a solvent.
Claim 2
Dependent Claim
43 words
A protecting tape for a substrate surface which is appended to a surface of a substrate for protecting the surface of the substrate upon grinding a back of the substrate, wherein said protecting tape is formed with a material soluble to a solvent.
Claim 3
Dependent Claim
29 words
A protecting tape as defined in claim 1, wherein the solvent is isopropanol and the protecting tape for the substrate surface is formed with a material soluble to isopropanol.
Claim 4
Dependent Claim
23 words
A protecting tape as defined in claim 2, wherein a vinyl acetate type thermoplastic adhesive is selected as the material soluble to isopropanol.
Claim 5
Independent Claim
62 words
A method of grinding a back of a substrate comprising the steps of: appending a protecting tape for a substrate surface on a surface of a substrate and grinding a back of the substrate; dipping the substrate ground at the back into isopropanol; and dissolving the protecting tape for the substrate surface and removing the tape from the surface of the substrate.
Claim 6
Independent Claim
62 words
A method of grinding a back of a substrate comprising the steps of: appending a protecting tape for a substrate surface on a surface of a substrate and grinding a back of the substrate; dipping the substrate ground at the back into isopropanol; and dissolving the protecting tape for the substrate surface and removing the tape from the surface of the substrate.
Claim 7
Dependent Claim
47 words
A method of grinding a back of a substrate as defined in claim 4, wherein the method comprises a step of dissolving the protecting tape for the substrate surface and removing the tape from the surface of the substrate and a step of cleaning said substrate, simultaneously.
Claim 8
Dependent Claim
38 words
A method of grinding a back of a substrate as defined in claim 4, wherein the inside of a cleaning vessel containing isopropanol is agitated during a step of dipping the substrate ground at the back in isopropanol.
Claim 9
Dependent Claim
30 words
A method of grinding a back of a substrate as defined in claim 6, wherein bubbles of an inert gas are generated to agitate the inside of the cleaning vessel.
Claim 10
Dependent Claim
33 words
A method of grinding a back of a substrate as defined in claim 7, wherein nozzles are disposed at the bottom of the cleaning vessel for generating the bubbles of the inert gas.
Claim 11
Independent Claim
27 words
A method of grinding a back of a substrate as defined in any one of claims 7 or 8, wherein the inert gas is a nitrogen gas.
Claim 12
Independent Claim
43 words
A method of grinding a back of a substrate as defined in any one of claims 4 or 5, wherein the thickness of the substrate ground by the method of grinding the back of the substrate is made not greater than 300 μm.
Claim 13
Dependent Claim
22 words
A protecting tape as defined in claim 2, wherein an isoprene rubber type adhesive is selected as the material soluble to isopropanol.
References Cited (Backward Citations)
US4246054A
Cited
US5209815A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-11 | 2000-08-12 | 2001-02-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-11 | 2004-08-12 | 2005-02-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-11 | 2008-08-12 | 2009-02-11 | $7700.00 | Window Closed / Lapsed |