US5581075A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multi-beam scanning projection exposure apparatus and method with beam monitoring and control for uniform exposure of large area
Assignee: Nikon Corp
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Filing: 1995-05-22
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Granted: 1996-12-03
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Expires: 2015-05-22
Abstract
Abstract An exposure apparatus comprises a plurality of illumination optical systems for generating a plurality of light beams, a plurality of projection optical systems disposed corresponding to the plurality of illumination optical systems, respectively, a plurality of light intensity detectors, provided respectively for the plurality of illumination optical systems, for detecting individual intensities of the plurality of light beams, a light intensity changing device for changing the respective intensities of the plurality of light beams, and a control device for controlling the light intensity changing device and uniformizing the intensities of the plurality of light beams to a substantially fixed level.
Inventors
- 👤 Tsuyoshi Naraki
- 👤 Masamitsu Yanagihara
- 👤 Hiroshi Shirasu
- 👤 Tomohide Hamada
- 👤 Tetsuo Kikuchi
- 👤 Noriaki Yamamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 07:55
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70008; G03F7/7005; G03F7/70058; G03F7/70091; G03F7/70216; G03F7/70275; G03F7/70358; G03F7/70425; G03F7/70475; G03F7/70691; G03F7/70791
Claims Analysis
Total Claims: 52
Claim 1
Independent Claim
164 words
An exposure apparatus for projection exposing a predetermined pattern of a mask on a photosensitive substrate through projection optical systems while said mask and said photosensitive substrate are moved in a predetermined direction with respect to said projection optical systems, said exposure apparatus comprising: a plurality of illumination optical systems which respectively illuminate a plurality of illumination areas on said mask; a plurality of projection optical systems which respectively form images of said plurality of illumination areas on said mask in a corresponding plurality of projection areas on said photosensitive substrate; a detector which detects a light intensity distribution, along a direction orthogonal to the predetermined direction, in each of the plurality of projection areas on said photosensitive substrate; and a controller which controls said plurality of illumination optical systems to substantially equalize the light intensity distribution in each of the plurality of projection areas on said photosensitive substrate along the direction orthogonal to the predetermined direction, based on detection results of said detector.
Claim 2
Dependent Claim
164 words
An exposure apparatus for projection exposing a predetermined pattern of a mask on a photosensitive substrate through projection optical systems while said mask and said photosensitive substrate are moved in a predetermined direction with respect to said projection optical systems, said exposure apparatus comprising: a plurality of illumination optical systems which respectively illuminate a plurality of illumination areas on said mask; a plurality of projection optical systems which respectively form images of said plurality of illumination areas on said mask in a corresponding plurality of projection areas on said photosensitive substrate; a detector which detects a light intensity distribution, along a direction orthogonal to the predetermined direction, in each of the plurality of projection areas on said photosensitive substrate; and a controller which controls said plurality of illumination optical systems to substantially equalize the light intensity distribution in each of the plurality of projection areas on said photosensitive substrate along the direction orthogonal to the predetermined direction, based on detection results of said detector.
Claim 3
Dependent Claim
45 words
The exposure apparatus according to claim 1, wherein said controller has lens drivers which tilt a predetermined lens in each of said illumination optical systems within a plane including the direction orthogonal to the predetermined direction and an optical axis of the illumination optical system.
Claim 4
Dependent Claim
66 words
The exposure apparatus according to claim 2, wherein each of said plurality of illumination optical systems has an optical integrator which forms a multiplicity of secondary light sources based on light beams from a light source and a light converging optical system which converges light beams from said optical integrator, and said predetermined lens is a negative lens among lenses constituting said light converging optical system.
Claim 5
Dependent Claim
34 words
The exposure apparatus according to claim 1, wherein said controller has lens drivers which shift a said predetermined lens in each of said illumination optical systems in the direction orthogonal to the predetermined direction.
Claim 6
Dependent Claim
75 words
The exposure apparatus according to claim 4, wherein each of said plurality of illumination optical systems has a lens system which collimates the light beams from light sources in said plurality of illumination optical systems into parallel light beams and an optical integrator which forms a multiplicity of secondary light sources based on the parallel light beams through said lens system, and said predetermined lens is a positive lens among lenses constituting said lens system.
Claim 7
Dependent Claim
36 words
The exposure apparatus according to claim 1, wherein said controller has lens drives which tilt a substrate disposed in said illumination optical systems and is coated with a dielectric multi-layered film exhibiting an angular transmissivity property.
Claim 8
Dependent Claim
68 words
The exposure apparatus according to claim 1, further comprising: a second detector which detects an intensity of light beams of each of said plurality of illumination optical systems; and a second controller which controls each of said plurality of illumination optical systems to substantially equalize the intensity of the light beams of each of said plurality of illumination optical systems based on detection results of said second detector.
Claim 9
Dependent Claim
36 words
The exposure apparatus according to claim 7, wherein said second controller has a transmissivity adjusting filter disposed on an optical path of each of said illumination optical systems controls the transmissivity of said transmissivity adjusting filter.
Claim 10
Dependent Claim
31 words
The exposure apparatus according to claim 7, wherein said second controller sets, as a fiducial value, the minimum value of intensities of the light beams of said illumination optical systems respectively.
Claim 11
Dependent Claim
25 words
The exposure apparatus according to claim 7, wherein said second controller controls an output of a light source of each of said illumination optical systems.
Claim 12
Dependent Claim
24 words
The exposure apparatus according to claim 1, wherein said illumination optical systems have a single light source and a plurality of light guide elements.
Claim 13
Dependent Claim
19 words
The exposure apparatus according to claim 1, wherein said illumination optical system have a plurality of light sources, respectively.
Claim 14
Dependent Claim
180 words
An illumination optical apparatus for illuminating a plurality of illumination areas on an object with light beams, said apparatus comprising: a light source device which supplies illumination light beams; a multi-light-source-image forming device which forms light source images in spatially separated positions by converging the illumination light beams from said light source device; a plurality of blind devices respectively disposed in the positions of the light source images formed by said multi-light-source-image forming device and formed with variable apertures each assuming a predetermined shape; a plurality of illumination optical systems which illuminate the illumination areas on the object with the illumination light beams from the light source images by respectively converging the illumination light beams from the light source images through said blind devices; a plurality of photo detectors which photoelectrically detect the illumination light beams on optical paths of said illumination optical systems; and a controller which controls sizes of the apertures of said plurality of blind devices based on outputs from said plurality of photo detectors to equalize illuminance in the plurality of illumination areas on the object.
Claim 15
Dependent Claim
180 words
An illumination optical apparatus for illuminating a plurality of illumination areas on an object with light beams, said apparatus comprising: a light source device which supplies illumination light beams; a multi-light-source-image forming device which forms light source images in spatially separated positions by converging the illumination light beams from said light source device; a plurality of blind devices respectively disposed in the positions of the light source images formed by said multi-light-source-image forming device and formed with variable apertures each assuming a predetermined shape; a plurality of illumination optical systems which illuminate the illumination areas on the object with the illumination light beams from the light source images by respectively converging the illumination light beams from the light source images through said blind devices; a plurality of photo detectors which photoelectrically detect the illumination light beams on optical paths of said illumination optical systems; and a controller which controls sizes of the apertures of said plurality of blind devices based on outputs from said plurality of photo detectors to equalize illuminance in the plurality of illumination areas on the object.
Claim 16
Dependent Claim
94 words
The illumination optical apparatus according to claim 13, wherein said light source device has a plurality of light sources emitting illumination light beams having the same wavelength, said multi-light-source-image forming device has a plurality of light converging members which form the light source images by converging the illumination light beams from said plurality of light sources and light guide elements which relay respective light source images formed by said plurality of light converging members to the spatially separated positions, and said blind devices are disposed respectively at exit ends of said light guide elements.
Claim 17
Dependent Claim
48 words
The illumination optical apparatus according to claim 14, wherein an incident end of each light guide element has a circular shape in section, and the exit end of each light guide element has a sectional shape similar to the shape of a corresponding illumination area on the object.
Claim 18
Dependent Claim
38 words
The illumination optical apparatus according to claim 15, wherein the exit end of each of said light guide elements has a rectangular shape, and each blind device has four plates having rectilinear edges that form a rectangular aperture.
Claim 19
Dependent Claim
24 words
The illumination optical apparatus according to claim 16, wherein a centroid of the aperture of each blind device coincides with an optical axis therethrough.
Claim 20
Dependent Claim
42 words
The illumination optical apparatus according to claim 15, wherein the exit end of each of said light guide elements has a rectangular shape, each blind device has two plates having L-shaped edges, and a rectangular aperture is formed by the L-shaped edges.
Claim 21
Dependent Claim
24 words
The illumination optical apparatus according to claim 18, wherein a centroid of the aperture of each blind device coincides with an optical axis therethrough.
Claim 22
Dependent Claim
70 words
The illumination optical apparatus according to claim 13, wherein said multi-light-source-image forming device has light converging members which form the light source images by converging the illumination light beams from said light source device and light guide elements which relay the light source images formed by said light converging members to the spatially separated positions, and said blind devices are disposed respectively at exit ends of said light guide elements.
Claim 23
Dependent Claim
46 words
The illumination optical apparatus according to claim 13, wherein said photo detectors have light splitting members disposed, respectively, on optical paths of said illumination optical systems and devices which receive illumination light beams through said light splitting members, respectively, and photoelectrically convert the illumination light beams.
Claim 24
Dependent Claim
45 words
The illumination optical apparatus according to claim 13, wherein said controller controls sizes of the apertures of said plurality of blind devices so that an output from each photo detector is substantially coincident with a minimum of the outputs from said plurality of photo detectors.
Claim 25
Dependent Claim
77 words
The illumination optical apparatus according to claim 13, wherein each of said illumination optical systems has a collimator lens which collimates illumination light beams through said blind devices into parallel light beams, an optical integrator which forms a plurality of light source images based on the parallel light beams from said collimator lens and a condenser lens which illuminates the object with superposed light beams formed by condensing light beams from the plurality of light source images.
Claim 26
Dependent Claim
46 words
The illumination optical apparatus according to claim 13, comprising: a further detector which detects an illuminance of each of the illumination areas, wherein the aperture area of each blind device is so controlled as to be corrected based on a detection result of said further detector.
Claim 27
Dependent Claim
115 words
An exposure apparatus for exposing a pattern of a mask to a substrate, comprising: a light source device which generates a plurality of light beams that illuminate corresponding spatially separated portions of the pattern of the mask; a plurality of detectors which detect the intensities of the light beams, respectively; and a regulator which regulates the intensities of the light beams based on the intensities detected by the detectors so that the intensities of the light beams that illuminate the respective spatially separated portions of the pattern of the mask are substantially equalized, whereby portions of the substrate corresponding to respective spatially separated portions of the pattern of the mask may be exposed substantially equally.
Claim 28
Dependent Claim
115 words
An exposure apparatus for exposing a pattern of a mask to a substrate, comprising: a light source device which generates a plurality of light beams that illuminate corresponding spatially separated portions of the pattern of the mask; a plurality of detectors which detect the intensities of the light beams, respectively; and a regulator which regulates the intensities of the light beams based on the intensities detected by the detectors so that the intensities of the light beams that illuminate the respective spatially separated portions of the pattern of the mask are substantially equalized, whereby portions of the substrate corresponding to respective spatially separated portions of the pattern of the mask may be exposed substantially equally.
Claim 29
Dependent Claim
135 words
An exposure apparatus comprising: a plurality of illumination optical systems disposed to illuminate respective spatially separated portions of a mask; a plurality of projection optical systems disposed so as to correspond to said plurality of illumination optical systems, respectively, to project light from said portions of said mask onto a substrate; a plurality of light intensity detectors which are associated with said plurality of projection optical systems, respectively, and which detect individual intensities of illumination of the separated portions of the mask; a light intensity changing device for changing the intensities of illumination of the separated portions of the mask; and a control device which controls said light intensity changing device, based on the individual intensities of illumination detected by the detectors, so as to equalize the intensities of illumination substantially to a predetermined level.
Claim 30
Dependent Claim
135 words
An exposure apparatus comprising: a plurality of illumination optical systems disposed to illuminate respective spatially separated portions of a mask; a plurality of projection optical systems disposed so as to correspond to said plurality of illumination optical systems, respectively, to project light from said portions of said mask onto a substrate; a plurality of light intensity detectors which are associated with said plurality of projection optical systems, respectively, and which detect individual intensities of illumination of the separated portions of the mask; a light intensity changing device for changing the intensities of illumination of the separated portions of the mask; and a control device which controls said light intensity changing device, based on the individual intensities of illumination detected by the detectors, so as to equalize the intensities of illumination substantially to a predetermined level.
Claim 31
Dependent Claim
31 words
The exposure apparatus according to claim 26, wherein said control device controls said light intensity changing device so that said predetermined level corresponds to a minimum value of the individual intensities.
Claim 32
Dependent Claim
40 words
The exposure apparatus according to claim 26, comprising a further light intensity detector aligned with a plane of said substrate, said further light intensity detector detecting intensity of illumination of each of a plurality of separated portions of said substrate.
Claim 33
Dependent Claim
45 words
The exposure apparatus according to claim 28, wherein said control device corrects results of detection by said plurality of light intensity detectors based on a result of detection by said further light intensity detector and results of detection by said plurality of light intensity detectors.
Claim 34
Dependent Claim
21 words
The exposure apparatus according to claim 28, further comprising a device which moves said further light intensity detector in two dimensions.
Claim 35
Dependent Claim
60 words
The exposure apparatus according to claim 30, wherein said control device, in advance of an exposure, controls said light intensity changing device to change the illumination of the spatially separated portions of the mask based on detection by said further light intensity detector, and, during an exposure, maintains the equalized intensities of illumination by controlling said light intensity changing device.
Claim 36
Dependent Claim
32 words
The exposure apparatus according to claim 26, wherein said light intensity changing device has a member exhibiting a transmittance lower than transmittance of optical elements constituting each of said illumination optical systems.
Claim 37
Dependent Claim
96 words
An exposure apparatus in which a pattern on a mask is exposed to a substrate through a projection optical system, comprising: a light source which illuminates at least two areas on said mask; a plurality of first detectors which detect the intensity of illumination of said areas on said mask; a second detector which detects the intensity of illumination of areas on said substrate; and a calculator which calculates an offset value for detection results of said first detectors based on the detection results of said first detectors and a detection result of said second detector.
Claim 38
Dependent Claim
96 words
An exposure apparatus in which a pattern on a mask is exposed to a substrate through a projection optical system, comprising: a light source which illuminates at least two areas on said mask; a plurality of first detectors which detect the intensity of illumination of said areas on said mask; a second detector which detects the intensity of illumination of areas on said substrate; and a calculator which calculates an offset value for detection results of said first detectors based on the detection results of said first detectors and a detection result of said second detector.
Claim 39
Independent Claim
98 words
A method of exposing a pattern of a mask to a substrate, comprising: generating a plurality of light beams that illuminate corresponding spatially separated portions of the pattern of the mask; detecting the intensities of the light beams, respectively; and regulating the intensities of the light beams based on the detected intensities so that the intensities of the light beams that illuminate the respective spatially separated portions of the pattern of the mask are substantially equalized, whereby portions of the substrate corresponding to respective spatially separated portions of the pattern of the mask may be exposed substantially equally.
Claim 40
Independent Claim
98 words
A method of exposing a pattern of a mask to a substrate, comprising: generating a plurality of light beams that illuminate corresponding spatially separated portions of the pattern of the mask; detecting the intensities of the light beams, respectively; and regulating the intensities of the light beams based on the detected intensities so that the intensities of the light beams that illuminate the respective spatially separated portions of the pattern of the mask are substantially equalized, whereby portions of the substrate corresponding to respective spatially separated portions of the pattern of the mask may be exposed substantially equally.
Claim 41
Dependent Claim
72 words
An exposure method comprising: illuminating respective spatially separated portions of a mask; projecting light from said portions of said mask onto a substrate; detecting individual intensities of illumination of the separated portions of the mask; changing the intensities of illumination of the separated portions of the mask; and controlling said changing, based on the detected individual intensities of illumination, so as to equalize the intensities of illumination substantially to a predetermined level.
Claim 42
Dependent Claim
72 words
An exposure method comprising: illuminating respective spatially separated portions of a mask; projecting light from said portions of said mask onto a substrate; detecting individual intensities of illumination of the separated portions of the mask; changing the intensities of illumination of the separated portions of the mask; and controlling said changing, based on the detected individual intensities of illumination, so as to equalize the intensities of illumination substantially to a predetermined level.
Claim 43
Dependent Claim
29 words
The exposure method according to claim 35, wherein said controlling controls said light intensity changing so that said predetermined level corresponds to a minimum value of the individual intensities.
Claim 44
Dependent Claim
41 words
The exposure method according to claim 35, further comprising detecting intensity of illumination of each of a plurality of separated portions of said substrate; and correcting results of the first-mentioned detecting based thereon and on the results of the further detecting.
Claim 45
Dependent Claim
48 words
The exposure method according to claim 35, wherein, in advance of an exposure, said controlling controls said changing to change the illumination of the spatially separated portions of the mask based on said detecting, and during an exposure, controls said changing to maintain the equalized intensities of illumination.
Claim 46
Dependent Claim
125 words
An exposure method for projection exposing a predetermined pattern of a mask on a photosensitive substrate while said mask and said photosensitive substrate are moved in a predetermined direction, comprising: illuminating a plurality of illumination areas on said mask with respective light beams; projecting images of said plurality of illumination areas on said mask in a corresponding plurality of projection areas on said photosensitive substrate; detecting a light intensity distribution, along a direction orthogonal to the predetermined direction, in each of the plurality of projection areas on said photosensitive substrate; and controlling said illuminating to substantially equalize the light intensity distribution in each of the plurality of projection areas on said photosensitive substrate along the direction orthogonal to the predetermine direction, based on said detecting.
Claim 47
Dependent Claim
125 words
An exposure method for projection exposing a predetermined pattern of a mask on a photosensitive substrate while said mask and said photosensitive substrate are moved in a predetermined direction, comprising: illuminating a plurality of illumination areas on said mask with respective light beams; projecting images of said plurality of illumination areas on said mask in a corresponding plurality of projection areas on said photosensitive substrate; detecting a light intensity distribution, along a direction orthogonal to the predetermined direction, in each of the plurality of projection areas on said photosensitive substrate; and controlling said illuminating to substantially equalize the light intensity distribution in each of the plurality of projection areas on said photosensitive substrate along the direction orthogonal to the predetermine direction, based on said detecting.
Claim 48
Dependent Claim
35 words
The exposure method according to claim 39, further comprising: detecting intensities of said light beams, respectively; and controlling, in response to the last-mentioned detecting, the intensities of said light beams to substantially equalize the intensities.
Claim 49
Independent Claim
103 words
A method for illuminating a plurality of illumination areas on an object with light beams, comprising: supplying illumination light beams; forming light source images in spatially separated positions by converging the illumination light beams; providing a plurality of variable apertures in the positions of the light source images; illuminating the plurality of illumination areas on the object with illumination light beams from the light source images that are converged after passing through said apertures; photoelectrically detecting the last-mentioned illumination light beams; and controlling sizes of said apertures based on said detecting to equalize illuminances in the plurality of illumination areas on the object.
Claim 50
Independent Claim
103 words
A method for illuminating a plurality of illumination areas on an object with light beams, comprising: supplying illumination light beams; forming light source images in spatially separated positions by converging the illumination light beams; providing a plurality of variable apertures in the positions of the light source images; illuminating the plurality of illumination areas on the object with illumination light beams from the light source images that are converged after passing through said apertures; photoelectrically detecting the last-mentioned illumination light beams; and controlling sizes of said apertures based on said detecting to equalize illuminances in the plurality of illumination areas on the object.
Claim 51
Dependent Claim
30 words
The method according to claim 40, wherein said controlling controls sizes of said apertures so that a detection result of said detecting is substantially coincident with a minimum detection result.
Claim 52
Dependent Claim
31 words
The method according to claim 40, further comprising detecting an illuminance of each of the illumination areas, and wherein said controlling controls sizes of said apertures based on said further detecting.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-12-03 | 2000-06-03 | 2000-12-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-12-03 | 2004-06-03 | 2004-12-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-12-03 | 2008-06-03 | 2008-12-03 | $7700.00 | Window Closed / Lapsed |