Beam diverting shutter for a laser beam

Claim 2

A shutter apparatus for use in a laser system comprising: a shutter support base having a diagnostic instrument mount and a first beam aperture disposed therein; a shutter slide operably coupled to the shutter support base by a rod-roller bearing support to allow the shutter slide to articulate in a direction parallel to a horizontal axis of the shutter support base, said shutter slide having a second beam aperture disposed therein; a light reflection means angularly mounted on said shutter slide along an edge of said second beam aperture; an actuating means coupled to said shutter slide; a housing mounted to said shutter support base to light seal the shutter slide and light reflection means located therein, said housing having a beam port disposed therein, said beam port being constructed to restrict light transmission to an incoming beam, wherein when said shutter apparatus is in an open mode said first and second apertures are aligned to allow said beam to pass therethrough unimpeded, and when said shutter apparatus is activated to a closed mode, said actuator means slides said shutter slide along said rod-roller bearing supports to reposition said first aperture out of alignment with said second aperture and simultaneously move said light reflection means into engagement with said transmitted beam to deflect said beam to a diagnostic instrument coupled to said diagnostic instrument mount.

Claim 3

The shutter apparatus of claim 1 wherein said rod-roller bearing support further comprises a plurality of roller bearings journaled between pairs of guide rods.

Claim 4

The shutter apparatus of claim 2 wherein said light reflection means is a mirror.

Claim 5

The shutter apparatus of claim 2 wherein the plurality of roller bearings distributes the weight of said shutter slide among all said bearings to create a light support load for each said bearing.

Claim 6

The shutter apparatus of claim 4 wherein said light loading eliminates the need for lubrication in said bearings.

Claim 7

The apparatus of claim 5 wherein said roller bearings and said guide rods are manufactured from a case-hardened stainless steel.

Claim 8

The apparatus of claim 3 wherein said mirror further comprises a UV reflecting surface on a front face and a visible light reflecting surface on a back face.

Claim 9

The apparatus of claim 1 wherein said actuating means is pneumatic and capable of an activation time at or between about 200 ms to about 300 ms.

Claim 10

The apparatus of claim 1 wherein said actuating means is electromagnetic and capable of an activation time at or between about 200 ms to about 300 ms.

Claim 11

A shutter apparatus for an excimer laser system comprising: a shutter support base having a slide slot disposed therein with an instrument mount positioned at one end of said support base and a first centrally positioned beam aperture; a shutter slide operably coupled to interface with said slide slot by a plurality of roller bearings journaled between pairs of guide rods secured to interface edges of said shutter slide and said support base in said slide slot, said shutter slide having a centrally positioned second beam aperture disposed therein; a UV reflective mirror angularly mounted on said shutter slide at a base of said second beam aperture; an actuating means coupled to said shutter slide, wherein upon command said actuating means will move said shutter slide from an open position, in which said first and second beam apertures are aligned and a laser beam can be transmitted therethrough, to a closed position by slidably repositioning said second aperture out of alignment with said first aperture while simultaneously positioning said UV reflective mirror into engagement with said laser beam to deflect said beam to an instrument coupled to said instrument mount; a housing having a beam port disposed therein and mounted to said shutter support base to light seal said shutter slide and said mirror located therein, wherein in said closed position back scattered energy from said deflected laser beam will multiply reflect in said housing, said first and second apertures being light sealed as a result of said repositioning and a close tolerance fit between said shutter slide and said support base.

Claim 12

A shutter apparatus for an excimer laser system comprising: a shutter support base having a slide slot disposed therein with an instrument mount positioned at one end of said support base and a first centrally positioned beam aperture; a shutter slide operably coupled to interface with said slide slot by a plurality of roller bearings journaled between pairs of guide rods secured to interface edges of said shutter slide and said support base in said slide slot, said shutter slide having a centrally positioned second beam aperture disposed therein; a UV reflective mirror angularly mounted on said shutter slide at a base of said second beam aperture; an actuating means coupled to said shutter slide, wherein upon command said actuating means will move said shutter slide from an open position, in which said first and second beam apertures are aligned and a laser beam can be transmitted therethrough, to a closed position by slidably repositioning said second aperture out of alignment with said first aperture while simultaneously positioning said UV reflective mirror into engagement with said laser beam to deflect said beam to an instrument coupled to said instrument mount; a housing having a beam port disposed therein and mounted to said shutter support base to light seal said shutter slide and said mirror located therein, wherein in said closed position back scattered energy from said deflected laser beam will multiply reflect in said housing, said first and second apertures being light sealed as a result of said repositioning and a close tolerance fit between said shutter slide and said support base.

Claim 13

The apparatus of claim 10 wherein said roller bearings and guide rods require no lubrication as a result of said roller bearings equally distributing the weight of said shutter slide in a light support load configuration.

Claim 14

The apparatus of claim 10 wherein the UV mirror has a front face for reflecting UV light and a back face for reflecting visible light, said back face being in operable alignment with an optics module coupled to said laser system to allow alignment of said optics module by remote access.

Claim 15

The apparatus of claim 10 wherein the actuator means is pneumatic and capable of articulating said shutter slide from open-to-closed and closed-to-open positions in a time span of about 200 ms to about 300 ms.