US5598501A
Expired / Lapsed
US
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Polyimide optical waveguide and method of manufacturing the same
Assignee: NTT Inc
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Filing: 1995-04-18
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Granted: 1997-01-28
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Expires: 2015-04-18
Abstract
Abstract A polyimide optical waveguide comprising a core made of polyimide whose refractive index is controlled to a predetermined value by electron beam irradiation, and a cladding set in contact with the core and having a refractive index lower than that of the core.
Inventors
- 👤 Yasuko Maruo
- 👤 Shigekuni Sasaki
- 👤 Toshiaki Tamamura
- 👤 Tohru Matsuura
- 👤 Shinji Ando
- 👤 Shinsuke Matsui
- 👤 Fumio Yamamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 17:50
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/136; G02B1/00; G02B1/04; G02B1/045; G02B1/046; G02B6/122; G02B6/1221; G02B6/132
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
66 words
A method of manufacturing a polyimide optical waveguide, comprising the steps of: forming a core made of a polyimide whose refractive index is controlled to be a predetermined value by electron beam irradiation; and forming a cladding set in contact with said core, and said cladding being made of the same material as said core and having a refractive index lower than that of said core.
Claim 2
Independent Claim
66 words
A method of manufacturing a polyimide optical waveguide, comprising the steps of: forming a core made of a polyimide whose refractive index is controlled to be a predetermined value by electron beam irradiation; and forming a cladding set in contact with said core, and said cladding being made of the same material as said core and having a refractive index lower than that of said core.
Claim 3
Dependent Claim
19 words
A method of manufacturing a polyimide optical waveguide according to claim 1, wherein said polyimide is a fluorinated polyimide.
Claim 4
Independent Claim
85 words
A method of manufacturing a polyimide optical waveguide, comprising the steps of: forming a first polyimide layer on a substrate; forming a core layer having a predetermined refractive index by irradiating said polyimide layer with an electron beam; forming a second polyimide layer on said core layer and removing said substrate, thereby forming a polyimide film having a two-layer structure; and bonding said second polyimide layer as a lower cladding to another substrate, thereby forming a core having a predetermined shape in said core layer.
Claim 5
Independent Claim
85 words
A method of manufacturing a polyimide optical waveguide, comprising the steps of: forming a first polyimide layer on a substrate; forming a core layer having a predetermined refractive index by irradiating said polyimide layer with an electron beam; forming a second polyimide layer on said core layer and removing said substrate, thereby forming a polyimide film having a two-layer structure; and bonding said second polyimide layer as a lower cladding to another substrate, thereby forming a core having a predetermined shape in said core layer.
Claim 6
Dependent Claim
12 words
The method according to claim 3, wherein said polyimide is fluorinated polyimide.
Claim 7
Dependent Claim
23 words
The method according to claim 3, wherein said step of forming said core layer comprises performing an RIE method on said core layer.
Claim 8
Dependent Claim
46 words
The method according to claim 3, wherein said step of bonding said second layer to the other substrate includes a (subsequent) step of spin-coating a polyamic acid solution on said second polyimide layer containing said, thereby forming an upper cladding by heat curing said polyamic acid.
Claim 9
Independent Claim
102 words
A method of manufacturing a polyimide optical waveguide, comprising the steps of: forming a first polyimide layer on a substrate; forming a second polyimide layer on said first polyimide layer, said second polyimide layer having a refractive index higher than that of said first polyimide layer; forming a third polyimide layer on said second polyimide layer, said third polyimide layer having a refractive index lower than that of said second polyimide layer; and performing electron beam lithography on said three polyimide layers, thereby forming a core in said second polyimide layer, said core having a predetermined refractive index and a predetermined shape.
Claim 10
Independent Claim
102 words
A method of manufacturing a polyimide optical waveguide, comprising the steps of: forming a first polyimide layer on a substrate; forming a second polyimide layer on said first polyimide layer, said second polyimide layer having a refractive index higher than that of said first polyimide layer; forming a third polyimide layer on said second polyimide layer, said third polyimide layer having a refractive index lower than that of said second polyimide layer; and performing electron beam lithography on said three polyimide layers, thereby forming a core in said second polyimide layer, said core having a predetermined refractive index and a predetermined shape.
Claim 11
Dependent Claim
19 words
The method according to claim 7, wherein said first, second and third polyimide films are made of fluorinated polyimide.
Claim 12
Independent Claim
54 words
A method of manufacturing a polyimide optical waveguide, comprising the steps of: forming a plurality of polyimide layers, one on another; and irradiating said plurality of polyimide layers with an electron beam, thereby forming cores and claddings alternately laid one on another, each cladding having a refractive index lower than those of said cores.
Claim 13
Independent Claim
54 words
A method of manufacturing a polyimide optical waveguide, comprising the steps of: forming a plurality of polyimide layers, one on another; and irradiating said plurality of polyimide layers with an electron beam, thereby forming cores and claddings alternately laid one on another, each cladding having a refractive index lower than those of said cores.
Claim 14
Dependent Claim
33 words
The method according to claim 9, wherein said step of forming a plurality of polyimide layers comprises forming two polyimide layers, one on the other, said two polyimide layers having different refractive indices.
Claim 15
Dependent Claim
32 words
The method according to claim 9, wherein said step of forming a plurality of polyimide layers comprises forming seven polyimide layers, one on another, said seven polyimide layers having different refractive indices.
Claim 16
Independent Claim
73 words
A method of manufacturing a polyimide optical waveguide, comprising the steps of: forming a first polyimide layer on a substrate; and forming a core having a predetermined refractive index and a predetermined size in an upper surface of said polyimide layer and to a predetermined depth, by irradiating said polyimide layer with an electron beam in the condition that the election beam is prevented from reaching a lower surface of said polyimide layer.
Claim 17
Independent Claim
73 words
A method of manufacturing a polyimide optical waveguide, comprising the steps of: forming a first polyimide layer on a substrate; and forming a core having a predetermined refractive index and a predetermined size in an upper surface of said polyimide layer and to a predetermined depth, by irradiating said polyimide layer with an electron beam in the condition that the election beam is prevented from reaching a lower surface of said polyimide layer.
Claim 18
Dependent Claim
24 words
The method according to claim 12, further comprising a step of forming an upper cladding on said polyimide layer and also on said core.
Claim 19
Dependent Claim
15 words
The method according to claim 12, wherein said polyimide layer is made of fluorinated polyimide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-01-28 | 2000-07-29 | 2001-01-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-01-28 | 2004-07-29 | 2005-01-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-01-28 | 2008-07-29 | 2009-01-28 | $7700.00 | Window Closed / Lapsed |