US5567152A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Heat processing apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1995-04-11
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Granted: 1996-10-22
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Expires: 2015-04-11
Abstract
Abstract A heat processing apparatus for subjecting heat processing to a wafer by heating includes a reaction tube for containing the wafers, a heating element provided around the reaction tube, for heating an inside of the reaction tube, a plurality of heat radiating members provided concentrically around the heating element with an airtight space between the heating element and an innermost one of the heat radiating members and airtight spaces between the heat radiating members, and a pressure-reducing device for reducing the pressure of these airtight spaces. In this heat processing apparatus, the pressures of the airtight spaces are reduced by the pressure-reducing means at least when the temperature of the inside of the reaction tube is increased.
Inventors
- 👤 Tamotsu Morimoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 19:24
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0434; C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/481; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B31/00; C30B31/06; C30B31/12
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
82 words
A heat processing apparatus for subjecting heat processing to an object to be processed by heating, comprising: a reaction tube for containing the object; a heating element provided around said reaction tube, for heating an inside of said reaction tube; a heat radiating member provided around said heating element with an airtight space therebetween; and pressure-reducing means for reducing pressure of said airtight space for achieving heat transfer mainly by radiation at least when a temperature inside said reaction tube is increased.
Claim 2
Dependent Claim
82 words
A heat processing apparatus for subjecting heat processing to an object to be processed by heating, comprising: a reaction tube for containing the object; a heating element provided around said reaction tube, for heating an inside of said reaction tube; a heat radiating member provided around said heating element with an airtight space therebetween; and pressure-reducing means for reducing pressure of said airtight space for achieving heat transfer mainly by radiation at least when a temperature inside said reaction tube is increased.
Claim 3
Dependent Claim
18 words
The apparatus according to claim 1, further comprising gas introducing means for introducing gas into the airtight space.
Claim 4
Dependent Claim
26 words
The apparatus according to claim 1, wherein said reaction tube, said heating element, and said heat radiating member are shaped cylindrically and concentrically with one another.
Claim 5
Dependent Claim
20 words
The apparatus according to claim 1, wherein said heat radiating member has a thickness ranging from 1 to 10 mm.
Claim 6
Dependent Claim
18 words
The apparatus according to claim 1, wherein said heat radiating member has a reflectance of 50% or more.
Claim 7
Dependent Claim
19 words
The apparatus according to claim 1, wherein said heat radiating member is formed of one of aluminum and tungsten.
Claim 8
Dependent Claim
22 words
The apparatus according to claim 1, wherein said pressure-reducing means reduces the pressure of the airtight space to 1 mTorr or lower.
Claim 9
Dependent Claim
109 words
A heat processing apparatus for subjecting heat processing to an object to be processed by heating, comprising: a reaction tube for containing the object; a heating element provided around said reaction tube, for heating an inside of said reaction tube; a plurality of heat radiating members provided around said heating element, with an airtight space between said heating element and an innermost one of said plurality of heat radiating members and at least one airtight space between said heat radiating members; and pressure-reducing means for reducing pressure of said airtight spaces for achieving heat transfer mainly by radiation at least when a temperature inside said reaction tube is increased.
Claim 10
Dependent Claim
109 words
A heat processing apparatus for subjecting heat processing to an object to be processed by heating, comprising: a reaction tube for containing the object; a heating element provided around said reaction tube, for heating an inside of said reaction tube; a plurality of heat radiating members provided around said heating element, with an airtight space between said heating element and an innermost one of said plurality of heat radiating members and at least one airtight space between said heat radiating members; and pressure-reducing means for reducing pressure of said airtight spaces for achieving heat transfer mainly by radiation at least when a temperature inside said reaction tube is increased.
Claim 11
Dependent Claim
18 words
The apparatus according to claim 8, further comprising gas introducing means for introducing gas into the airtight space.
Claim 12
Dependent Claim
28 words
The apparatus according to claim 8, wherein said reaction tube, said heating element, and said plurality of heat radiating members are shaped cylindrically and concentrically with one another.
Claim 13
Dependent Claim
23 words
The apparatus according to claim 8, wherein said plurality of heat radiating members each have a thickness ranging from 1 to 10 mm.
Claim 14
Dependent Claim
21 words
The apparatus according to claim 8, wherein said plurality of heat radiating members each have a reflectance of 50% or more.
Claim 15
Dependent Claim
21 words
The apparatus according to claim 8, wherein said plurality of heat radiating members are formed of one of aluminum and tungsten.
Claim 16
Dependent Claim
22 words
The apparatus according to claim 8, wherein said pressure-reducing means reduces the pressure of the airtight space to 1 mTorr or lower.
References Cited (Backward Citations)
US5000682A
Cited
JPH06168899A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-10-22 | 2000-04-22 | 2000-10-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-10-22 | 2004-04-22 | 2004-10-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-10-22 | 2008-04-22 | 2008-10-22 | $7700.00 | Window Closed / Lapsed |