US5558788A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dual beam optical system for pulsed laser ablation film deposition
Assignee: Lockheed Martin Energy Systems Inc
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Filing: 1993-11-30
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Granted: 1996-09-24
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Expires: 2013-11-30
Abstract
Abstract A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target.
Inventors
- 👤 Douglas N. Mashburn
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 21:54
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/0604; B23K26/0608; B23K26/067; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
160 words
A laser ablation apparatus comprising: a pulsed light source outputting a pulsed light beam; an ablation chamber having a sidewall; means for focusing the pulsed light beam into the ablation chamber; means, disposed within the ablation chamber, for supporting at least one target; means for dividing the pulsed light beam into two substantially equal halves having the same spatial and temporal intensity profile; and means for directing the two halves to a surface of the target such that they arrive from complementary angles relative to the target surface normal, the two halves intersecting and overlapping at the target surface and having a summed energy and power per unit area sufficient to effect ablation of material from the target surface without producing texturing in the target surface, thereby generating a plume of ablated material emanating from the target, the summed energy and power per unit area being selected to produce a non-textured target surface and a desired characteristic of the plume.
Claim 2
Dependent Claim
160 words
A laser ablation apparatus comprising: a pulsed light source outputting a pulsed light beam; an ablation chamber having a sidewall; means for focusing the pulsed light beam into the ablation chamber; means, disposed within the ablation chamber, for supporting at least one target; means for dividing the pulsed light beam into two substantially equal halves having the same spatial and temporal intensity profile; and means for directing the two halves to a surface of the target such that they arrive from complementary angles relative to the target surface normal, the two halves intersecting and overlapping at the target surface and having a summed energy and power per unit area sufficient to effect ablation of material from the target surface without producing texturing in the target surface, thereby generating a plume of ablated material emanating from the target, the summed energy and power per unit area being selected to produce a non-textured target surface and a desired characteristic of the plume.
Claim 3
Dependent Claim
28 words
A laser ablation apparatus according to claim 1, further comprising means, disposed within the ablation chamber, for supporting a substrate in line with the plume of ablated material.
Claim 4
Dependent Claim
27 words
A laser ablation apparatus according to claim 1, wherein the directing means comprises first and second mirrors positioned at complementary angles relative to the target surface normal.
Claim 5
Dependent Claim
20 words
A laser ablation apparatus according to claim 3, wherein the first and second mirrors are disposed outside the ablation chamber.
Claim 6
Dependent Claim
38 words
A laser ablation apparatus according to claim 4, further comprising first and second windows mounted in the sidewall of the ablation chamber and being positioned to pass respective ones of the two beam halves into the ablation chamber.
Claim 7
Dependent Claim
35 words
A laser ablation apparatus according to claim 4, further comprising shielding means disposed between the target and the first and second windows for preventing ablated material from being deposited on the first and second windows.
Claim 8
Dependent Claim
29 words
A laser ablation apparatus according to claim 6, wherein the shielding means comprises first and second transparent plates disposed respectively between the target and the first and second windows.
Claim 9
Dependent Claim
48 words
A laser ablation apparatus according to claim 7, further comprising first and second masks disposed between the target and the first and second transparent plates, respectively, each of the first and second masks having an opening sized and positioned to permit passage of each respective beam half therethrough.
Claim 10
Dependent Claim
27 words
A laser ablation apparatus according to claim 8, further comprising means for moving the first and second transparent plates relative to the first and second masks, respectively.
Claim 11
Dependent Claim
41 words
A laser ablation apparatus according to claim 1, wherein the dividing means comprises an optical mirrored wedge disposed outside the ablation chamber, and the directing means comprises first and second mirrors positioned at complementary angles relative to the target surface normal.
Claim 12
Dependent Claim
29 words
A laser ablation apparatus according to claim 1, wherein the focusing means comprises a focusing lens disposed outside the ablation chamber between the laser source and the dividing means.
Claim 13
Dependent Claim
27 words
A laser ablation apparatus according to claim 1, wherein the laser source is a pulsed excimer laser having a rectangular and the target material is a solid.
Claim 14
Dependent Claim
49 words
A laser ablation apparatus according to claim 1, wherein the two beam halves have a greater intensity edge and a lesser intensity edge, the two beam halves intersecting at the target with the less intensity edge of one half being overlapped by the greater intensity edge of the other.
Claim 15
Dependent Claim
70 words
A laser ablation apparatus comprising: an ablation chamber having a sidewall; at least one transparent window mounted in the sidewall; means for supporting at least one target within the ablation chamber; at least one light transmissive shield disposed between the at least one window and the target; and a mask juxtaposed the transparent plate and having an opening sized and positioned to permit passage of a laser ablation beam therethrough.
Claim 16
Dependent Claim
70 words
A laser ablation apparatus comprising: an ablation chamber having a sidewall; at least one transparent window mounted in the sidewall; means for supporting at least one target within the ablation chamber; at least one light transmissive shield disposed between the at least one window and the target; and a mask juxtaposed the transparent plate and having an opening sized and positioned to permit passage of a laser ablation beam therethrough.
Claim 17
Dependent Claim
29 words
A laser ablation apparatus according to claim 14, wherein the shield includes a transparent plate mounted in the ablation chamber between the at least one window and the target.
Claim 18
Dependent Claim
20 words
A laser ablation apparatus according to claim 14, further comprising means for moving the transparent plate relative to the mask.
Claim 19
Dependent Claim
52 words
A laser ablation apparatus according to claim 16, further comprising a laser source outputting a laser ablation beam, means for dividing the laser ablation beam into two substantially equal halves, and means for converging the two halves on a surface of the target from complementary angles relative to the target surface normal.
Claim 20
Dependent Claim
45 words
A laser ablation apparatus according to claim 17, wherein the at least one window includes first and second windows, and the at least one light transmissive shield comprises first and second light transmissive shields disposed respectively between the first and second windows and the target.
Claim 21
Dependent Claim
148 words
A laser ablation method comprising: outputting a pulsed light beam from a light source; focusing the pulsed light beam into an ablation chamber having a sidewall; supporting at least one target in the ablation chamber; dividing the pulsed light beam into two substantially equal halves having the same spatial and temporal intensity profile; and directing the two halves to a surface of the target such that they arrive from complementary angles relative to the target surface normal, the two halves intersecting and overlapping at the target surface and having a summed energy and power per unit area sufficient to effect ablation of material from the target surface without producing texturing in the target surface, thereby generating a plume of ablated material emanating from the target, the summed energy and power per unit area being selected to produce a non-textured target surface and a desired characteristic of the plume.
Claim 22
Dependent Claim
148 words
A laser ablation method comprising: outputting a pulsed light beam from a light source; focusing the pulsed light beam into an ablation chamber having a sidewall; supporting at least one target in the ablation chamber; dividing the pulsed light beam into two substantially equal halves having the same spatial and temporal intensity profile; and directing the two halves to a surface of the target such that they arrive from complementary angles relative to the target surface normal, the two halves intersecting and overlapping at the target surface and having a summed energy and power per unit area sufficient to effect ablation of material from the target surface without producing texturing in the target surface, thereby generating a plume of ablated material emanating from the target, the summed energy and power per unit area being selected to produce a non-textured target surface and a desired characteristic of the plume.
Claim 23
Dependent Claim
49 words
A laser ablation method according to claim 19, wherein the two beam halves have a greater intensity edge and a lesser intensity edge, the two beam halves intersecting at the target with the less intensity edge of one half being overlapped by the greater intensity edge of the other.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-09-24 | 2000-03-25 | 2000-09-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-09-24 | 2004-03-25 | 2004-09-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-09-24 | 2008-03-25 | 2008-09-24 | $7700.00 | Window Closed / Lapsed |