Thin film actuated mirror array having an improved optical efficiency

Claim 1

An array of M×N thin film actuated mirrors, wherein M and N are integers, for use in an optical projection system, comprising: a substrate; an array of M×N thin film actuating structures, each of the actuating structures including a first and a second actuating parts, the first and second actuating parts being identically structured, each of the first and second actuating parts being provided with a top, a bottom and a side surfaces, and a proximal and a distal ends, each of the first and second actuating parts having at least a thin film layer of a motion-inducing material including a top and a bottom surfaces, each of the first and second actuating parts further being provided with a first and a second electrodes with the first electrode being placed on the top surface of the motion-inducing thin film layer, and the second electrode, on the bottom surface of the motion inducing layer, the side surface from each of the actuating parts in each of the actuating structures being in physical contact with each other, the first electrode from each of the first and second actuating parts in each of the actuating structures being common to the first and second actuating parts, thereby functioning as a common bias electrode, the second electrode from each of the first and second actuating parts in each of the actuating structures functioning as a signal electrode in the corresponding actuating part, wherein an electrical signal applied across the motion-inducing thin film layer between the first and second electrodes in each actuating part causes a deformation of the motion-inducing thin film layer, and hence said each actuating part; an array of M×N supporting members, each of the supporting members being placed on top of the substrate wherein the proximal end of the actuating parts of each of the actuating structures is secured to the corresponding supporting member; and an array of M×N mirror layers, each of the mirror layers including a mirror for reflecting light beams and a supporting layer, each of the mirror layers being divided into a first and a second reflectors, the first and second reflectors being symmetric to each other, each of the reflectors being provided with a first surface, a second opposing surface and a central tab portion therebetween, the first surface and central tab portion, and the second opposing surface and central tab portion being separated by a dividing slot therebetween, wherein the central tab portion of each reflector is directly attached on top of each actuating part in each of the actuating structures such that when the central tab portion in each of the reflectors deforms in response to the electrical signal, the first and second opposing surfaces in each of the reflectors tilt while remaining planar, thereby allowing all of the first and second opposing surfaces to reflect light beams, resulting in an increased optical efficiency.