US5536965A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Porous thermal isolation mesas for hybrid uncooled infrared detectors
Assignee: Texas Instruments Inc
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Filing: 1995-06-07
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Granted: 1996-07-16
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Expires: 2015-06-07
Abstract
Abstract Thermal isolation mesas 36 comprising a porous material 64 are used to thermally insulate sensing integrated circuitry 44 from pixels 34 of an uncooled IR detector hybrid system 30. The porous material 64 is preferably a silicon-dioxide xerogel. The mesas 36 may also comprise a protective film 66.
Inventors
- 👤 Howard R. Beratan
- 👤 Chih-Chen Cho
- 👤 Scott R. Summerfelt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 05:37
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/18; H10F39/184; H10F39/1843; H10N; H10N15/00; H10N15/10; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49169
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
104 words
A hybrid thermal detector structure, comprising: an infrared sensing array comprising at least three thermally sensitive pixels, electrical contacts abutting one side of said pixels, and an optical coating in contact with an opposite side of said pixels; and a sensing integrated circuit structure comprised of integrated circuitry, a thermal isolation structure mounted on said integrated circuitry, and interconnect metal electrically connecting said integrated circuitry to a top region of said thermal isolation structure, said thermal isolation structure comprised of a porous material; wherein said electrical contacts of said infrared sensing array are coupled to said interconnect metal of said sensing integrated circuit structure.
Claim 2
Dependent Claim
104 words
A hybrid thermal detector structure, comprising: an infrared sensing array comprising at least three thermally sensitive pixels, electrical contacts abutting one side of said pixels, and an optical coating in contact with an opposite side of said pixels; and a sensing integrated circuit structure comprised of integrated circuitry, a thermal isolation structure mounted on said integrated circuitry, and interconnect metal electrically connecting said integrated circuitry to a top region of said thermal isolation structure, said thermal isolation structure comprised of a porous material; wherein said electrical contacts of said infrared sensing array are coupled to said interconnect metal of said sensing integrated circuit structure.
Claim 3
Dependent Claim
12 words
The structure of claim 1 wherein said porous material is a xerogel.
Claim 4
Dependent Claim
11 words
The structure of claim 2 wherein said xerogel comprises silicon dioxide.
Claim 5
Dependent Claim
12 words
The structure of claim 1 wherein said porous material is an aerogel.
Claim 6
Dependent Claim
11 words
The structure of claim 4 wherein said aerogel comprises silicon dioxide.
Claim 7
Dependent Claim
16 words
The structure of claim 1 wherein the porosity of said porous material is greater than 80%.
Claim 8
Dependent Claim
15 words
The structure of claim 1 wherein said thermal isolation structure also comprises a protective film.
Claim 9
Dependent Claim
12 words
The structure of claim 7 wherein said protective film comprises silicon dioxide.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-16 | 2000-01-15 | 2000-07-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-16 | 2004-01-15 | 2004-07-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-16 | 2008-01-15 | 2008-07-16 | $7700.00 | Window Closed / Lapsed |