Surface position detection apparatus

Claim 2

A surface position detection apparatus comprising: a projection optical system for projecting pattern light of a predetermined pattern onto a detection surface from an oblique direction relative to the detection surface; an imaging optical system for forming an image of the pattern light reflected by the detection surface; light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said imaging optical system, and having an opening with a predetermined shape; scanning means for scanning the image formed by said imaging optical system relative to said light-receiving-side light-shielding means; means for designating a plurality of different parts of the pattern, in accordance with structure within an area on the detection surface that is disposed in a projection area of said projection optical system; and means for dividing the pattern light into a plurality of portions corresponding to the different parts of the pattern, and for selectively detecting the portion or portions of the pattern light corresponding to the designated part or parts of the pattern and passing through said opening from said scanning means.

Claim 3

An apparatus according to claim 1, wherein said dividing and detecting means includes a detector having a plurality of independent detection portions corresponding to the different parts of the pattern, and said detector detects pattern light passing through said opening of said light-receiving-side light-shielding means.

Claim 4

An apparatus according to claim 2, wherein the pattern light projected onto the detection surface by said projection optical system defines a slit pattern perpendicular to a direction in which an optical axis of said projection optical system intersects the detection surface, and the plurality of detection portions of said detector are linearly arranged.

Claim 5

An apparatus according to claim 1, wherein said dividing and detecting means comprises: a detector for detecting pattern light passing through said opening of said light-receiving-side light-shielding means; and partial light extraction means, arranged in said imaging optical system, for selectively extracting said portion or portions of the pattern light for passage to said detector.

Claim 6

An apparatus according to claim 4, wherein the pattern light is projected onto the detection surface by said projection optical system in the shape of a slit pattern perpendicular to a direction in which an optical axis of said projection optical system intersects the detection surface, and said partial light extraction means has a plurality of transmittance variable elements linearly arranged near a position of said light-receiving-side light-shielding means.

Claim 7

An apparatus according to claim 1, wherein said dividing and detecting means comprises: a detector for detecting pattern light passing through said opening of said light-receiving-side light-shielding means; and partial light extraction means, arranged in said projection optical system, for selectively extracting said portion or portions of the pattern light for passage to said detector.

Claim 8

An apparatus according to claim 6, wherein said partial light extraction means is arranged at a position substantially conjugate with the detection surface in said projection optical system.

Claim 9

An apparatus according to claim 6, wherein the pattern light projected onto the detection surface by said projection optical system defines a slit pattern perpendicular to a direction in which an optical axis of said projection optical system intersects the detection surface, and said partial light extraction means has a plurality of transmittance variable elements linearly arranged at a position substantially conjugate with the detection surface in said projection optical system.

Claim 10

An apparatus according to claim 1, wherein said designating means includes: input means for providing information regarding at least one predetermined area of the detection surface; and selection means for selecting at least one part of the pattern based on the information provided from said input means; and wherein said apparatus further comprises: correction amount calculating means connected to receive a detection signal output from pattern light detection means of said dividing and detecting means for calculating a correction amount based on said detection signal, and outputting a correction signal; correction means for correcting a position of the detection surface; and driving means for driving said correction means based on the correction signal.

Claim 11

An apparatus according to claim 1, wherein said designating means includes: input means for providing information regarding at least one predetermined area of the detection surface and designating at least one part of the pattern; and wherein said apparatus further comprises: correction amount calculating means connected to receive a detection signal output from pattern light detection means of said dividing and detecting means for calculating a correction amount based on said detection signal, and outputting a correction signal; correction means for correcting a position of the detection surface; and driving means for driving said correction means based on the correction signal.

Claim 12

A surface position detection apparatus comprising: a first projection optical system for projecting first pattern light of a first predetermined pattern from an oblique direction onto a detection surface in a first orientation relative to the detection surface; a second projection optical system for projecting second pattern light of a second predetermined pattern from an oblique direction onto the detection surface in a second orientation relative to the detection surface; a first imaging optical system for forming an image of the first pattern light from said first projection optical system reflected by the detection surface; a second imaging optical system for forming an image of the second pattern light from said second projection optical system reflected by the detection surface; first light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said first imaging optical system, and having a first opening with a predetermined shape; second light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said second imaging optical system, and having a second opening with a predetermined shape; first scanning means for scanning the image formed by said first imaging optical system relative to said first light-receiving-side light-shielding means; second scanning means for scanning the image formed by said second imaging optical system relative to said second light-receiving-side light-shielding means; means for designating one or more of a plurality of different parts of the first pattern and one or more of a plurality of different parts of the second pattern, in accordance with structure within areas on the detection surface that are disposed in projection areas of said first and second projection optical systems, respectively; first means for dividing the first pattern light into a plurality of portions corresponding to the different parts of the first pattern, and for selectively detecting the portion or portions of the first pattern light corresponding to the designated part or parts of the first pattern and passing through said first opening from said first scanning means; and second means for dividing the second pattern light into a plurality of portions corresponding to the different parts of the second pattern, and for selectively detecting the portion or portions of the second pattern light corresponding to the designated part or parts of the second pattern and passing through said second opening from said second scanning means.

Claim 13

A surface position detection apparatus comprising: a first projection optical system for projecting first pattern light of a first predetermined pattern from an oblique direction onto a detection surface in a first orientation relative to the detection surface; a second projection optical system for projecting second pattern light of a second predetermined pattern from an oblique direction onto the detection surface in a second orientation relative to the detection surface; a first imaging optical system for forming an image of the first pattern light from said first projection optical system reflected by the detection surface; a second imaging optical system for forming an image of the second pattern light from said second projection optical system reflected by the detection surface; first light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said first imaging optical system, and having a first opening with a predetermined shape; second light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said second imaging optical system, and having a second opening with a predetermined shape; first scanning means for scanning the image formed by said first imaging optical system relative to said first light-receiving-side light-shielding means; second scanning means for scanning the image formed by said second imaging optical system relative to said second light-receiving-side light-shielding means; means for designating one or more of a plurality of different parts of the first pattern and one or more of a plurality of different parts of the second pattern, in accordance with structure within areas on the detection surface that are disposed in projection areas of said first and second projection optical systems, respectively; first means for dividing the first pattern light into a plurality of portions corresponding to the different parts of the first pattern, and for selectively detecting the portion or portions of the first pattern light corresponding to the designated part or parts of the first pattern and passing through said first opening from said first scanning means; and second means for dividing the second pattern light into a plurality of portions corresponding to the different parts of the second pattern, and for selectively detecting the portion or portions of the second pattern light corresponding to the designated part or parts of the second pattern and passing through said second opening from said second scanning means.

Claim 14

An apparatus according to claim 11, wherein each of said first and second dividing and detecting means includes a detector having a plurality of independent detection portions corresponding to the different parts of the corresponding pattern, and said detector detects pattern light passing through the said opening of the corresponding light-receiving-side light-shielding means.

Claim 15

An apparatus according to claim 11, wherein each of said first and second dividing and detecting means comprises: a detector for detecting pattern light passing through the said opening of the corresponding light-receiving-side light-shielding means; and partial light extraction means, arranged in the corresponding imaging optical system, for selectively extracting said portion or portions of the corresponding pattern light for passage to said detector.

Claim 16

An apparatus according to claim 11, wherein each of said first and second dividing and detecting means comprises: a detector for detecting pattern light passing through the said opening of the corresponding light-receiving-side light-shielding means; and partial light extraction means, arranged in the corresponding projection optical system, for selectively extracting said portion or portions of the corresponding pattern light for passage to said detector.

Claim 17

An apparatus according to claim 14, wherein said partial light extraction means is arranged at a position substantially conjugate with the detection surface in the corresponding projection optical system.

Claim 18

A surface position detection apparatus comprising: a projection optical system for projecting pattern light of a predetermined pattern through a projection objective lens from an oblique direction onto a detection surface, said projection optical system including light shaping means at a position substantially conjugate with the detection surface for shaping light to conform with said predetermined pattern; an imaging optical system for forming an image of the pattern light reflected by the detection surface through an imaging objective lens; light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said imaging optical system, and having an opening with a predetermined shape; scanning means for scanning the image formed by said imaging optical system relative to said light-receiving-side light-shielding means; means for designating one or more of a plurality of different parts of the pattern, in accordance with structure within an area on the detection surface that is disposed in a projection area of said projection optical system; means for dividing the pattern light into a plurality of portions corresponding to the different parts of the pattern, and for selectively detecting light of the portion or portions of the pattern light corresponding to the designated part or parts of the pattern and passing through said opening from said scanning means; a first beam splitter arranged between said light shaping means and said projection objective lens; a second beam splitter arranged between said imaging objective lens and said light-receiving-side light-shielding means; light source means for supplying a parallel light beam onto the detection surface through said first beam splitter and said projection objective lens; and detection means for detecting an average state of the detection surface based on the parallel light beam reflected from the detection surface, which beam is converged through said imaging objective lens and said second beam splitter.

Claim 19

A surface position detection apparatus comprising: a projection optical system for projecting pattern light of a predetermined pattern through a projection objective lens from an oblique direction onto a detection surface, said projection optical system including light shaping means at a position substantially conjugate with the detection surface for shaping light to conform with said predetermined pattern; an imaging optical system for forming an image of the pattern light reflected by the detection surface through an imaging objective lens; light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said imaging optical system, and having an opening with a predetermined shape; scanning means for scanning the image formed by said imaging optical system relative to said light-receiving-side light-shielding means; means for designating one or more of a plurality of different parts of the pattern, in accordance with structure within an area on the detection surface that is disposed in a projection area of said projection optical system; means for dividing the pattern light into a plurality of portions corresponding to the different parts of the pattern, and for selectively detecting light of the portion or portions of the pattern light corresponding to the designated part or parts of the pattern and passing through said opening from said scanning means; a first beam splitter arranged between said light shaping means and said projection objective lens; a second beam splitter arranged between said imaging objective lens and said light-receiving-side light-shielding means; light source means for supplying a parallel light beam onto the detection surface through said first beam splitter and said projection objective lens; and detection means for detecting an average state of the detection surface based on the parallel light beam reflected from the detection surface, which beam is converged through said imaging objective lens and said second beam splitter.

Claim 20

An apparatus according to claim 16, wherein said dividing and detecting means includes a detector having a plurality of independent detection portions corresponding to the different parts of the pattern, and said detector detects pattern light passing through said opening of said light-receiving-side light-shielding means.

Claim 21

An apparatus according to claim 16, wherein said dividing and detecting means comprises: a detector for detecting pattern light passing through said opening of said light-receiving-side light-shielding means; and partial light extraction means, arranged in said imaging optical system, for selectively extracting said portion or portions of the pattern light for passage to said detector.

Claim 22

An apparatus according to claim 16, wherein said dividing and detecting means comprises: a detector for detecting pattern light passing through said opening of said light-receiving-side light-shielding means; and partial light extraction means, arranged in said projection optical system, for selectively extracting said portion or portions of the pattern light for passage to said detector.

Claim 23

An apparatus according to claim 19, wherein said partial light extraction means is arranged at a position substantially conjugate with the detection surface in said projection optical system.

Claim 24

A surface position detection apparatus comprising: a projection optical system, including a light source, for projecting pattern light of a predetermined pattern from an oblique direction onto a detection surface; means for designating a plurality of different parts of the pattern centered at different positions, in accordance with structure within an area on the detection surface that is disposed in a projection area of said projection optical system; partial light extraction means, arranged in said projection optical system, for sequentially extracting portions of the pattern light corresponding to the designated parts of the pattern for passage to the detection surface; an imaging optical system for forming an image of the extracted pattern light reflected by the detection surface; and detection means for detecting the extracted pattern light imaged by said imaging optical system.

Claim 25

A surface position detection apparatus comprising: a projection optical system, including a light source, for projecting pattern light of a predetermined pattern from an oblique direction onto a detection surface; means for designating a plurality of different parts of the pattern centered at different positions, in accordance with structure within an area on the detection surface that is disposed in a projection area of said projection optical system; partial light extraction means, arranged in said projection optical system, for sequentially extracting portions of the pattern light corresponding to the designated parts of the pattern for passage to the detection surface; an imaging optical system for forming an image of the extracted pattern light reflected by the detection surface; and detection means for detecting the extracted pattern light imaged by said imaging optical system.

Claim 26

An apparatus according to claim 21, wherein said partial light extraction means comprises a plurality of transmittance variable elements.

Claim 27

An apparatus according to claim 21, wherein said designating means includes: input means for providing information regarding at least one predetermined area of the detection surface; and selection means for selecting said parts of the pattern to be designated based on the information provided from said input means; and wherein said apparatus further comprises: correction amount calculating means connected to receive a detection signal output from pattern light detection means of said detection means for calculating a correction amount based on said detection signal, and outputting a correction signal; correction means for correcting a position of the detection surface; and driving means for driving said correction means based on the correction signal.

Claim 28

An apparatus according to claim 21, further comprising scanning means for effecting scanning movement of the image formed by said imaging optical system relative to said detection means.

Claim 29

A surface position detection apparatus comprising: a projection optical system, including a light source, for projecting pattern light of a predetermined pattern from an oblique direction onto a detection surface; an imaging optical system for forming an image of the pattern light reflected by the detection surface; means for designating a plurality of different parts of the pattern centered at different positions, in accordance with structure within an area on the detection surface that is disposed in a projection area of said projection optical system; and pattern image partial detection means for effecting sequential detection of portions of the pattern light corresponding to the designated parts of the pattern and imaged by said imaging optical system.

Claim 30

A surface position detection apparatus comprising: a projection optical system, including a light source, for projecting pattern light of a predetermined pattern from an oblique direction onto a detection surface; an imaging optical system for forming an image of the pattern light reflected by the detection surface; means for designating a plurality of different parts of the pattern centered at different positions, in accordance with structure within an area on the detection surface that is disposed in a projection area of said projection optical system; and pattern image partial detection means for effecting sequential detection of portions of the pattern light corresponding to the designated parts of the pattern and imaged by said imaging optical system.

Claim 31

An apparatus according to claim 25, wherein said pattern image partial detection means comprises a detector arranged substantially at a position where the image of the pattern light is formed by said imaging optical system and having a plurality of independent detection portions corresponding to the different parts of the pattern.

Claim 32

An apparatus according to claim 25, wherein said pattern image partial detection means comprises: partial light extraction means, arranged in said imaging optical system, for selectively extracting said portion or portions of the pattern light; and a detector disposed for detecting the extracted pattern light.

Claim 33

An apparatus according to claim 27, wherein said partial light extraction means comprises a plurality of transmittance variable elements.

Claim 34

A surface position detection apparatus comprising: a first projection optical system for projecting first pattern light of a first predetermined pattern onto a detection surface from a first direction, said first projection optical system including first light shaping means at a position substantially conjugate with the detection surface for shaping light to conform with said first predetermined pattern; a second projection optical system for projecting second pattern light of a second predetermined pattern onto the detection surface from a second direction different from the first direction, said second projection optical system including second light shaping means at a position substantially conjugate with the detection surface for shaping light to conform with said second predetermined pattern; a first imaging optical system for forming an image of the first pattern light from said first projection optical system reflected by the detection surface; a second imaging optical system for forming an image of the second pattern light from said second projection optical system reflected by the detection surface; first light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said first imaging optical system, and having a first opening with a predetermined shape; second light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said second imaging optical system, and having a second opening with a predetermined shape; first scanning means for scanning the image formed by said first imaging optical system relative to said first light-receiving-side light-shielding means; second scanning means for scanning the image formed by said second imaging optical system relative to said second light-receiving-side light-shielding means; means for designating one or more of a plurality of different parts of the first pattern and one or more of a plurality of different parts of the second pattern, in accordance with structure within areas on the detection surface that are disposed in projection areas of said first and second projection optical systems, respectively; first means for dividing the first pattern light into a plurality of portions corresponding to the different parts of said first pattern, and for selectively detecting the portion or portions of the first pattern light corresponding to the designated part or parts of the first pattern and passing through said first opening from said first scanning means; second means for dividing the second pattern light into a plurality of portions corresponding to the different parts of the second pattern, and for selectively detecting the portion or portions of the second pattern light corresponding to the designated part or parts of the second pattern and passing through said second opening from said second scanning means; said second projection optical system further including a projection objective lens and a first beam splitter, and said second imaging optical system including an imaging objective lens and a second beam splitter; light source means for supplying a parallel light beam onto the detection surface through said first beam splitter and said projection objective lens; and detection means for detecting an average state of the detection surface based on the parallel light beam reflected from the detection surface, which beam is converged through said imaging objective lens and said second beam splitter.

Claim 35

A surface position detection apparatus comprising: a first projection optical system for projecting first pattern light of a first predetermined pattern onto a detection surface from a first direction, said first projection optical system including first light shaping means at a position substantially conjugate with the detection surface for shaping light to conform with said first predetermined pattern; a second projection optical system for projecting second pattern light of a second predetermined pattern onto the detection surface from a second direction different from the first direction, said second projection optical system including second light shaping means at a position substantially conjugate with the detection surface for shaping light to conform with said second predetermined pattern; a first imaging optical system for forming an image of the first pattern light from said first projection optical system reflected by the detection surface; a second imaging optical system for forming an image of the second pattern light from said second projection optical system reflected by the detection surface; first light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said first imaging optical system, and having a first opening with a predetermined shape; second light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said second imaging optical system, and having a second opening with a predetermined shape; first scanning means for scanning the image formed by said first imaging optical system relative to said first light-receiving-side light-shielding means; second scanning means for scanning the image formed by said second imaging optical system relative to said second light-receiving-side light-shielding means; means for designating one or more of a plurality of different parts of the first pattern and one or more of a plurality of different parts of the second pattern, in accordance with structure within areas on the detection surface that are disposed in projection areas of said first and second projection optical systems, respectively; first means for dividing the first pattern light into a plurality of portions corresponding to the different parts of said first pattern, and for selectively detecting the portion or portions of the first pattern light corresponding to the designated part or parts of the first pattern and passing through said first opening from said first scanning means; second means for dividing the second pattern light into a plurality of portions corresponding to the different parts of the second pattern, and for selectively detecting the portion or portions of the second pattern light corresponding to the designated part or parts of the second pattern and passing through said second opening from said second scanning means; said second projection optical system further including a projection objective lens and a first beam splitter, and said second imaging optical system including an imaging objective lens and a second beam splitter; light source means for supplying a parallel light beam onto the detection surface through said first beam splitter and said projection objective lens; and detection means for detecting an average state of the detection surface based on the parallel light beam reflected from the detection surface, which beam is converged through said imaging objective lens and said second beam splitter.

Claim 36

A surface position detection apparatus comprising: a projection optical system for projecting pattern light of a predetermined pattern onto a detection surface from an oblique direction relative to the detection surface; an imaging optical system for forming an image of the pattern light reflected by the detection surface; light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said imaging optical system, and having an opening with a predetermined shape; scanning means for scanning the image formed by said imaging optical system relative to said light-receiving-side light-shielding means; means for dividing the pattern light into a plurality of portions corresponding to different parts of the pattern; and means for individually designating different sets of one or more of said parts of the pattern, in accordance with structure within respective areas on the detection surface that are disposed in a projection area of said projection optical system, and for detecting only the portion or portions of the pattern light corresponding to the designated set and passing through said opening from said scanning means.

Claim 37

A surface position detection apparatus comprising: a projection optical system for projecting pattern light of a predetermined pattern onto a detection surface from an oblique direction relative to the detection surface; an imaging optical system for forming an image of the pattern light reflected by the detection surface; light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said imaging optical system, and having an opening with a predetermined shape; scanning means for scanning the image formed by said imaging optical system relative to said light-receiving-side light-shielding means; means for dividing the pattern light into a plurality of portions corresponding to different parts of the pattern; and means for individually designating different sets of one or more of said parts of the pattern, in accordance with structure within respective areas on the detection surface that are disposed in a projection area of said projection optical system, and for detecting only the portion or portions of the pattern light corresponding to the designated set and passing through said opening from said scanning means.

Claim 38

A surface position detection apparatus comprising: a first projection optical system for projecting first pattern light of a first predetermined pattern from an oblique direction onto a detection surface in a first orientation relative to the detection surface; a second projection optical system for projecting second pattern light of a second predetermined pattern from an oblique direction onto the detection surface in a second orientation relative to the detection surface; a first imaging optical system for forming an image of the first pattern light from said first projection optical system reflected by the detection surface; a second imaging optical system for forming an image of the second pattern light from said second projection optical system reflected by the detection surface; first light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said first imaging optical system, and having a first opening with a predetermined shape; second light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said second imaging optical system, and having a second opening with a predetermined shape; first scanning means for scanning the image formed by said first imaging optical system relative to said first light-receiving-side light-shielding means; second scanning means for scanning the image formed by said second imaging optical system relative to said second light-receiving-side light-shielding means; means for dividing the first pattern light into a plurality of portions corresponding to different parts of the first pattern; means for individually designating different first sets of one or more of said parts of the first pattern, in accordance with structure within respective areas on the detection surface that are disposed in a projection area of said first projection optical system, and for detecting only the portion or portions of the first pattern light corresponding to the designated first set and passing through said first opening from said first scanning means; means for dividing the second pattern light into a plurality of portions corresponding to different parts of the second pattern; and and means for individually designating different second sets of one or more of said parts of the second pattern, in accordance with structure within respective areas on the detection surface that are disposed in a projection area of said second projection optical system, and for detecting only the portion or portions of the second pattern light corresponding to the designated second set and passing through said second opening from said second scanning means.

Claim 39

A surface position detection apparatus comprising: a first projection optical system for projecting first pattern light of a first predetermined pattern from an oblique direction onto a detection surface in a first orientation relative to the detection surface; a second projection optical system for projecting second pattern light of a second predetermined pattern from an oblique direction onto the detection surface in a second orientation relative to the detection surface; a first imaging optical system for forming an image of the first pattern light from said first projection optical system reflected by the detection surface; a second imaging optical system for forming an image of the second pattern light from said second projection optical system reflected by the detection surface; first light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said first imaging optical system, and having a first opening with a predetermined shape; second light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said second imaging optical system, and having a second opening with a predetermined shape; first scanning means for scanning the image formed by said first imaging optical system relative to said first light-receiving-side light-shielding means; second scanning means for scanning the image formed by said second imaging optical system relative to said second light-receiving-side light-shielding means; means for dividing the first pattern light into a plurality of portions corresponding to different parts of the first pattern; means for individually designating different first sets of one or more of said parts of the first pattern, in accordance with structure within respective areas on the detection surface that are disposed in a projection area of said first projection optical system, and for detecting only the portion or portions of the first pattern light corresponding to the designated first set and passing through said first opening from said first scanning means; means for dividing the second pattern light into a plurality of portions corresponding to different parts of the second pattern; and and means for individually designating different second sets of one or more of said parts of the second pattern, in accordance with structure within respective areas on the detection surface that are disposed in a projection area of said second projection optical system, and for detecting only the portion or portions of the second pattern light corresponding to the designated second set and passing through said second opening from said second scanning means.

Claim 40

A surface position detection apparatus comprising: a projection optical system for projecting pattern light of a predetermined pattern through a projection objective lens from an oblique direction onto a detection surface, said projection optical system including light shaping means at a position substantially conjugate with the detection surface for shaping light to conform with said predetermined pattern; an imaging optical system for forming an image of the pattern light reflected by the detection surface through an imaging objective lens; light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said imaging optical system, and having an opening with a predetermined shape; scanning means for scanning the image formed by said imaging optical system relative to said light-receiving side light-shielding means; means for dividing the pattern light into a plurality of portions corresponding to different parts of the pattern; means for individually designating different sets of one or more of said parts of the pattern, in accordance with structure within respective areas on the detection surface that are disposed in a projection area of said projection optical system, and for detecting only the portion or portions of the pattern light corresponding to the designated set and passing through said opening from said scanning means; a first beam splitter arranged between said light shaping means and said projection objective lens; a second beam splitter arranged between said imaging objective lens and said light-receiving-side light-shielding means; light source means for supplying a parallel light beam onto the detection surface through said first beam splitter and said projection objective lens; and detection means for detecting an average state of the detection surface on the basis of the parallel light beam reflected from the detection surface, which beam is converged through said imaging objective lens and said second beam splitter.

Claim 41

A surface position detection apparatus comprising: a projection optical system for projecting pattern light of a predetermined pattern through a projection objective lens from an oblique direction onto a detection surface, said projection optical system including light shaping means at a position substantially conjugate with the detection surface for shaping light to conform with said predetermined pattern; an imaging optical system for forming an image of the pattern light reflected by the detection surface through an imaging objective lens; light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said imaging optical system, and having an opening with a predetermined shape; scanning means for scanning the image formed by said imaging optical system relative to said light-receiving side light-shielding means; means for dividing the pattern light into a plurality of portions corresponding to different parts of the pattern; means for individually designating different sets of one or more of said parts of the pattern, in accordance with structure within respective areas on the detection surface that are disposed in a projection area of said projection optical system, and for detecting only the portion or portions of the pattern light corresponding to the designated set and passing through said opening from said scanning means; a first beam splitter arranged between said light shaping means and said projection objective lens; a second beam splitter arranged between said imaging objective lens and said light-receiving-side light-shielding means; light source means for supplying a parallel light beam onto the detection surface through said first beam splitter and said projection objective lens; and detection means for detecting an average state of the detection surface on the basis of the parallel light beam reflected from the detection surface, which beam is converged through said imaging objective lens and said second beam splitter.

Claim 42

A surface position detection apparatus comprising: a projection optical system, including a light source, for projecting pattern light of a predetermined pattern from an oblique direction onto a detection surface; means for designating plural portions of the pattern light corresponding to different parts of the pattern centered at different positions, in accordance with structure within an area on the detection surface that is disposed in a projection area of said projection optical system; partial light extraction means, arranged in said projection optical system, for sequentially extracting the designated portions of pattern light for passage to the detection surface; an imaging optical system for forming an image of the extracted pattern light reflected by the detection surface; and detection means for detecting only the extracted pattern light imaged by said imaging optical system.

Claim 43

A surface position detection apparatus comprising: a projection optical system, including a light source, for projecting pattern light of a predetermined pattern from an oblique direction onto a detection surface; means for designating plural portions of the pattern light corresponding to different parts of the pattern centered at different positions, in accordance with structure within an area on the detection surface that is disposed in a projection area of said projection optical system; partial light extraction means, arranged in said projection optical system, for sequentially extracting the designated portions of pattern light for passage to the detection surface; an imaging optical system for forming an image of the extracted pattern light reflected by the detection surface; and detection means for detecting only the extracted pattern light imaged by said imaging optical system.

Claim 44

A surface position detection apparatus comprising: a projection optical system, including a light source, for projecting pattern light of a predetermined pattern from an oblique direction onto a detection surface; an imaging optical system for forming an image of the pattern light reflected by the detection surface; means for designating, in accordance with structure within an area on the detection surface that is disposed in a projection area of said projection optical system, plural portions of the pattern light corresponding to different parts of the pattern centered at different positions and imaged by said imaging optical system; and pattern image partial detection means for sequentially detecting the designated portions of pattern light.

Claim 45

A surface position detection apparatus comprising: a projection optical system, including a light source, for projecting pattern light of a predetermined pattern from an oblique direction onto a detection surface; an imaging optical system for forming an image of the pattern light reflected by the detection surface; means for designating, in accordance with structure within an area on the detection surface that is disposed in a projection area of said projection optical system, plural portions of the pattern light corresponding to different parts of the pattern centered at different positions and imaged by said imaging optical system; and pattern image partial detection means for sequentially detecting the designated portions of pattern light.

Claim 46

A surface position detection apparatus comprising: a first projection optical system for projecting first pattern light of a first predetermined pattern onto a detection surface from a first direction, said first projection optical system including first light shaping means at a position substantially conjugate with the detection surface for shaping light to conform with said first predetermined pattern; a second projection optical system for projecting second pattern light of a second predetermined pattern onto the detection surface from a second direction different from the first direction, said second projection optical system including second light shaping means at a position substantially conjugate with the detection surface for shaping light to conform with said second predetermined pattern; a first imaging optical system for forming an image of the first pattern light from said first projection optical system reflected by the detection surface; a second imaging optical system for forming an image of the second pattern light from said second projection optical system reflected by the detection surface; first light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said first imaging optical system, and having a first opening with a predetermined shape; second light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said second imaging optical system, and having a second opening with a predetermined shape; first scanning means for scanning the image formed by said first imaging optical system relative to said first light-receiving-side light-shielding means; second scanning means for scanning the image formed by said second imaging optical system relative to said second light-receiving-side light-shielding means; means for dividing the first pattern light into a plurality of portions corresponding to different parts of said first pattern; means for individually designating different first sets of one or more of said parts of the first pattern, in accordance with structure within respective areas on the detection surface that are disposed in a projection area of said first projection optical system, and for detecting only the portion or portions of the first pattern light corresponding to the designated first set and passing through said first opening from said first scanning means; second means for dividing the second pattern light into a plurality of portions corresponding to different parts of said second pattern; means for individually designating different second sets of one or more of said parts of the second pattern, in accordance with structure within respective areas on the detection surface that are disposed in a projection area of said second projection optical system, and for detecting only the portion or portions of the second pattern light corresponding to the designated second set and passing through said second opening from said second scanning means; said second projection optical system further including a projection objective lens and a first beam splitter, and said second imaging optical system including an imaging objective lens and a second beam splitter; light source means for supplying a parallel light beam onto the detection surface through said first beam splitter and said projection objective lens; and detection means for detecting an average state of the detection surface based on the parallel light beam reflected from the detection surface, which beam is converged through said imaging objective lens and said second beam splitter.

Claim 47

A surface position detection apparatus comprising: a first projection optical system for projecting first pattern light of a first predetermined pattern onto a detection surface from a first direction, said first projection optical system including first light shaping means at a position substantially conjugate with the detection surface for shaping light to conform with said first predetermined pattern; a second projection optical system for projecting second pattern light of a second predetermined pattern onto the detection surface from a second direction different from the first direction, said second projection optical system including second light shaping means at a position substantially conjugate with the detection surface for shaping light to conform with said second predetermined pattern; a first imaging optical system for forming an image of the first pattern light from said first projection optical system reflected by the detection surface; a second imaging optical system for forming an image of the second pattern light from said second projection optical system reflected by the detection surface; first light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said first imaging optical system, and having a first opening with a predetermined shape; second light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said second imaging optical system, and having a second opening with a predetermined shape; first scanning means for scanning the image formed by said first imaging optical system relative to said first light-receiving-side light-shielding means; second scanning means for scanning the image formed by said second imaging optical system relative to said second light-receiving-side light-shielding means; means for dividing the first pattern light into a plurality of portions corresponding to different parts of said first pattern; means for individually designating different first sets of one or more of said parts of the first pattern, in accordance with structure within respective areas on the detection surface that are disposed in a projection area of said first projection optical system, and for detecting only the portion or portions of the first pattern light corresponding to the designated first set and passing through said first opening from said first scanning means; second means for dividing the second pattern light into a plurality of portions corresponding to different parts of said second pattern; means for individually designating different second sets of one or more of said parts of the second pattern, in accordance with structure within respective areas on the detection surface that are disposed in a projection area of said second projection optical system, and for detecting only the portion or portions of the second pattern light corresponding to the designated second set and passing through said second opening from said second scanning means; said second projection optical system further including a projection objective lens and a first beam splitter, and said second imaging optical system including an imaging objective lens and a second beam splitter; light source means for supplying a parallel light beam onto the detection surface through said first beam splitter and said projection objective lens; and detection means for detecting an average state of the detection surface based on the parallel light beam reflected from the detection surface, which beam is converged through said imaging objective lens and said second beam splitter.

Claim 48

A surface position detection apparatus comprising: a projection optical system for projecting pattern light of a predetermined pattern onto a detection surface from an oblique direction relative to the detection surface; an imaging optical system for forming an image of the pattern light reflected by the detection surface; light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said imaging optical system, and having an opening with a predetermined shape; scanning means for scanning the image formed by said imaging optical system relative to said light-receiving-side light-shielding means; means for detecting pattern light passing through said opening from said scanning means and outputting detection signals; means for individually designating sets of pattern light portions corresponding to different parts of the pattern, in accordance with structure within respective areas on the detection surface that are disposed in a projection area of said projection optical system; means for determining correction factors based on detection signals from the designated sets of pattern light portions; and means for driving said detection surface in accordance with said correction factors.

Claim 49

A surface position detection apparatus comprising: a projection optical system for projecting pattern light of a predetermined pattern onto a detection surface from an oblique direction relative to the detection surface; an imaging optical system for forming an image of the pattern light reflected by the detection surface; light-receiving-side light-shielding means arranged at a position substantially conjugate with the detection surface in said imaging optical system, and having an opening with a predetermined shape; scanning means for scanning the image formed by said imaging optical system relative to said light-receiving-side light-shielding means; means for detecting pattern light passing through said opening from said scanning means and outputting detection signals; means for individually designating sets of pattern light portions corresponding to different parts of the pattern, in accordance with structure within respective areas on the detection surface that are disposed in a projection area of said projection optical system; means for determining correction factors based on detection signals from the designated sets of pattern light portions; and means for driving said detection surface in accordance with said correction factors.