US5572398A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Tri-polar electrostatic chuck
Assignee: HP Inc
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Filing: 1994-11-14
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Granted: 1996-11-05
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Expires: 2014-11-14
Abstract
Abstract A tri-polar electrostatic chuck has both positive and negative electrodes housed on a non-polarized base housing. A non-polarized guard ring surrounds the outer periphery of the chuck and enclosing the electrodes. A wafer is placed atop the chuck with its back-side cooled by a cooling gas that is piped up through the chuck. The edge of the wafer is made to reside over the guard ring, instead of over one of the polarized electrodes. The proximity of the non-polarized guard ring to the wafer edge helps to reduce the amount of plasma leakage around the edge of the wafer, resulting in less breakdown of the dielectric coating of the chuck. The positioning of the electrodes also provides for a uniform impedance across the processing surface of the wafer.
Inventors
- 👤 Peter Federlin
- 👤 Lee Chen
- 👤 D. Rex Wright
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:12
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/72; H02; H02N; H02N13/00
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
256 words
An electrostatic chuck (ESC) for electrostatically retaining a semiconductor wafer disposed thereon comprising: a base housing for forming a main support body to support said semiconductor wafer which resides thereon, said housing having an electrically isolated polarized region disposed on or in its upper surface but interior to its outer perimeter, such that said outer perimeter of said base housing is not biased by a polarizing potential; a first polarized electrode biased by a first polarizing potential and disposed within said polarized region, but electrically isolated from said base housing; a second polarized electrode biased by a second polarizing potential and disposed within said polarized region, but electrically isolated from said base housing and said first polarized electrode; such that when said semiconductor wafer is disposed above said base housing, first and second polarized electrodes, said first and second polarized electrodes electrostatically retain said semiconductor wafer thereon; wherein an impedance measured from said base housing through said first polarized electrode to a processing gas used to process said semiconductor wafer is substantially equivalent to an impedance measured from said base housing through said second polarized electrode to said processing gas, in order to provide for uniform impedance across said semiconductor wafer during processing; and wherein periphery of said semiconductor wafer resides proximal to said outer perimeter of said base housing in order to reduce attraction of charged particles of said processing gas from traversing around said semiconductor wafer, so as to inhibit bombardment of said base housing and said two polarized electrodes by said charged particles.
Claim 2
Dependent Claim
256 words
An electrostatic chuck (ESC) for electrostatically retaining a semiconductor wafer disposed thereon comprising: a base housing for forming a main support body to support said semiconductor wafer which resides thereon, said housing having an electrically isolated polarized region disposed on or in its upper surface but interior to its outer perimeter, such that said outer perimeter of said base housing is not biased by a polarizing potential; a first polarized electrode biased by a first polarizing potential and disposed within said polarized region, but electrically isolated from said base housing; a second polarized electrode biased by a second polarizing potential and disposed within said polarized region, but electrically isolated from said base housing and said first polarized electrode; such that when said semiconductor wafer is disposed above said base housing, first and second polarized electrodes, said first and second polarized electrodes electrostatically retain said semiconductor wafer thereon; wherein an impedance measured from said base housing through said first polarized electrode to a processing gas used to process said semiconductor wafer is substantially equivalent to an impedance measured from said base housing through said second polarized electrode to said processing gas, in order to provide for uniform impedance across said semiconductor wafer during processing; and wherein periphery of said semiconductor wafer resides proximal to said outer perimeter of said base housing in order to reduce attraction of charged particles of said processing gas from traversing around said semiconductor wafer, so as to inhibit bombardment of said base housing and said two polarized electrodes by said charged particles.
Claim 3
Dependent Claim
19 words
The ESC of claim 1 wherein said second polarizing potential is opposite in polarity from said first polarizing potential.
Claim 4
Dependent Claim
28 words
The ESC of claim 2 wherein said base housing is circularly shaped to accommodate a circular wafer and said first and second polarized electrodes are also circularly shaped.
Claim 5
Dependent Claim
47 words
The ESC of claim 3 wherein said first polarized electrode is disk-shaped and is disposed centrally at a center of said base housing and said second polarized electrode is ring shaped and is disposed between said first polarized electrode and said outer perimeter of said base housing.
Claim 6
Dependent Claim
28 words
The ESC of claim 4 wherein said first and second polarized electrodes have the same thickness and same surface area in order to provide for substantially equivalent impedance.
Claim 7
Dependent Claim
26 words
The ESC of claim 5 wherein a cooling gas is piped through said base housing to said semiconductor wafer in order to cool said semiconductor wafer.
Claim 8
Dependent Claim
49 words
The ESC of claim 6 wherein vertical sides of said electrodes have a slanted surface such that a physical force exerted inward from said outer perimeter onto said electrodes causes said slanted surface to exert a downward retaining force to retain said two polarized electrodes upon said base housing.
Claim 9
Dependent Claim
263 words
An electrostatic chuck (ESC) for electrostatically retaining a semiconductor wafer disposed thereon comprising: a base housing for forming a main support body to support said semiconductor wafer which resides thereon, said housing having a recessed region disposed on its upper surface but interior to its outer perimeter, such that said outer perimeter of said base housing has a surface level above said recessed region and is not biased by a polarizing potential; a first polarized electrode biased by a first polarizing potential and disposed within said recessed region, but electrically isolated from said base housing; a second polarized electrode biased by a second polarizing potential and disposed within said recessed region, but electrically isolated from said base housing and said first polarized electrode; such that when said semiconductor wafer is disposed above said base housing, first and second polarized electrodes, said first and second polarized electrodes electrostatically retain said semiconductor wafer thereon; wherein an impedance measured from said base housing through said first polarized electrode to a processing plasma used to process said semiconductor wafer is substantially equivalent to an impedance measured from said base housing through said second polarized electrode to said processing plasma, in order to provide for uniform impedance across said semiconductor wafer during processing; and wherein periphery of said semiconductor wafer resides proximal to said outer perimeter of said base housing in order to reduce attraction of charged particles of said processing plasma from traversing around said periphery of said semiconductor wafer, so as to inhibit bombardment of said base housing and said polarized electrodes by said charged particles.
Claim 10
Dependent Claim
263 words
An electrostatic chuck (ESC) for electrostatically retaining a semiconductor wafer disposed thereon comprising: a base housing for forming a main support body to support said semiconductor wafer which resides thereon, said housing having a recessed region disposed on its upper surface but interior to its outer perimeter, such that said outer perimeter of said base housing has a surface level above said recessed region and is not biased by a polarizing potential; a first polarized electrode biased by a first polarizing potential and disposed within said recessed region, but electrically isolated from said base housing; a second polarized electrode biased by a second polarizing potential and disposed within said recessed region, but electrically isolated from said base housing and said first polarized electrode; such that when said semiconductor wafer is disposed above said base housing, first and second polarized electrodes, said first and second polarized electrodes electrostatically retain said semiconductor wafer thereon; wherein an impedance measured from said base housing through said first polarized electrode to a processing plasma used to process said semiconductor wafer is substantially equivalent to an impedance measured from said base housing through said second polarized electrode to said processing plasma, in order to provide for uniform impedance across said semiconductor wafer during processing; and wherein periphery of said semiconductor wafer resides proximal to said outer perimeter of said base housing in order to reduce attraction of charged particles of said processing plasma from traversing around said periphery of said semiconductor wafer, so as to inhibit bombardment of said base housing and said polarized electrodes by said charged particles.
Claim 11
Dependent Claim
18 words
The ESC of claim 8 wherein said second polarizing potential is opposite in polarity from said polarizing potential.
Claim 12
Dependent Claim
27 words
The ESC of claim 9 wherein said base housing is circularly shaped to accommodate a circular wafer said first and second polarized electrodes are also circularly shaped.
Claim 13
Dependent Claim
47 words
The ESC of claim 10 wherein said first polarized electrode is disk-shaped and is disposed centrally at a center of said base housing and said second polarized electrode is ring shaped and is disposed between said first polarized electrode and said outer perimeter of said base housing.
Claim 14
Dependent Claim
28 words
The ESC of claim 11 wherein said first and second polarized electrodes have the same thickness and same surface area in order to provide for substantially equivalent impedance.
Claim 15
Dependent Claim
26 words
The ESC of claim 12 wherein a cooling gas is piped through said base housing to said semiconductor wafer in order to cool said semiconductor wafer.
Claim 16
Dependent Claim
23 words
The ESC of claim 13 wherein said first polarized electrode is positive in polarity and said second polarized electrode is negative in polarity.
Claim 17
Dependent Claim
51 words
The ESC of claim 14 wherein vertical sides of said two polarized electrodes have a slanted surface such that a physical force exerted inward from said outer perimeter onto said electrodes causes said slanted surface to exert a downward retaining force to retain said two polarized electrodes upon said base housing.
Claim 18
Independent Claim
296 words
A method of processing a semiconductor wafer by placing said semiconductor wafer on an electrostatic chuck, wherein an electrostatic force retains said wafer on said chuck, comprising the steps of: providing an electrostatic chuck having a base housing which forms a main support body to support said wafer, said housing having an electrically isolated polarized region disposed on or in its upper surface but interior to its outer perimeter, such that said outer perimeter of said base housing is not biased by a polarizing potential; said chuck having a first polarized electrode disposed within said polarized region and electrically isolated from said base housing; said chuck also having a second polarized electrode disposed within said polarized region and electrically isolated from said base housing and said first polarized electrode; coupling a first polarizing potential to said first polarized electrode and coupling a second polarizing potential to said second polarized electrode, but not coupling either of said polarizing potentials to said base housing; coupling an AC source to said base housing to attract charged particles present in a processing gas to said semiconductor wafer disposed on said chuck; said first and second polarized electrodes, being disposed adjacent to each other and within said polarized region, provide for substantially equivalent impedance when measured from said base housing through either said first polarized electrode or said second polarized electrode to said processing gas, so as to provide for uniform impedance across said semiconductor wafer during processing; and wherein periphery of said semiconductor wafer resides proximal to said outer perimeter of said base housing in order to reduce attraction of charged particles of said processing gas from traversing around said semiconductor wafer, so as to inhibit bombardment of said base housing and said two polarized electrodes by said charged particles.
Claim 19
Independent Claim
296 words
A method of processing a semiconductor wafer by placing said semiconductor wafer on an electrostatic chuck, wherein an electrostatic force retains said wafer on said chuck, comprising the steps of: providing an electrostatic chuck having a base housing which forms a main support body to support said wafer, said housing having an electrically isolated polarized region disposed on or in its upper surface but interior to its outer perimeter, such that said outer perimeter of said base housing is not biased by a polarizing potential; said chuck having a first polarized electrode disposed within said polarized region and electrically isolated from said base housing; said chuck also having a second polarized electrode disposed within said polarized region and electrically isolated from said base housing and said first polarized electrode; coupling a first polarizing potential to said first polarized electrode and coupling a second polarizing potential to said second polarized electrode, but not coupling either of said polarizing potentials to said base housing; coupling an AC source to said base housing to attract charged particles present in a processing gas to said semiconductor wafer disposed on said chuck; said first and second polarized electrodes, being disposed adjacent to each other and within said polarized region, provide for substantially equivalent impedance when measured from said base housing through either said first polarized electrode or said second polarized electrode to said processing gas, so as to provide for uniform impedance across said semiconductor wafer during processing; and wherein periphery of said semiconductor wafer resides proximal to said outer perimeter of said base housing in order to reduce attraction of charged particles of said processing gas from traversing around said semiconductor wafer, so as to inhibit bombardment of said base housing and said two polarized electrodes by said charged particles.
Claim 20
Dependent Claim
25 words
The method of claim 16 wherein said first polarizing potential is of a first polarity and said second polarizing potential is of an opposite polarity.
Claim 21
Dependent Claim
13 words
The method of claim 17 wherein said semiconductor wafer is a silicon wafer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-11-05 | 2000-05-06 | 2000-11-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-11-05 | 2004-05-06 | 2004-11-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-11-05 | 2008-05-06 | 2008-11-05 | $7700.00 | Window Closed / Lapsed |