Non-linear optical crystal element

Claim 2

A non-linear optical crystal element for generating a light beam in a wavelength range for UV rays based upon a light wave of a basic wave radiated thereto, said non-linear optical crystal element being formed of a deliquescent material, comprising: an incident surface of said element irradiated with the light beam of the basic wave; an outgoing surface of said element from which the light beam of the wavelength range of the UV rays is radiated; and, a protective film formed on said incident surface and on said outgoing surface, said protective film having at least first and second layers, and said first layer being formed directly on said incident surface or said outgoing surface by ion plating, whereby said first layer forms a moisture protection layer for protecting said non-linear optical crystal element against crystal destruction caused by deliquescence due to moisture.

Claim 3

The non-linear optical crystal element of claim 1, wherein said protective film is formed so as to be non-reflective with respect to the light beam incident on said incident surface.

Claim 4

The non-linear optical crystal element of claim 1, wherein the first layer is formed of an oxide capable of transmitting the light beam in the wavelength range of the UV rays.

Claim 5

The non-linear optical crystal element of claim 3, wherein the first layer is formed of aluminum oxide.

Claim 6

The non-linear optical crystal element of claim 3, wherein the first layer is formed of hafnium oxide.

Claim 7

The non-linear optical crystal element of claim 3, wherein the first layer is formed of silicon dioxide.

Claim 8

The non-linear optical crystal element of claim 3, wherein said oxide is selected from the group consisting of magnesium oxide, scandium oxide, and yttrium oxide.

Claim 9

A non-linear optical crystal element for generating a light beam in a wavelength range for UV rays based upon a light wave of a basic wave radiated thereto, said non-linear optical crystal element being hexahedral-shaped and being formed of a deliquescent material, comprising: an incident surface of said element irradiated with the light beam of the basic wave; an outgoing surface of said element from which the light beam of the wavelength range of the UV rays is radiated, said outgoing surface facing said incident surface; and, a multi-layer protective film formed on at least said incident surface and said outgoing surface, a first layer of said multi-layer protective film being formed directly on said incident surface or said outgoing surface by ion plating so that said first layer forms a moisture protection layer for protecting said non-linear optical crystal element against crystal destruction caused by deliquescence due to moisture, and a second layer of said multi-layer protective film being formed on said first layer by a thin film forming method.

Claim 10

A non-linear optical crystal element for generating a light beam in a wavelength range for UV rays based upon a light wave of a basic wave radiated thereto, said non-linear optical crystal element being hexahedral-shaped and being formed of a deliquescent material, comprising: an incident surface of said element irradiated with the light beam of the basic wave; an outgoing surface of said element from which the light beam of the wavelength range of the UV rays is radiated, said outgoing surface facing said incident surface; and, a multi-layer protective film formed on at least said incident surface and said outgoing surface, a first layer of said multi-layer protective film being formed directly on said incident surface or said outgoing surface by ion plating so that said first layer forms a moisture protection layer for protecting said non-linear optical crystal element against crystal destruction caused by deliquescence due to moisture, and a second layer of said multi-layer protective film being formed on said first layer by a thin film forming method.

Claim 11

The non-linear optical crystal element of claim 8, wherein said protective film is formed so as to be non-reflective with respect to the light beam incident on said incident surface.

Claim 12

The non-linear optical crystal element of claim 8, wherein the first layer is formed of an oxide capable of transmitting the light beam in the wavelength range of the UV rays.

Claim 13

The non-linear optical crystal element of claim 10, wherein the first layer is formed of aluminum oxide.

Claim 14

The non-linear optical crystal element of claim 10, wherein the first layer is formed of hafnium oxide.

Claim 15

The non-linear optical crystal element of claim 10, wherein the first layer is formed of silicon dioxide.

Claim 16

The non-linear optical crystal element of claim 8, wherein said element is formed of barium borate.

Claim 17

The non-linear optical crystal element of claim 14, wherein said first layer is formed on two sides of said hexahedral-shaped element.

Claim 18

The non-linear optical crystal element of claim 8, wherein said element is formed of potassium dihydrogenphosphate.

Claim 19

The non-linear optical crystal element of claim 16, wherein said first layer is formed on six sides of said hexahedral-shaped element.

Claim 20

A non-linear optical crystal element for generating a light beam in a wavelength range for UV rays based upon a light wave of a basic wave radiated thereto, comprising: an incident surface of said element irradiated with the light beam of the basic wave; an outgoing surface of said element from which the light beam of the wavelength range of the UV rays is radiated; and, a protective film formed on said incident surface and on said outgoing surface, said protective film having at least two layers, a first of said layers directly contacted with said incident surface or said outgoing surface and being formed by ion plating, wherein the first layer is formed of a fluoride capable of transmitting the light beam in the wavelength range of the UV rays.

Claim 21

A non-linear optical crystal element for generating a light beam in a wavelength range for UV rays based upon a light wave of a basic wave radiated thereto, comprising: an incident surface of said element irradiated with the light beam of the basic wave; an outgoing surface of said element from which the light beam of the wavelength range of the UV rays is radiated; and, a protective film formed on said incident surface and on said outgoing surface, said protective film having at least two layers, a first of said layers directly contacted with said incident surface or said outgoing surface and being formed by ion plating, wherein the first layer is formed of a fluoride capable of transmitting the light beam in the wavelength range of the UV rays.

Claim 22

The non-linear optical crystal element of claim 18, wherein said first layer is selected from the group consisting of magnesium fluoride and lithium fluoride.