US5539197A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scanning near-field optical microscope having a medium denser than air in the gap between the probe chip and the sample being measured
Assignee: International Business Machines Corp
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Filing: 1993-09-29
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Granted: 1996-07-23
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Expires: 2013-09-29
Abstract
Abstract This scanning near-field optical microscope is of the type where a light beam (19) with a diameter of at maximum λ/20 is emitted, or received, by a sharply pointed probe tip (13) which is scanned across the surface of a sample (11) to be investigated. The light reflected by, and/or transmitted through, the sample (11) is detected by a detector (16) and/or further processed by a computer (24). The distance between the light-emitting probe tip (13) and the sample (11) under investigation is on the order of λ/20 as well, so that the surface of the sample (11) is within the near-field of said probe tip (13). This optical microscope is characterized in that the gap between the probe tip (13) and the sample (11) is filled with a liquid (40) of high opacity, including any liquids with a large negative dielectric constant ε, so as to attenuate the intensity of the lightwaves emitted or received by the probe tip (13) to such an extent that the penetration depth z 0 of the lightwaves inside the liquid, defined as the distance over which their intensity decreases to 1/e, is below 100 nm.
Inventors
- 👤 Daniel Courjon
- 👤 Wolfgang D. Pohl
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 15:57
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/18; G01Q60/22; B; B82; B82Y; B82Y20/00; B82Y35/00; G11; G11B; G11B7/00; G11B7/12; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/862
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
162 words
A scanning near-field optical microscope of the type where a light beam with a diameter of at maximum λ/20 is emitted by a sharply pointed probe tip and scanned across the surface of a sample to be investigated, and the light reflected by and/or transmitted through said sample is detected and further processed, and where the distance between the light-emitting probe tip (3; 13) and the sample under investigation is on the order of λ/20 as well, so that the surface of said sample is within the near-field of said light-emitting probe tip comprising a gap between said probe tip and said sample filled with a liquid of high opacity, including any liquid having a large negative dielectric constant ε, so as to attenuate the intensity of the lightwaves emitted by said probe tip to such an extent that the penetration depth z 0 of the lightwaves, defined as the distance over which their intensity decreases to 1/e, is below 100 nm.
Claim 2
Dependent Claim
162 words
A scanning near-field optical microscope of the type where a light beam with a diameter of at maximum λ/20 is emitted by a sharply pointed probe tip and scanned across the surface of a sample to be investigated, and the light reflected by and/or transmitted through said sample is detected and further processed, and where the distance between the light-emitting probe tip (3; 13) and the sample under investigation is on the order of λ/20 as well, so that the surface of said sample is within the near-field of said light-emitting probe tip comprising a gap between said probe tip and said sample filled with a liquid of high opacity, including any liquid having a large negative dielectric constant ε, so as to attenuate the intensity of the lightwaves emitted by said probe tip to such an extent that the penetration depth z 0 of the lightwaves, defined as the distance over which their intensity decreases to 1/e, is below 100 nm.
Claim 3
Dependent Claim
158 words
A scanning near-field optical microscope of the type where a light beam with a diameter of at maximum λ/20 is received by a sharply pointed probe tip which is scanned across the surface of the sample to be investigated, and the light transmitted through said sample is detected and further processed, and where the distance between the light-receiving probe tip and the sample under investigation is on the order of λ/20 as well, so that the surface of said sample is within the near-field of said probe tip comprising a gap between said probe tip and said sample is filled with a gap filling liquid of high opacity, including any liquid having a large negative dielectric constantε as to attenuate the intensity of the lightwaves received by said probe tip to such an extent that the penetration depth z 0 of the lightwaves, defined as the distance over which their intensity decreases to 1/e, is below 100 nm.
Claim 4
Dependent Claim
158 words
A scanning near-field optical microscope of the type where a light beam with a diameter of at maximum λ/20 is received by a sharply pointed probe tip which is scanned across the surface of the sample to be investigated, and the light transmitted through said sample is detected and further processed, and where the distance between the light-receiving probe tip and the sample under investigation is on the order of λ/20 as well, so that the surface of said sample is within the near-field of said probe tip comprising a gap between said probe tip and said sample is filled with a gap filling liquid of high opacity, including any liquid having a large negative dielectric constantε as to attenuate the intensity of the lightwaves received by said probe tip to such an extent that the penetration depth z 0 of the lightwaves, defined as the distance over which their intensity decreases to 1/e, is below 100 nm.
Claim 5
Dependent Claim
26 words
A scanning near-field optical microscope in accordance with claim 1 or 2, wherein said gap-filling liquid is a metal which is liquid at normal room temperature.
Claim 6
Dependent Claim
28 words
A scanning near-field optical microscope in accordance with claim 1 or 2, wherein said gap-filling liquid is a metal which is liquid at a temperature below 300° C.
Claim 7
Dependent Claim
27 words
A scanning near-field optical microscope in accordance with claim 3, wherein said gap-filling liquid is selected from the group consisting of gallium, indium, mercury and their alloys.
Claim 8
Dependent Claim
34 words
A scanning near-field optical microscope in accordance with claim 3, wherein said gap-filling liquid is a ternary or higher composition comprising at least one member of the group consisting of gallium, indium, and mercury.
Claim 9
Dependent Claim
26 words
A scanning near-field optical microscope in accordance with claim 1 or 2, wherein said probe tip and/or said sample surface are wetted by said gap-filling liquid.
Claim 10
Dependent Claim
29 words
A scanning near-field optical microscope in accordance with claim 7, wherein said probe tip and/or said sample surface are covered with a thin solid metal layer for improved wettability.
Claim 11
Dependent Claim
35 words
A scanning near-field optical microscope in accordance with claim 8, wherein said probe tip and/or said sample surface are covered with a thin layer of metal selected from the group consisting of gold and chromium.
Claim 12
Dependent Claim
49 words
A scanning near-field optical microscope in accordance with claim 2, wherein said light beam received by said probe tip is guided so as to impinge onto said sample surface under an angle larger than the angle for total internal reflection of the material of which the sample is composed.
Claim 13
Dependent Claim
18 words
A scanning near-field optical microscope in accordance with claim 10, wherein said impingement angle corresponds to normal incidence.
Claim 14
Dependent Claim
49 words
A scanning near-field optical microscope in accordance with claim 2, wherein said light beam received by said probe tip is guided so as to impinge onto said sample surface under an angle smaller than the angle for total internal reflection of the material of which the sample is composed.
Claim 15
Dependent Claim
44 words
A scanning near-field optical microscope in accordance with claim 1 or 2, wherein said probe tip and sample are enclosed by a pressure chamber enabling the application of hydrostatic pressure for stabilizing the liquid metal film in the gap between probe tip and sample.
References Cited (Backward Citations)
US4604520A
Cited
US5202004A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-23 | 2000-01-22 | 2000-07-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-23 | 2004-01-22 | 2004-07-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-23 | 2008-01-22 | 2008-07-23 | $7700.00 | Window Closed / Lapsed |