US5534309A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for depositing particles on surfaces
Assignee: MSP Corp
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Filing: 1994-06-21
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Granted: 1996-07-09
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Expires: 2014-06-21
Abstract
Abstract A method of providing particle deposition on a semiconductor wafer or other surface first provides a flow of clean gas into a deposition chamber that purges the chamber prior to introduction of the wafer, and after introduction, continues the flow of clean gas. An aerosol is mixed into the clean gas flow for a desired length of time, so that as the combined flow passes through the deposition chamber particles are deposited on the wafer supported in the chamber. After the deposition has continued for either a desired particle count or a length of time, the flow of aerosol is discontinued, and a clean gas flow sheath is provided over the wafer as it is removed from the chamber. The apparatus carries out this method by providing a source of a clean gas, valves for controlling aerosol introduction into the clean gas, and a support for the wafer in the path of gas introduced into the chamber.
Inventors
- 👤 Benjamin Y. H. Liu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 07:03
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0448; B; B05; B05B; B05B12/00; B05B12/02; B05D; B05D1/00; B05D1/02; B05D1/12
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
149 words
A method of depositing particles from a source onto a wafer supported in place at a known location in a deposition chamber comprising the steps of: providing and maintaining a clean gas flow into the deposition chamber directed onto the wafer supported in place at the known location to purge unwanted particles from the deposition chamber; providing a gas flow containing particles from the source into the deposition chamber onto the wafer supported in place at the known location for a time to deposit a desired number of particles from the source onto the wafer and then discontinuing the gas flow containing particles from the source; and maintaining the wafer at the known location and providing for a selected time a clean gas flow into the chamber after discontinuing gas flow containing particles from the source prior to moving the wafer from the known location in the deposition chamber.
Claim 2
Independent Claim
149 words
A method of depositing particles from a source onto a wafer supported in place at a known location in a deposition chamber comprising the steps of: providing and maintaining a clean gas flow into the deposition chamber directed onto the wafer supported in place at the known location to purge unwanted particles from the deposition chamber; providing a gas flow containing particles from the source into the deposition chamber onto the wafer supported in place at the known location for a time to deposit a desired number of particles from the source onto the wafer and then discontinuing the gas flow containing particles from the source; and maintaining the wafer at the known location and providing for a selected time a clean gas flow into the chamber after discontinuing gas flow containing particles from the source prior to moving the wafer from the known location in the deposition chamber.
Claim 3
Dependent Claim
25 words
The method of claim 1 including the step of counting the particles from the source being introduced into the deposition chamber for controlling particle introduction.
Claim 4
Dependent Claim
30 words
The method of claim 1, wherein the particles from the source carry an electrostatic charge, and an electric field is used to deposit the charged particles in the deposition chamber.
Claim 5
Dependent Claim
29 words
The method of claim 1 including a step of controlling a total gas flow into the deposition chamber at a substantially constant volume during the steps of the method.
Claim 6
Independent Claim
143 words
A method of depositing particles from a source onto a wafer in a deposition chamber comprising the steps of: providing a clean gas flow into the deposition chamber directed onto the wafer to purge unwanted particles from the deposition chamber; providing an aerosol gas flow containing particles from the source and adding the aerosol flow to the clean gas flow into the deposition chamber to provide a total gas flow containing particles into the deposition chamber and onto the wafer for a time sufficient to deposit a desired number of particles from the source onto the wafer, and then discontinuing the aerosol gas flow containing particles from the source; and maintaining for a selected time a clean gas flow into the chamber after discontinuing the aerosol gas flow containing particles from the source prior to removal of the wafer from the deposition chamber.
Claim 7
Independent Claim
143 words
A method of depositing particles from a source onto a wafer in a deposition chamber comprising the steps of: providing a clean gas flow into the deposition chamber directed onto the wafer to purge unwanted particles from the deposition chamber; providing an aerosol gas flow containing particles from the source and adding the aerosol flow to the clean gas flow into the deposition chamber to provide a total gas flow containing particles into the deposition chamber and onto the wafer for a time sufficient to deposit a desired number of particles from the source onto the wafer, and then discontinuing the aerosol gas flow containing particles from the source; and maintaining for a selected time a clean gas flow into the chamber after discontinuing the aerosol gas flow containing particles from the source prior to removal of the wafer from the deposition chamber.
Claim 8
Dependent Claim
51 words
The method of claim 5 including a step of controlling the total gas flow into the chamber after adding the aerosol flow to maintain a volume of gas flow into the deposition chamber substantially the same as a volume of gas flow into the chamber prior to adding the aerosol flow.
Claim 9
Dependent Claim
35 words
The method of claim 6 wherein the step of controlling the total flow comprises bleeding off gas from a line carrying gas flow to the deposition chamber after the step of adding the aerosol flow.
Claim 10
Dependent Claim
36 words
The method of claim 1 including a step of providing a particle classifier receiving the gas flow containing particles from the source and classifying the particles from the source prior to introduction into the deposition chamber.
Claim 11
Dependent Claim
62 words
The method of claim 8 wherein said classifying step comprises utilizing an electrostatic classifier having a laminar flow of two gases, one comprising the clean gas flow, and the other comprising the flow containing particles, and providing an electrostatic charge on the particles to move the particles from the flow containing particles through the clean gas flow and into the deposition chamber.
Claim 12
Independent Claim
157 words
A method of depositing particles from a source onto a wafer in a deposition chamber comprising the steps of: providing a clean gas flow into the deposition chamber to purge unwanted particles from the deposition chamber; introducing a wafer into the chamber while maintaining the clean gas flow and supporting the wafer in place at a known location in the deposition chamber; providing a gas flow containing particles from the source into the deposition chamber after introduction of the wafer for a time sufficient to deposit a desired number of particles from the source onto the wafer supported in place at the known location and then discontinuing the gas flow containing particles from the source; and maintaining a clean gas flow into the chamber after discontinuing gas flow containing particles from the source for a selected time prior to moving the wafer from the known location and prior to removal of the wafer from the deposition chamber.
Claim 13
Independent Claim
157 words
A method of depositing particles from a source onto a wafer in a deposition chamber comprising the steps of: providing a clean gas flow into the deposition chamber to purge unwanted particles from the deposition chamber; introducing a wafer into the chamber while maintaining the clean gas flow and supporting the wafer in place at a known location in the deposition chamber; providing a gas flow containing particles from the source into the deposition chamber after introduction of the wafer for a time sufficient to deposit a desired number of particles from the source onto the wafer supported in place at the known location and then discontinuing the gas flow containing particles from the source; and maintaining a clean gas flow into the chamber after discontinuing gas flow containing particles from the source for a selected time prior to moving the wafer from the known location and prior to removal of the wafer from the deposition chamber.
References Cited (Backward Citations)
US5194297A
Cited
US5306345A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-09 | 2000-01-08 | 2000-07-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-09 | 2004-01-08 | 2004-07-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-09 | 2008-01-08 | 2008-07-09 | $7700.00 | Window Closed / Lapsed |