US5600439A
Expired / Lapsed
US
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Self-calibration system and method for determining the adequacy of an interferometer angle and surface curvatures in an inspection system for determining disparity between two surfaces
Assignee: Furukawa Electric North America Inc
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Filing: 1995-04-27
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Granted: 1997-02-04
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Expires: 2015-04-27
Abstract
Abstract A self-calibration system and method (125) determines the adequacy of an interferometer angle φ and surface curvatures in an inspection system (90). The inspection system (90) can contactlessly measure the disparity between two surfaces, such as the undercut or protrusion of an optical fiber (26) relative to a surrounding support material (36) at the endface (79) of an optical fiber termination (37). The inspection system (90) measures an offset of the fringe (113') in the image over the target (25') in the image (111a, 111b, 111c) in order to determine the disparity. In structure, the inspection system (90) has a measurement apparatus (91) with an interferometer (98) situated at the angle φ relative to the target (82) controlled by a machine vision system (92) for determining the degree of disparity. Further, the machine vision system (92) preferably employs the self-calibration system and method (125).
Inventors
- 👤 Andrei Csipkes
- 👤 John M. Palmquist
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 10:36
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/36; G02B6/38; G02B6/3807; G02B6/381; G02B6/3818; G02B6/3822; G01; G01B; G01B11/00; G01B11/14; G01B11/24; G02B6/3833
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
269 words
A method for an automatic inspection system for contactlessly measuring a disparity between first and second surfaces by analyzing an image with interferometric fringes disposed over the surfaces and for determining the adequacy of an angle of the interferometer and curvature radii of the surfaces, comprising the steps of: (a) producing automatically with said inspection system an image of said surfaces with interferometric fringes superimposed over said images by exposing said surfaces to an interferometer having an objective disposed at an angle relative to an axis that is substantially perpendicular to said surfaces; (b) measuring automatically with said inspection system a spacing between two fringes in said image, said spacing being a function of said angle and said curvature radii; (c) comparing automatically with said inspection system said measured spacing with a previous measured spacing; (d) when said measured spacing matches said previous measured spacing, then determining automatically with said inspection system said disparity between said surfaces based upon said measured spacing and an offset between a fringe in a first image region representing said first surface and said fringe in a second image region representing said second surface; (e) when said measured spacing fails to match said previous measured spacing, comparing automatically with said inspection system said measured spacing with a predefined spacing range; (f) when said measured spacing falls within said predefined spacing range, then determining automatically with said inspection system said disparity between said surfaces based upon said measured spacing and said offset; and (g) when said measured spacing falls outside said predefined spacing range, then generating automatically with said inspection system a calibration error signal.
Claim 2
Independent Claim
269 words
A method for an automatic inspection system for contactlessly measuring a disparity between first and second surfaces by analyzing an image with interferometric fringes disposed over the surfaces and for determining the adequacy of an angle of the interferometer and curvature radii of the surfaces, comprising the steps of: (a) producing automatically with said inspection system an image of said surfaces with interferometric fringes superimposed over said images by exposing said surfaces to an interferometer having an objective disposed at an angle relative to an axis that is substantially perpendicular to said surfaces; (b) measuring automatically with said inspection system a spacing between two fringes in said image, said spacing being a function of said angle and said curvature radii; (c) comparing automatically with said inspection system said measured spacing with a previous measured spacing; (d) when said measured spacing matches said previous measured spacing, then determining automatically with said inspection system said disparity between said surfaces based upon said measured spacing and an offset between a fringe in a first image region representing said first surface and said fringe in a second image region representing said second surface; (e) when said measured spacing fails to match said previous measured spacing, comparing automatically with said inspection system said measured spacing with a predefined spacing range; (f) when said measured spacing falls within said predefined spacing range, then determining automatically with said inspection system said disparity between said surfaces based upon said measured spacing and said offset; and (g) when said measured spacing falls outside said predefined spacing range, then generating automatically with said inspection system a calibration error signal.
Claim 3
Dependent Claim
27 words
The method of claim 1, wherein said disparity corresponds to a displacement between a curvature of an optical fiber and a curvature associated with a surrounding material.
Claim 4
Dependent Claim
95 words
The method of claim 1, wherein said surfaces are spherical endfaces of an outer support material and an inner optical fiber, and further comprising the step of, (h) when said predefined spacing falls within said predefined spacing range, computing said disparity by: (1) calculating a difference between said spherical fiber endface and said spherical support material endface as measured along a line approximately normal to said fiber endface at a point that intersects a center of a fiber core of said fiber; and (2) computing said disparity based upon said difference and said measured spacing.
Claim 5
Dependent Claim
54 words
The method of claim 1, wherein step (a) comprises the steps of: (1) exposing said surfaces to an interferometer having an objective disposed at an angle relative to an axis that is substantially perpendicular to said surfaces; and (2) capturing said image with a camera and associated machine vision system coupled to said interferometer.
Claim 6
Dependent Claim
34 words
The method of claim 1, wherein step (a) comprises the step of moving said interferometric fringe at a desired location in said image by adjusting a displacement of said interferometer relative to said surfaces.
Claim 7
Dependent Claim
25 words
The method of claim 1, wherein said fringes include a highest gradient fringe and an adjacent fringe of an interferometric pattern produced with white light.
Claim 8
Dependent Claim
79 words
The method of claim 1, wherein step (b) comprises the steps of: (1) analyzing a plurality of linear profiles of pixel values, said linear profiles running transverse to said fringes; (2) determining a location of a darkest pixel associated with each of said profiles; (3) quantifying a pixel distance between darkest pixels in adjacent profiles; (4) selecting pixel distances that fall within predetermined limits; and (5) averaging said pixel distances to create said measured spacing in terms of pixels.
Claim 9
Dependent Claim
53 words
The method of claim 3, wherein said surfaces are substantially spherical and wherein step (h)(1) comprises the steps of: (1) fitting first and second circles to said first and second surfaces respectively; and (2) deriving said offset by subtracting locations of said first and second circles at a predefined location in said image.
Claim 10
Dependent Claim
15 words
The method of claim 4, wherein said angle is approximately between 2 and 9 degrees.
Claim 11
Dependent Claim
232 words
A self-calibration system for an automatic inspection system that contactlessly measures disparity between two surfaces by analyzing an image with interferometric fringes disposed over the surfaces, the self-calibration method for determining the adequacy of an angle of the interferometer and curvature radii of the surfaces, comprising: first means for producing an image of said surfaces with interferometric fringes superimposed over said image by exposing said surfaces to an interferometer having an objective disposed at an angle relative to an axis that is substantially perpendicular to said surfaces; second means for measuring a spacing between two fringes in said image, said spacing being a function of said angle and said curvature radii; third means for comparing said measured spacing with a previous measured spacing; fourth means for, when said measured spacing matches said previous measured spacing, signaling that said measured spacing is adequate for computing said disparity, thereby indicating said adequacy of said angle and curvature radii; fifth means for, when said measured spacing fails to match said previous measured spacing, comparing said measured spacing with a predefined spacing range; sixth means for, when said predefined spacing falls within said predefined spacing range, signaling that said measured spacing is adequate for computing said disparity, thereby indicating said adequacy of said angle and curvature radii; and seventh means for, when said predefined spacing falls outside said predefined spacing range, generating a calibration error signal.
Claim 12
Dependent Claim
232 words
A self-calibration system for an automatic inspection system that contactlessly measures disparity between two surfaces by analyzing an image with interferometric fringes disposed over the surfaces, the self-calibration method for determining the adequacy of an angle of the interferometer and curvature radii of the surfaces, comprising: first means for producing an image of said surfaces with interferometric fringes superimposed over said image by exposing said surfaces to an interferometer having an objective disposed at an angle relative to an axis that is substantially perpendicular to said surfaces; second means for measuring a spacing between two fringes in said image, said spacing being a function of said angle and said curvature radii; third means for comparing said measured spacing with a previous measured spacing; fourth means for, when said measured spacing matches said previous measured spacing, signaling that said measured spacing is adequate for computing said disparity, thereby indicating said adequacy of said angle and curvature radii; fifth means for, when said measured spacing fails to match said previous measured spacing, comparing said measured spacing with a predefined spacing range; sixth means for, when said predefined spacing falls within said predefined spacing range, signaling that said measured spacing is adequate for computing said disparity, thereby indicating said adequacy of said angle and curvature radii; and seventh means for, when said predefined spacing falls outside said predefined spacing range, generating a calibration error signal.
Claim 13
Dependent Claim
241 words
An automatic inspection system for measuring a disparity between first and second surfaces, comprising: an interferometer having an objective disposed at an angle relative to an axis that is substantially perpendicular to a target from which said surfaces are measured so that when said surfaces are exposed to said object interferometric fringes are superimposed over an image captured by said interferometer; a camera coupled to said interferometer for encoding said image; and a machine vision system connected to said camera for receiving said image, said machine vision system having: first means for measuring a spacing between two fringes in said image, said spacing being a function of said angle and said curvature radii; second means for comparing said measured spacing with a previous spacing; third means for, when said measured spacing matches said previous spacing, determining said disparity between said surfaces based upon said measured spacing and said offset between a fringe in a first image region, representing said first surface and said fringe in a second image region representing said second surface; fourth means for, when second measured spacing fails to match said previous measured spacing, comparing said measured spacing with a predefined spacing range; fifth means for, when said predefined spacing falls outside predefined spacing range, generating a calibration error signal; and sixth means for, when said predefined spacing falls within said predefined spacing range, determining said disparity between said surfaces based upon said measured spacing and said offset.
Claim 14
Dependent Claim
241 words
An automatic inspection system for measuring a disparity between first and second surfaces, comprising: an interferometer having an objective disposed at an angle relative to an axis that is substantially perpendicular to a target from which said surfaces are measured so that when said surfaces are exposed to said object interferometric fringes are superimposed over an image captured by said interferometer; a camera coupled to said interferometer for encoding said image; and a machine vision system connected to said camera for receiving said image, said machine vision system having: first means for measuring a spacing between two fringes in said image, said spacing being a function of said angle and said curvature radii; second means for comparing said measured spacing with a previous spacing; third means for, when said measured spacing matches said previous spacing, determining said disparity between said surfaces based upon said measured spacing and said offset between a fringe in a first image region, representing said first surface and said fringe in a second image region representing said second surface; fourth means for, when second measured spacing fails to match said previous measured spacing, comparing said measured spacing with a predefined spacing range; fifth means for, when said predefined spacing falls outside predefined spacing range, generating a calibration error signal; and sixth means for, when said predefined spacing falls within said predefined spacing range, determining said disparity between said surfaces based upon said measured spacing and said offset.
Claim 15
Dependent Claim
27 words
The system of claim 11, wherein said disparity corresponds to a displacement between a curvature of an optical fiber and a curvature associated with a surrounding material.
Claim 16
Dependent Claim
82 words
The system of claim 11, wherein said surfaces are spherical endfaces of an outer support material and an inner optical fiber, and wherein said fourth means comprises: means for calculating a difference between said spherical fiber endface and said spherical support material endface as measured along a line approximately normal to said fiber endface at a point that intersects a center of a fiber core of said fiber; and means for computing said disparity based upon said difference and said measured spacing.
Claim 17
Dependent Claim
35 words
The system of claim 11, further comprising a focus adjustment mechanism adapted to move said interferometric fringe at a desired location in said image by adjusting a displacement of said interferometer relative to said surfaces.
Claim 18
Dependent Claim
25 words
The system of claim 11, wherein said fringes are a highest gradient fringe and an adjacent fringe of an interferometric pattern produced with white light.
Claim 19
Dependent Claim
82 words
The system of claim 11, wherein said first means comprises: means for analyzing a plurality of linear profiles of pixel values, said linear profiles running transverse to said fringes; means for determining a location of a darkest pixel associated with each of said profiles; means for quantifying a pixel distance between darkest pixels in adjacent profiles; means for selecting pixel distances that fall within predetermined limits; and means for averaging said pixel distances to create said measured spacing in terms of pixels.
Claim 20
Dependent Claim
46 words
The system of claim 11, wherein said sixth means comprises: means for fitting first and second circles to said first and second surfaces respectively; and means for deriving said offset by subtracting locations of said first and second circles at a predefined location in said image.
Claim 21
Dependent Claim
15 words
The system of claim 11, wherein said angle is approximately between 2 and 9 degrees.
References Cited (Backward Citations)
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