Plasma ashing method with oxygen pretreatment

Claim 1

A method for ashing a resist on a wafer in a downstream plasma ashing apparatus which has a plasma generation chamber in which a plasma is generated from a gas by introducing microwaves into the gas, a plasma reaction chamber in which the wafer is loaded and a shower-head which is disposed between and separates the plasma generation chamber and the plasma reaction chamber and prevents charged particles and microwaves from penetrating into the plasma reaction chamber but which allows electrically neutral reactive species to flow into the plasma reaction chamber, the gas being introduced into the plasma generation chamber and exhausted from an end of the plasma reaction chamber remote from the shower-head, the method comprising the steps of: maintaining a flow of the gas, which is a non-activated oxygen containing gas, into the plasma reaction chamber prior to generation of the plasma in the plasma generation chamber; loading a wafer having the resist thereon into the plasma reaction chamber; and generating the plasma for carrying out ashing of the resist.

Claim 2

A method for ashing a resist on a wafer in a downstream plasma ashing apparatus which has a plasma generation chamber in which a plasma is generated from a gas by introducing microwaves into the gas, a plasma reaction chamber in which the wafer is loaded and a shower-head which is disposed between and separates the plasma generation chamber and the plasma reaction chamber and prevents charged particles and microwaves from penetrating into the plasma reaction chamber but which allows electrically neutral reactive species to flow into the plasma reaction chamber, the gas being introduced into the plasma generation chamber and exhausted from an end of the plasma reaction chamber remote from the shower-head, the method comprising the steps of: maintaining a flow of the gas, which is a non-activated oxygen containing gas, into the plasma reaction chamber prior to generation of the plasma in the plasma generation chamber; loading a wafer having the resist thereon into the plasma reaction chamber; and generating the plasma for carrying out ashing of the resist.

Claim 10

A method for ashing a wafer having a resist thereon, by single wafer processing in situ in a downstream plasma ashing apparatus which has a plasma generation chamber in which a plasma is generated from a gas by introducing microwaves into the gas, a plasma reaction chamber in which the wafer is loaded and a shower-head which is disposed between and separates the plasma generation chamber and the plasma reaction chamber and prevents charged particles and microwaves from penetrating into the plasma reaction chamber but which allows electrically neutral reactive species to flow into the plasma reaction chamber, the gas being introduced into the plasma generation chamber and exhausted from an end of the plasma reaction chamber remote from the shower-head, the method comprising the steps of: turning off the plasma; and maintaining a flow of the gas, which is a non-activated oxygen containing gas, into the plasma reaction chamber immediately before ashing the wafer, wherein the non-activated oxygen containing gas is selected from the group consisting of an essentially pure oxygen gas, a mixed gas of oxygen and water vapor and essentially the same gas as a gas used for an ashing process.

Claim 11

A method for ashing a wafer having a resist thereon, by single wafer processing in situ in a downstream plasma ashing apparatus which has a plasma generation chamber in which a plasma is generated from a gas by introducing microwaves into the gas, a plasma reaction chamber in which the wafer is loaded and a shower-head which is disposed between and separates the plasma generation chamber and the plasma reaction chamber and prevents charged particles and microwaves from penetrating into the plasma reaction chamber but which allows electrically neutral reactive species to flow into the plasma reaction chamber, the gas being introduced into the plasma generation chamber and exhausted from an end of the plasma reaction chamber remote from the shower-head, the method comprising the steps of: turning off the plasma; and maintaining a flow of the gas, which is a non-activated oxygen containing gas, into the plasma reaction chamber immediately before ashing the wafer, wherein the non-activated oxygen containing gas is selected from the group consisting of an essentially pure oxygen gas, a mixed gas of oxygen and water vapor and essentially the same gas as a gas used for an ashing process.

Claim 13

A method for ashing a resist in a downstream plasma ashing apparatus which has a plasma generation chamber in which a plasma is generated from a gas by introducing microwaves into the gas, a plasma reaction chamber in which the wafer is loaded and a shower-head which is disposed between and separates the plasma generation chamber and the plasma reaction chamber and prevents charged particles and microwaves from penetrating into the plasma reaction chamber but which allows electrically neutral reactive species to flow into the plasma reaction chamber, the gas being introduced into the plasma generation chamber and exhausted from an end of the plasma reaction chamber remote from the shower-head, the method comprising the steps of: evacuating the plasma generation chamber and the plasma reaction chamber, after being exposed to the atmosphere; flowing the gas, which is a non-activated oxygen containing gas, into the plasma reaction chamber, wherein the gas is selected from the group consisting of an essentially pure oxygen gas, a mixed gas of oxygen and water vapor and essentially the same gas as a gas used for an ashing process; loading a wafer having the resist thereon into the plasma reaction chamber; and carrying out the ashing process by turning on the plasma reaction chamber.

Claim 14

A method for ashing a resist in a downstream plasma ashing apparatus which has a plasma generation chamber in which a plasma is generated from a gas by introducing microwaves into the gas, a plasma reaction chamber in which the wafer is loaded and a shower-head which is disposed between and separates the plasma generation chamber and the plasma reaction chamber and prevents charged particles and microwaves from penetrating into the plasma reaction chamber but which allows electrically neutral reactive species to flow into the plasma reaction chamber, the gas being introduced into the plasma generation chamber and exhausted from an end of the plasma reaction chamber remote from the shower-head, the method comprising the steps of: evacuating the plasma generation chamber and the plasma reaction chamber, after being exposed to the atmosphere; flowing the gas, which is a non-activated oxygen containing gas, into the plasma reaction chamber, wherein the gas is selected from the group consisting of an essentially pure oxygen gas, a mixed gas of oxygen and water vapor and essentially the same gas as a gas used for an ashing process; loading a wafer having the resist thereon into the plasma reaction chamber; and carrying out the ashing process by turning on the plasma reaction chamber.

Claim 15

A method for ashing a resist in a downstream plasma ashing apparatus which has a plasma generation chamber in which a plasma is generated from a gas by introducing microwaves into the gas, a plasma reaction chamber in which the wafer is loaded and a shower-head which is disposed between and separates the plasma generation chamber and the plasma reaction chamber and prevents charged particles and microwaves from penetrating into the plasma reaction chamber but which allows electrically neutral reactive species to flow into the plasma reaction chamber, the gas being introduced into the plasma generation chamber and exhausted from an end of the plasma reaction chamber remote from the shower-head, the method comprising the steps of: generating a plasma of a gas for an ashing process in the plasma generation chamber; turning off the plasma; flowing the gas for the ashing process in a non-activated state into the plasma reaction chamber; subsequently introducing the wafer having the resist thereon into the plasma reaction chamber; and turning on the plasma.

Claim 16

A method for ashing a resist in a downstream plasma ashing apparatus which has a plasma generation chamber in which a plasma is generated from a gas by introducing microwaves into the gas, a plasma reaction chamber in which the wafer is loaded and a shower-head which is disposed between and separates the plasma generation chamber and the plasma reaction chamber and prevents charged particles and microwaves from penetrating into the plasma reaction chamber but which allows electrically neutral reactive species to flow into the plasma reaction chamber, the gas being introduced into the plasma generation chamber and exhausted from an end of the plasma reaction chamber remote from the shower-head, the method comprising the steps of: generating a plasma of a gas for an ashing process in the plasma generation chamber; turning off the plasma; flowing the gas for the ashing process in a non-activated state into the plasma reaction chamber; subsequently introducing the wafer having the resist thereon into the plasma reaction chamber; and turning on the plasma.

Claim 17

A method for ashing a resist on a wafer by a multi-chamber dry processing system, wherein the system comprises a wafer transfer chamber which is connected to a first reaction chamber by a first vacuum tight valve, to a second reaction chamber by a second vacuum tight valve and to an evacuation pump, halide gases being used in the first reaction chamber for a dry etching process and the resist on the wafer being removed by a down-stream plasma ashing process in the second reaction chamber, a plasma generation chamber and a shower head, the shower head separating the second reaction chamber from the plasma generation chamber and preventing charged particles and microwaves from penetrating into the second plasma reaction chamber but allowing electrically neutral reactive species to flow into the second plasma reaction chamber, a gas used for the second reaction chamber being introduced into the plasma generation chamber and being exhausted at an end of the second plasma reaction chamber remote from the shower-head, the method comprising the steps of: completing the dry etching process for a wafer having a photo-resist thereon in the first reaction chamber by turning off a plasma and evacuating the first reaction chamber; opening a first vacuum tight valve thereby to transfer the wafer from the first reaction chamber to the wafer transfer chamber and then closing the first vacuum tight valve; maintaining a flow of the gas, which is a non-activated oxygen containing gas, into the second reaction chamber by turning off microwave power into the plasma generation chamber, wherein the gas is selected from the group consisting of an essentially pure oxygen gas, a mixed gas of oxygen and water vapor and essentially the same gas as a gas used for an ashing process; stopping the flow of the non-activated oxygen containing gas, and then opening a second vacuum tight valve to transfer the wafer from the wafer transfer chamber into the second reaction chamber; closing the second vacuum tight valve and then flowing the gas used for an ashing process into the second reaction chamber; and carrying out the ashing of the resist on the wafer in the second reaction chamber.

Claim 18

A method for ashing a resist on a wafer by a multi-chamber dry processing system, wherein the system comprises a wafer transfer chamber which is connected to a first reaction chamber by a first vacuum tight valve, to a second reaction chamber by a second vacuum tight valve and to an evacuation pump, halide gases being used in the first reaction chamber for a dry etching process and the resist on the wafer being removed by a down-stream plasma ashing process in the second reaction chamber, a plasma generation chamber and a shower head, the shower head separating the second reaction chamber from the plasma generation chamber and preventing charged particles and microwaves from penetrating into the second plasma reaction chamber but allowing electrically neutral reactive species to flow into the second plasma reaction chamber, a gas used for the second reaction chamber being introduced into the plasma generation chamber and being exhausted at an end of the second plasma reaction chamber remote from the shower-head, the method comprising the steps of: completing the dry etching process for a wafer having a photo-resist thereon in the first reaction chamber by turning off a plasma and evacuating the first reaction chamber; opening a first vacuum tight valve thereby to transfer the wafer from the first reaction chamber to the wafer transfer chamber and then closing the first vacuum tight valve; maintaining a flow of the gas, which is a non-activated oxygen containing gas, into the second reaction chamber by turning off microwave power into the plasma generation chamber, wherein the gas is selected from the group consisting of an essentially pure oxygen gas, a mixed gas of oxygen and water vapor and essentially the same gas as a gas used for an ashing process; stopping the flow of the non-activated oxygen containing gas, and then opening a second vacuum tight valve to transfer the wafer from the wafer transfer chamber into the second reaction chamber; closing the second vacuum tight valve and then flowing the gas used for an ashing process into the second reaction chamber; and carrying out the ashing of the resist on the wafer in the second reaction chamber.