US5587103A
Expired / Lapsed
US
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Composition, and method for using same, for etching metallic alloys from a substrate
Assignee: Intersil Americas LLC
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Filing: 1996-01-17
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Granted: 1996-12-24
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Expires: 2016-01-17
Abstract
Abstract A composition for optimally removing or etching metallic alloys from chemically compatible substrates with minimal damage to the substrate. The preferred composition is Ammonium Fluoride, Hydrofluoric Acid, Nitric Acid, Phosphoric Acid and Water in a specified range of quantities used to selectively remove an Aluminum and Silicon Alloy and Titanium film from a chemically compatible substrate. The composition is placed in contact with Stainless Steel, Silicon, or other organic or metallic substrates to remove, etch, or pattern homogenous or layered Aluminum, Silicon, Titanium and Copper Alloys from the substrate with minimal etching to the underlying substrate.
Inventors
- 👤 Timothy A. Dennis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:09
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/10; C23F1/14; C23F1/16; C23F1/20; C09; C09K; C09K13/00; C09K13/04; C09K13/08; C23F1/26; C23F1/44
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
61 words
A method for removing Aluminum Alloy from a substrate comprising applying a composition to said Aluminum Alloy, said composition being five (5) to ten (10) parts by volume Nitric Acid, four (4) to ten (10) parts by volume Buffered Oxide Etch, thirty (30) to sixty-five (65) parts by volume Phosphoric Acid, and twenty-one (21) to thirty (30) parts by volume Water.
Claim 2
Independent Claim
61 words
A method for removing Aluminum Alloy from a substrate comprising applying a composition to said Aluminum Alloy, said composition being five (5) to ten (10) parts by volume Nitric Acid, four (4) to ten (10) parts by volume Buffered Oxide Etch, thirty (30) to sixty-five (65) parts by volume Phosphoric Acid, and twenty-one (21) to thirty (30) parts by volume Water.
Claim 3
Dependent Claim
26 words
The method of claim 1 wherein said step of applying said composition includes applying said composition to said Aluminum Alloy formed on a Stainless Steel substrate.
Claim 4
Dependent Claim
26 words
The method of claim 1 wherein said step of applying said composition includes applying said composition to Aluminum Alloy that is comprised of Aluminum and Silicon.
Claim 5
Dependent Claim
27 words
The method of claim 1 wherein said step of applying said composition includes applying said composition to Aluminum Alloy that is comprised of Aluminum, Silicon and Titanium.
Claim 6
Dependent Claim
26 words
The method of claim 4 wherein said step of applying said composition includes applying said composition to an Aluminum, Silicon and Titanium Alloy that is homogenous.
Claim 7
Dependent Claim
22 words
The method of claim 1 wherein said step of applying said composition includes applying said composition to selectively pattern said Aluminum Alloy.
Claim 8
Dependent Claim
53 words
A composition for etching an Alloy from a chemically compatible substrate comprising five (5) to ten (10) parts by volume Nitric Acid, four (4) to ten (10) parts by volume Buffered Oxide Etch, thirty (30) to sixty-five (65) parts by volume Phosphoric Acid, and twenty-one (21) to thirty (30) parts by volume Water.
Claim 9
Dependent Claim
53 words
A composition for etching an Alloy from a chemically compatible substrate comprising five (5) to ten (10) parts by volume Nitric Acid, four (4) to ten (10) parts by volume Buffered Oxide Etch, thirty (30) to sixty-five (65) parts by volume Phosphoric Acid, and twenty-one (21) to thirty (30) parts by volume Water.
Claim 10
Dependent Claim
51 words
The composition of claim 1 wherein the Alloy is an Aluminum and Silicon Alloy and said composition is seven point two (7.2) parts by volume Nitric Acid, five point eight (5.8) parts by volume Buffered Oxide Etch, sixty (60) parts by volume Phosphoric Acid, and twenty-nine (29) parts by volume Water.
Claim 11
Dependent Claim
52 words
The composition of claim 1 wherein the Alloy is a Silicon, Aluminum and Titanium Alloy and said composition is seven point two (7.2) parts by volume Nitric Acid, five point eight (5.8) parts by volume Buffered Oxide Etch, sixty (60) parts by volume Phosphoric Acid, and twenty-nine (29) parts by volume Water.
Claim 12
Dependent Claim
56 words
A composition for etching an Aluminum and Silicon Alloy from a Stainless Steel substrate comprising five (5) to ten (10) parts by volume Nitric Acid, four (4) to ten (10) parts by volume Buffered Oxide Etch, thirty (30) to sixty-five (65) parts by volume Phosphoric acid, and twenty-one (21) to thirty (thirty) parts by volume Water.
Claim 13
Dependent Claim
56 words
A composition for etching an Aluminum and Silicon Alloy from a Stainless Steel substrate comprising five (5) to ten (10) parts by volume Nitric Acid, four (4) to ten (10) parts by volume Buffered Oxide Etch, thirty (30) to sixty-five (65) parts by volume Phosphoric acid, and twenty-one (21) to thirty (thirty) parts by volume Water.
Claim 14
Dependent Claim
42 words
The composition of claim 10 wherein the Buffered Oxide Etch and Nitric Acid have lower parts by volume whereby additional Buffered Oxide Etch and Nitric Acid can be added during use of said composition to lengthen the active life of said composition.
Claim 15
Dependent Claim
20 words
The composition of claim 10 wherein said Aluminum Alloy is comprised of ninety-nine (99%) Aluminum and one percent (1%) Silicon.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-12-24 | 2000-06-24 | 2000-12-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-12-24 | 2004-06-24 | 2004-12-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-12-24 | 2008-06-24 | 2008-12-24 | $7700.00 | Window Closed / Lapsed |