US5589082A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microelectromechanical signal processor fabrication
Assignee: University of California, San Diego
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Filing: 1995-06-07
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Granted: 1996-12-31
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Expires: 2015-06-07
Abstract
Abstract A micromechanical filter having planar components, and manufacturable using very large scale integrated circuit microfabrication techniques. The input and output transducers are interdigitated comb electrodes. The mechanical coupling between the input and output transducers includes planar flexures, displacement of the electrodes producing bending of the elements of the flexures. By sealing micromechanical filters in a vacuum and providing on-board circuitry, high signal-to-noise ratios and quality factors are achievable. Construction of a real-time spectrum analyzer using many micromechanical resonators, provides a device with high accuracy and a short sample time.
Inventors
- 👤 Liwei Lin
- 👤 Clark T. Nguyen
- 👤 Roger T. Howe
- 👤 Albert P. Pisano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 08:01
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/02244; H03H9/02259; H03H9/02275; H03H9/02338; H03H9/02362; H03H9/02377; H03H9/46; H03H9/462
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
79 words
A method for fabrication of a microelectromechanical signal processor on a substrate, said method comprising the steps of: (a) fabricating a first patterned layer on said substrate; (b) fabricating a second patterned layer having an opening for anchoring a third patterned layer; (c) fabricating said third patterned layer; (d) fabricating a fourth patterned layer having an opening for anchoring a fifth patterned layer; (e) fabricating said fifth patterned layer; and (f) etching said fourth layer and said second layer.
Claim 2
Independent Claim
79 words
A method for fabrication of a microelectromechanical signal processor on a substrate, said method comprising the steps of: (a) fabricating a first patterned layer on said substrate; (b) fabricating a second patterned layer having an opening for anchoring a third patterned layer; (c) fabricating said third patterned layer; (d) fabricating a fourth patterned layer having an opening for anchoring a fifth patterned layer; (e) fabricating said fifth patterned layer; and (f) etching said fourth layer and said second layer.
Claim 3
Dependent Claim
16 words
The method of claim 1 wherein step (b) further includes providing dimples in said second layer.
Claim 4
Dependent Claim
15 words
The method of claim 1 wherein said first, third and fifth layers include polycrystalline silicon.
Claim 5
Dependent Claim
14 words
The method of claim 1 wherein said second and fourth layers include phosphosilicate glass.
Claim 6
Dependent Claim
68 words
The method of claim 1 further including the steps of: (g) after step (e) and before step (f) fabricating a structure comprising a sixth patterned layer; (h) after step (g) and before step (f) fabricating a seventh patterned layer having etch holes; (i) after step (f) fabricating an eighth layer for sealing said etch holes in said seventh layer; and wherein said structure is etched in step (f).
Claim 7
Dependent Claim
26 words
The method of claim 5 further including the step of drying said substrate using a supercritical CO 2 process after step (f) and before step (i).
Claim 8
Dependent Claim
15 words
The method of claim 5 wherein said seventh and eighth layers include low-stress silicon nitride.
Claim 9
Dependent Claim
14 words
The method of claim 5 wherein step (i) is carried out at low pressure.
References Cited (Backward Citations)
US4997521A
Cited
US4918032A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-12-31 | 2000-07-01 | 2000-12-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-12-31 | 2004-07-01 | 2004-12-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-12-31 | 2008-07-01 | 2008-12-31 | $7700.00 | Window Closed / Lapsed |