US5600745A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of automatically coupling between a fiber and an optical waveguide
Assignee: Industrial Technology Research Institute
•
Filing: 1996-02-08
•
Granted: 1997-02-04
•
Expires: 2016-02-08
Abstract
Abstract A method of automatically coupling between a fiber and an optical waveguide is disclosed. Such a scheme is achieved by the property of the different etching rate in the various wafer direction on a semiconductor material, especial silicon, and the shrinking property of the glass soot formed by a flame hydrolysis deposition technique during a high temperature consolidation process, for improving aligning accuracy. The manufacturing process of the method is described below. First, a waveguide buffer layer is formed on a semiconductor substrate, then a waveguide layer is formed on the semiconductor substrate and the waveguide buffer layer. A part of the waveguide is manipulated to the planar optical waveguide, meanwhile, several windows which lead to the I/O end of the planar waveguide are formed on the other waveguide layer. The semiconductor substrate beneath the windows is etched anisotropically to form several aligning grooves. The lateral faces of these grooves and the surface of the semiconductor substrate can constitute a fixed angle.
Inventors
- 👤 Dong-Sing Wuu
- 👤 Hong-Ming Chen
- 👤 Tzung-Rue Hsieh
- 👤 Hsiang-Chen Hsu
- 👤 Ten-Hsing Jaw
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:32
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/26; G02B6/30; G02B6/10; G02B6/12; G02B6/13; G02B6/132
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
180 words
A method of automatically coupling between a fiber and an optical waveguide, for coupling the optical waveguide on a planar optical circuit of a semiconductor substrate to the fiber used as an input/output port of said planar optical circuit, said method comprising the steps of: forming a buffer layer on said semiconductor substrate; forming a waveguide layer on said waveguide buffer layer; fabricating said optical waveguide from said waveguide layer and a window abutted to an end of said optical waveguide in said waveguide layer; anisotropically etching said semiconductor substrate under said window to form an aligning groove, wherein there is a predetermined angle between lateral faces of said aligning groove and said semiconductor substrate; forming a cladding layer covering said optical waveguide by flame hydrolysis deposition technique and consolidation process, wherein there is a spacing between said cladding layer and said semiconductor substrate at said aligning groove; removing said cladding layer over said aligning groove; and placing said fiber on said aligning groove, which can automatically align with said optical waveguide by said predetermined angle of said aligning groove.
Claim 2
Independent Claim
180 words
A method of automatically coupling between a fiber and an optical waveguide, for coupling the optical waveguide on a planar optical circuit of a semiconductor substrate to the fiber used as an input/output port of said planar optical circuit, said method comprising the steps of: forming a buffer layer on said semiconductor substrate; forming a waveguide layer on said waveguide buffer layer; fabricating said optical waveguide from said waveguide layer and a window abutted to an end of said optical waveguide in said waveguide layer; anisotropically etching said semiconductor substrate under said window to form an aligning groove, wherein there is a predetermined angle between lateral faces of said aligning groove and said semiconductor substrate; forming a cladding layer covering said optical waveguide by flame hydrolysis deposition technique and consolidation process, wherein there is a spacing between said cladding layer and said semiconductor substrate at said aligning groove; removing said cladding layer over said aligning groove; and placing said fiber on said aligning groove, which can automatically align with said optical waveguide by said predetermined angle of said aligning groove.
Claim 3
Dependent Claim
15 words
A method of claim 1, wherein said aligning groove is formed as a V-shaped groove.
Claim 4
Dependent Claim
15 words
A method of claim 1, wherein said aligning groove is formed as a U-shaped groove.
Claim 5
Dependent Claim
64 words
A method of claim 1, wherein the step of forming said buffer layer further comprises the steps of: anisotropically etching said semiconductor substrate to form a flat-formed groove on said semiconductor substrate; forming a glass layer on said semiconductor substrate; and polishing said glass layer to the level of said semiconductor substrate and said glass layer inside said flat-formed groove being said buffer layer.
Claim 6
Dependent Claim
20 words
A method of claim 4, wherein said glass layer is formed by the flame hydrolysis deposition technique and consolidation process.
Claim 7
Dependent Claim
20 words
A method of claim 1, wherein said waveguide layer is formed by the flame hydrolysis deposition technique and consolidation process.
Claim 8
Dependent Claim
19 words
A method of claim 1, wherein the refractive index change exists between said waveguide layer and said buffer layer.
Claim 9
Dependent Claim
31 words
A method of claim 1, wherein the step of fabricating said optical waveguide and said window is achieved by a lithographic and etching process to precisely control their position and size.
Claim 10
Dependent Claim
49 words
A method of claim 1, wherein the step of removing said cladding layer further comprises the steps of: forming an auxiliary groove perpendicular to said optical waveguide and adjacent to the end of said optical waveguide by a dicing saw; and removing said cladding layer toward said auxiliary groove.
Claim 11
Independent Claim
265 words
A method of automatically coupling between a fiber and an optical waveguide for coupling the optical waveguide on a planar optical circuit of a silicon substrate to a single-mode fiber, wherein the orientation of said silicon substrate is in (100) direction, said method comprising the steps of: forming a flat-formed groove on said silicon substrate to define the position of said planar optical circuit; forming a glass layer on said silicon substrate; polishing said glass layer to said silicon substrate, which can serve as a buffer layer; forming a waveguide layer on said buffer layer; fabricating said optical waveguide from said waveguide layer and a window abutted to said optical waveguide in said waveguide layer; anisotropically etching the silicon substrate under said window to form an aligning groove, wherein the orientation of lateral faces of said aligning groove is in the (111) direction and the depth of said aligning groove plus half the height of said optical waveguide must be larger than the radius of said single-mode fiber; forming a cladding layer covering said optical waveguide by flame hydrolysis deposition technique and consolidation process, wherein there is a spacing between said cladding layer and the silicon substrate at said aligning groove; forming an auxiliary groove perpendicular to said optical waveguide and adjacent to the end of said optical waveguide by a dicing saw; removing said cladding layer toward said auxiliary groove; and placing said single-mode fiber on the aligning groove, wherein the vertical distance between a center of said single-mode fiber and said silicon substrate is equal to half the height of said optical waveguide.
Claim 12
Independent Claim
265 words
A method of automatically coupling between a fiber and an optical waveguide for coupling the optical waveguide on a planar optical circuit of a silicon substrate to a single-mode fiber, wherein the orientation of said silicon substrate is in (100) direction, said method comprising the steps of: forming a flat-formed groove on said silicon substrate to define the position of said planar optical circuit; forming a glass layer on said silicon substrate; polishing said glass layer to said silicon substrate, which can serve as a buffer layer; forming a waveguide layer on said buffer layer; fabricating said optical waveguide from said waveguide layer and a window abutted to said optical waveguide in said waveguide layer; anisotropically etching the silicon substrate under said window to form an aligning groove, wherein the orientation of lateral faces of said aligning groove is in the (111) direction and the depth of said aligning groove plus half the height of said optical waveguide must be larger than the radius of said single-mode fiber; forming a cladding layer covering said optical waveguide by flame hydrolysis deposition technique and consolidation process, wherein there is a spacing between said cladding layer and the silicon substrate at said aligning groove; forming an auxiliary groove perpendicular to said optical waveguide and adjacent to the end of said optical waveguide by a dicing saw; removing said cladding layer toward said auxiliary groove; and placing said single-mode fiber on the aligning groove, wherein the vertical distance between a center of said single-mode fiber and said silicon substrate is equal to half the height of said optical waveguide.
Claim 13
Dependent Claim
13 words
A method of claim 10, wherein said aligning groove is a V-shaped groove.
Claim 14
Dependent Claim
60 words
A method of claim 11, wherein the vertical distance d between the center of said single-mode fiber and said silicon substrate can be expressed as: ##EQU3## wherein r expresses the radius of said single-mode fiber, w the top width of the V-shaped groove, and θ an intersectional angle of the (100) direction and the (111) direction in the silicon substrate.
Claim 15
Dependent Claim
13 words
A method of claim 10, wherein said aligning groove is a U-shaped groove.
Claim 16
Dependent Claim
60 words
A method of claim 13, wherein the vertical distance d' between the center of said single-mode fiber and said silicon substrate can be expressed as: ##EQU4## wherein r expresses the radius of said single-mode fiber, w' the top width of the U-shaped groove and θ an intersectional angle of the (100) direction and the (111) direction in the silicon substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-04 | 2000-08-05 | 2001-02-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-04 | 2004-08-05 | 2005-02-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-04 | 2008-08-05 | 2009-02-04 | $7700.00 | Window Closed / Lapsed |