US5559666A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Capacitor construction with oxidation barrier blocks
Assignee: Micron Technology Inc
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Filing: 1995-05-23
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Granted: 1996-09-24
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Expires: 2015-05-23
Abstract
Abstract A capacitor apparatus includes, a) a substrate having a node; b) an inner capacitor plate in ohmic electrical connection with the substrate node; c) an outer capacitor plate; d) a capacitor dielectric layer interposed between inner and outer capacitor plates; e) an electrically conductive reaction barrier layer interposed between the substrate node and the inner capacitor plate, the reaction barrier layer having outer lateral edges which are recessed beneath the inner capacitor plate; and f) oxidation barrier blocks being received over the recessed outer lateral edges beneath the inner capacitor plate. Methods of forming such a capacitor are also disclosed.
Inventors
- 👤 Thomas A. Figura
- 👤 Paul J. Schuele
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 08:40
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/033; H10D; H10D1/00; H10D1/60; H10D1/68
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
85 words
A capacitor apparatus comprising: a substrate having a node; an inner capacitor plate in ohmic electrical connection with the substrate node; an outer capacitor plate; a capacitor dielectric layer interposed between inner and outer capacitor plates; an electrically conductive reaction barrier layer interposed between the substrate node and the inner capacitor plate, the reaction barrier layer having outer lateral edges which are recessed beneath the inner capacitor plate; and oxidation barrier blocks being received over the recessed outer lateral edges beneath the inner capacitor plate.
Claim 2
Dependent Claim
85 words
A capacitor apparatus comprising: a substrate having a node; an inner capacitor plate in ohmic electrical connection with the substrate node; an outer capacitor plate; a capacitor dielectric layer interposed between inner and outer capacitor plates; an electrically conductive reaction barrier layer interposed between the substrate node and the inner capacitor plate, the reaction barrier layer having outer lateral edges which are recessed beneath the inner capacitor plate; and oxidation barrier blocks being received over the recessed outer lateral edges beneath the inner capacitor plate.
Claim 3
Dependent Claim
23 words
The capacitor apparatus of claim 1 wherein the recessed outer lateral reaction barrier layer edges are positioned laterally outward away from the node.
Claim 4
Dependent Claim
13 words
The capacitor apparatus of claim 1 wherein the oxidation barrier blocks are dielectric.
Claim 5
Dependent Claim
27 words
The capacitor apparatus of claim 1 wherein the recessed outer lateral edges are positioned laterally outward away from the node, and the oxidation barrier blocks are dielectric.
Claim 6
Dependent Claim
27 words
The capacitor apparatus of claim 1 wherein the node comprises a silicon material, the inner capacitor plate comprises platinum metal, and the capacitor dielectric is a titanate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-09-24 | 2000-03-25 | 2000-09-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-09-24 | 2004-03-25 | 2004-09-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-09-24 | 2008-03-25 | 2008-09-24 | $7700.00 | Window Closed / Lapsed |