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US5541428A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor memory device with superimposed storage electrodes

Assignee: DOCUPORT (JERSEY) Ltd
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Filing: 1994-12-08
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Granted: 1996-07-30
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Expires: 2014-12-08
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Abstract

Abstract In a semiconductor memory device, storage electrodes of two memory cells adjacent to each other are superimposed with each other, with their contours being substantially aligned. As a result, the storage electrodes are extended to cover two memory cell regions. The superimposed storage electrodes are electrically insulated from each other, and the upper storage electrode extends through the lower storage electrode.

Inventors

  • 👤 Yoshiki Nagatomo

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 02:36
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/30; H10B12/31; H10B12/318; H10B12/01; Y; Y10; Y10S; Y10S257/00; Y10S257/908

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 146 words
A semiconductor memory device including plural memory cells provided on an underlying layer, storage electrodes for each said memory cell, and a cell plate opposed to said storage electrodes with a capacitor dielectric film therebetween, wherein: said storage electrodes for plural adjacent said memory cells being superimposed relative to each other, said superimposed storage electrodes having contours defined by respective outer edges, said contours of said superimposed storage electrodes being substantially entirely aligned; and said superimposed storage electrodes being insulated from each other and having respective parts that are electrically connected to said underlying layer, said part of each said superimposed storage electrode, other than said part of a lowermost said storage electrode positioned closest to said underlying layer, extending through and being insulated from at least one other said storage electrode that is positioned closer to said underlying layer than is said each storage electrode.
Claim 2
Dependent Claim 146 words
A semiconductor memory device including plural memory cells provided on an underlying layer, storage electrodes for each said memory cell, and a cell plate opposed to said storage electrodes with a capacitor dielectric film therebetween, wherein: said storage electrodes for plural adjacent said memory cells being superimposed relative to each other, said superimposed storage electrodes having contours defined by respective outer edges, said contours of said superimposed storage electrodes being substantially entirely aligned; and said superimposed storage electrodes being insulated from each other and having respective parts that are electrically connected to said underlying layer, said part of each said superimposed storage electrode, other than said part of a lowermost said storage electrode positioned closest to said underlying layer, extending through and being insulated from at least one other said storage electrode that is positioned closer to said underlying layer than is said each storage electrode.
Claim 3
Dependent Claim 24 words
A semiconductor memory device as claimed in claim 1, wherein said superimposed storage electrodes extend to cover regions of said plural adjacent memory cells.
Claim 4
Dependent Claim 26 words
A semiconductor memory device as claimed in claim 1, wherein said plural adjacent memory cells are aligned in a direction of data lines of said device.
Claim 5
Dependent Claim 26 words
A semiconductor memory device as claimed in claim 1, wherein said plural adjacent memory cells are aligned in a direction of word lines of said device.
Claim 6
Dependent Claim 27 words
A semiconductor memory device as claimed in claim 1, wherein said contours of said superimposed storage electrodes result from and are defined by a common photolithography treatment.
Claim 7
Dependent Claim 33 words
A semiconductor memory device as claimed in claim 1, wherein said part of said each superimposed storage electrode extends through a contact hole formed in said at least one other said storage electrode.

References Cited (Backward Citations)

US5103275A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1999-07-30 2000-01-29 2000-07-30 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2003-07-30 2004-01-29 2004-07-30 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2007-07-30 2008-01-29 2008-07-30 $7700.00 Window Closed / Lapsed

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