US5600190A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Micromechanical component part and method for the manufacture thereof
Assignee: Infineon Technologies AG
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Filing: 1994-05-13
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Granted: 1997-02-04
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Expires: 2014-05-13
Abstract
Abstract A micromechanical component, for example a motor, wherein micromechanical structures such as a rotor, rotational axle, and stator, are manufactured of the same layer or multiple layer of, for example, CVD tungsten deposited in corresponding trenches. As a result thereof, no alignment problems arise. The static micromechanical structures are connected to the underlying substrate with electrical and/or mechanical connecting means, whereby retaining the movable micromechanical structure to a substrate can be simultaneously achieved. The manufacturing process is compatible with the production of integrated circuits on silicon and requires only three photolevels.
Inventors
- 👤 Thomas Zettler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 22:25
CPC Classifications
H; H02; H02N; H02N1/00; H02N1/002; H01; H01H; H01H1/00; H01H1/0036
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
77 words
A micromechanical arrangement, comprising: a substrate; a static micromechanical structure; a movable micromechanical structure, said static and movable micromechanical structures formed from a layer applied on a top side of the substrate; means for connecting the static structure to the substrate, said means for connecting formed of a fixing layer deposited into a hole of said static structure and connecting said static structure to said substrate and extending up vertically into said hole of the static structure.
Claim 2
Dependent Claim
77 words
A micromechanical arrangement, comprising: a substrate; a static micromechanical structure; a movable micromechanical structure, said static and movable micromechanical structures formed from a layer applied on a top side of the substrate; means for connecting the static structure to the substrate, said means for connecting formed of a fixing layer deposited into a hole of said static structure and connecting said static structure to said substrate and extending up vertically into said hole of the static structure.
Claim 3
Dependent Claim
21 words
The micromechanical arrangement according to claim 1, wherein the movable micromechanical structure is retained onto the substrate by the connecting means.
Claim 4
Dependent Claim
103 words
A micromechanical arrangement, comprising: a substrate: a static micromechanical structure: a movable micromechanical structure, said static and movable micromechanical structures formed from a layer applied on a top side of the substrate; means for connecting the static structure to the substrate, said means for connecting formed of a fixing layer extending up vertically into said hole of the static structure; wherein the substrate is covered with at least one insulating layer having an essentially planar surface and wherein said means for connecting includes electrically connecting said static structure to said substrate wherein said substrate comprises a contact region for the means for connecting.
Claim 5
Dependent Claim
103 words
A micromechanical arrangement, comprising: a substrate: a static micromechanical structure: a movable micromechanical structure, said static and movable micromechanical structures formed from a layer applied on a top side of the substrate; means for connecting the static structure to the substrate, said means for connecting formed of a fixing layer extending up vertically into said hole of the static structure; wherein the substrate is covered with at least one insulating layer having an essentially planar surface and wherein said means for connecting includes electrically connecting said static structure to said substrate wherein said substrate comprises a contact region for the means for connecting.
Claim 6
Dependent Claim
32 words
The micromechanical arrangement according to claim 1, wherein the movable micromechanical structure comprises bushings for seating on the substrate or an insulating layer on the substrate and having a small seating area.
Claim 7
Dependent Claim
77 words
A micromechanical arrangement, comprising: a substrate: a static micromechanical structure: a movable micromechanical structure, said static and movable micromechanical structures formed from a layer applied on a top side of the substrate: means for connecting the static structure to the substrate, said means for connecting formed of a fixing layer extending up vertically from the substrate into the static structure: wherein the static and movable micromechanical structures and the means for connecting are essentially composed of tungsten.
Claim 8
Dependent Claim
77 words
A micromechanical arrangement, comprising: a substrate: a static micromechanical structure: a movable micromechanical structure, said static and movable micromechanical structures formed from a layer applied on a top side of the substrate: means for connecting the static structure to the substrate, said means for connecting formed of a fixing layer extending up vertically from the substrate into the static structure: wherein the static and movable micromechanical structures and the means for connecting are essentially composed of tungsten.
Claim 9
Dependent Claim
140 words
A micromechanical arrangement, comprising: a substrate: a static micromechanical structure; a movable micromechanical structure, said static and movable micromechanical structures formed from a layer applied on a top side of the substrate; means for connecting the static structure to the substrate, said means for connecting formed of a fixing layer extending up vertically from the substrate into the static structure; further comprising a rotational axle fashioned as a hollow member, and said static micromechanical structure comprises a stator, and said movable micromechanical structure comprises a rotor, and said means for connecting is formed by a further conductive layer that at least partially covers the surface of the rotational axle and is connected to the substrate through the hollow member and that at least partially covers the surface of the stator and is connected to a contact region in the substrate.
Claim 10
Dependent Claim
140 words
A micromechanical arrangement, comprising: a substrate: a static micromechanical structure; a movable micromechanical structure, said static and movable micromechanical structures formed from a layer applied on a top side of the substrate; means for connecting the static structure to the substrate, said means for connecting formed of a fixing layer extending up vertically from the substrate into the static structure; further comprising a rotational axle fashioned as a hollow member, and said static micromechanical structure comprises a stator, and said movable micromechanical structure comprises a rotor, and said means for connecting is formed by a further conductive layer that at least partially covers the surface of the rotational axle and is connected to the substrate through the hollow member and that at least partially covers the surface of the stator and is connected to a contact region in the substrate.
Claim 11
Dependent Claim
110 words
A micromechanical arrangement comprising: a substrate; a static micromechanical structure: a movable micromechanical structure, said static and movable micromechanical structures formed from a layer applied on a top side of the substrate; means for connecting the static structure to the substrate, said means for connecting formed of a fixing layer extending up vertically from the substrate into the static structure; comprising a gearing, said static structure having a rotational axle fashioned as a hollow member, and said movable structure comprising a rotor; and comprising a layer as fixing layer that at least partially covers the surface of the rotational axle and is connected to the substrate through the hollow member.
Claim 12
Dependent Claim
110 words
A micromechanical arrangement comprising: a substrate; a static micromechanical structure: a movable micromechanical structure, said static and movable micromechanical structures formed from a layer applied on a top side of the substrate; means for connecting the static structure to the substrate, said means for connecting formed of a fixing layer extending up vertically from the substrate into the static structure; comprising a gearing, said static structure having a rotational axle fashioned as a hollow member, and said movable structure comprising a rotor; and comprising a layer as fixing layer that at least partially covers the surface of the rotational axle and is connected to the substrate through the hollow member.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-04 | 2000-08-05 | 2001-02-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-04 | 2004-08-05 | 2005-02-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-04 | 2008-08-05 | 2009-02-04 | $7700.00 | Window Closed / Lapsed |