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US5526449A Expired / Lapsed US ⏱️ 0.0 years remaining

Optoelectronic integrated circuits and method of fabricating and reducing losses using same

Assignee: Massachusetts Institute of Technology
•
Filing: 1994-07-14
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Granted: 1996-06-11
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Expires: 2014-07-14
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Abstract

Abstract An optical circuit and a method for substantially eliminating radiation losses associated with optical integrated circuits and, in particular, bends in optical waveguides, is disclosed. The circuit and waveguide are fabricated on a substrate having a periodic dielectric structure. The periodic dielectric structure exhibits a range of frequencies of electromagnetic radiation which cannot propagate into the structure. The range of frequencies is known as a photonic band gap or frequency band gap. Radiation at a frequency within the frequency band gap of the structure is confined within the circuit and waveguide by the periodic dielectric structure surrounding the circuit and waveguide. Radiation losses are substantially eliminated.

Inventors

  • 👤 Robert Meade
  • 👤 John Joannopoulos
  • 👤 Oscar L. Alerhand

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 15:33
CPC Classifications
G; G02; G02B; G02B6/00; B; B82; B82Y; B82Y20/00; G02B6/10; G02B6/12; G02B6/12004; G02B6/122; G02B6/1225; G02B6/125; H; H01; H01P; H01P1/00; H01P1/20; H01P1/2005; H01S; H01S5/00; H01S5/10; H01S5/11

Claims Analysis

Total Claims: 66
Claim 1
Independent Claim 98 words
A method of reducing radiation losses in optical integrated circuits, comprising: providing a substrate; forming the optical integrated circuit on or in the substrate; and forming a region of said substrate with a periodic dielectric lattice structure having a spatially periodic variation in dielectric constant in at least two dimensions in which the lattice dimensions are proportioned to produce a frequency band gap defining a band of frequencies of electromagnetic radiation at which the optical integrated circuit is operable such that radiation at such frequencies is substantially prevented from propagating in at least one dimension within the region.
Claim 2
Independent Claim 98 words
A method of reducing radiation losses in optical integrated circuits, comprising: providing a substrate; forming the optical integrated circuit on or in the substrate; and forming a region of said substrate with a periodic dielectric lattice structure having a spatially periodic variation in dielectric constant in at least two dimensions in which the lattice dimensions are proportioned to produce a frequency band gap defining a band of frequencies of electromagnetic radiation at which the optical integrated circuit is operable such that radiation at such frequencies is substantially prevented from propagating in at least one dimension within the region.
Claim 3
Dependent Claim 21 words
The method of claim 1 wherein the periodic dielectric lattice structure is formed at least partially within the optical integrated circuit.
Claim 4
Dependent Claim 18 words
The method of claim 1 wherein the step of forming the optical integrated circuit comprises forming a laser.
Claim 5
Dependent Claim 18 words
The method of claim 1 wherein the step of forming the optical integrated circuit comprises forming a detector.
Claim 6
Dependent Claim 18 words
The method of claim 1 wherein the step of forming the optical integrated circuit comprises forming a filter.
Claim 7
Dependent Claim 18 words
The method of claim 1 wherein the step of forming the optical integrated circuit comprises forming a modulator.
Claim 8
Dependent Claim 19 words
The method of claim 1 wherein the step of forming the optical integrated circuit comprises forming a power divider.
Claim 9
Dependent Claim 19 words
The method of claim 1 wherein the step of forming the optical integrated circuit comprises forming a power combiner.
Claim 10
Dependent Claim 18 words
The method of claim 1 wherein the step of forming the optical integrated circuit comprises forming a switch.
Claim 11
Dependent Claim 17 words
The method of claim 1 wherein the periodic dielectric lattice structure is formed periodic in two dimensions.
Claim 12
Dependent Claim 17 words
The method of claim 1 wherein the periodic dielectric lattice structure is formed periodic in three dimensions.
Claim 13
Dependent Claim 17 words
The method of claim 1 wherein the step of providing a substrate comprises providing a semiconductor material.
Claim 14
Dependent Claim 23 words
The method of claim 1 wherein the step of forming a region comprises forming a periodic pattern of void regions in the substrate.
Claim 15
Independent Claim 103 words
A method of reducing radiation losses associated with optical waveguides, comprising: providing a substrate; forming an optical waveguide on or in the substrate; and forming a region of said substrate with a periodic dielectric lattice structure having a spatially periodic variation in dielectric constant in at least two dimensions in which the lattice dimensions are proportioned to produce a frequency band gap defining a band of frequencies of electromagnetic radiation at which the optical waveguide is operable such that radiation at such frequencies is substantially prevented from propagating in at least one dimension within the region, said region being proximate to said waveguide.
Claim 16
Independent Claim 103 words
A method of reducing radiation losses associated with optical waveguides, comprising: providing a substrate; forming an optical waveguide on or in the substrate; and forming a region of said substrate with a periodic dielectric lattice structure having a spatially periodic variation in dielectric constant in at least two dimensions in which the lattice dimensions are proportioned to produce a frequency band gap defining a band of frequencies of electromagnetic radiation at which the optical waveguide is operable such that radiation at such frequencies is substantially prevented from propagating in at least one dimension within the region, said region being proximate to said waveguide.
Claim 17
Dependent Claim 13 words
The method of claim 14 wherein the waveguide is formed with a bend.
Claim 18
Dependent Claim 13 words
The method of claim 14 wherein the waveguide is formed with a taper.
Claim 19
Dependent Claim 17 words
The method of claim 14 wherein the periodic dielectric lattice structure is formed periodic in two dimensions.
Claim 20
Dependent Claim 17 words
The method of claim 14 wherein the periodic dielectric lattice structure is formed periodic in three dimensions.
Claim 21
Dependent Claim 17 words
The method of claim 14 wherein the step of providing a substrate comprises providing a semiconductor material.
Claim 22
Dependent Claim 23 words
The method of claim 14 wherein the step of forming a region comprises forming a periodic pattern of void regions in the substrate.
Claim 23
Dependent Claim 43 words
The method of claim 14 wherein the step of forming an optical waveguide comprises preventing the region with the periodic dielectric lattice structure from being formed in a specific portion of the substrate, said specific portion of the substrate being the optical waveguide.
Claim 24
Dependent Claim 36 words
The method of claim 14 wherein the step of forming an optical waveguide comprises diffusing a material into the substrate, said material having an index of refraction higher than the index of refraction of the substrate.
Claim 25
Dependent Claim 39 words
The method of claim 14 wherein the step of forming an optical waveguide comprises depositing a material onto a surface of the substrate, said material having a higher index of refraction than the index of refraction of the substrate.
Claim 26
Dependent Claim 42 words
The method of claim 14 wherein the step of forming an optical waveguide comprises forming two substantially parallel trenches in a surface of the substrate, said trenches defining a channel of material between them, said channel of material being the optical waveguide.
Claim 27
Dependent Claim 120 words
An optical circuit, comprising: a substrate having a region with a periodic dielectric lattice structure having a spatially periodic variation in dielectric constant in at least two dimensions in which the lattice dimensions are proportioned to produce a frequency band gap defining a band of frequencies of electromagnetic radiation at which the optical circuit is operable such that radiation at such frequencies is substantially prevented from propagating in at least one dimension within the region; and at least one optical device formed on or in the substrate proximate to the region with the periodic dielectric lattice structure, such that radiation from the optical device having a frequency within the frequency band gap is substantially prevented from propagating within the substrate.
Claim 28
Dependent Claim 120 words
An optical circuit, comprising: a substrate having a region with a periodic dielectric lattice structure having a spatially periodic variation in dielectric constant in at least two dimensions in which the lattice dimensions are proportioned to produce a frequency band gap defining a band of frequencies of electromagnetic radiation at which the optical circuit is operable such that radiation at such frequencies is substantially prevented from propagating in at least one dimension within the region; and at least one optical device formed on or in the substrate proximate to the region with the periodic dielectric lattice structure, such that radiation from the optical device having a frequency within the frequency band gap is substantially prevented from propagating within the substrate.
Claim 29
Dependent Claim 21 words
The optical circuit of claim 25 wherein the periodic dielectric lattice structure is formed at least partially within the optical device.
Claim 30
Dependent Claim 13 words
The optical circuit of claim 25 wherein the optical device is a laser.
Claim 31
Dependent Claim 13 words
The optical circuit of claim 25 wherein the optical device is a detector.
Claim 32
Dependent Claim 13 words
The optical circuit of claim 25 wherein the optical device is a filter.
Claim 33
Dependent Claim 13 words
The optical circuit of claim 25 wherein the optical device is a modulator.
Claim 34
Dependent Claim 14 words
The optical circuit of claim 25 wherein the optical device is a power divider.
Claim 35
Dependent Claim 14 words
The optical circuit of claim 25 wherein the optical device is a power combiner.
Claim 36
Dependent Claim 13 words
The optical circuit of claim 25 wherein the optical device is a switch.
Claim 37
Dependent Claim 17 words
The optical circuit of claim 25 wherein the periodic dielectric lattice structure is periodic in two dimensions.
Claim 38
Dependent Claim 17 words
The optical circuit of claim 25 wherein the periodic dielectric lattice structure is periodic in three dimensions.
Claim 39
Dependent Claim 13 words
The optical circuit of claim 25 wherein the substrate comprises a semiconductor material.
Claim 40
Dependent Claim 24 words
The optical circuit of claim 25 wherein the region with the frequency band gap comprises a periodic pattern of void regions in the substrate.
Claim 41
Dependent Claim 119 words
An optical circuit, comprising: a substrate having a region with a periodic dielectric lattice structure having a spatially periodic variation in dielectric constant in at least two dimensions in which the lattice dimensions are proportioned to produce a frequency band gap defining a band of frequencies of electromagnetic radiation at which the optical circuit is operable such that radiation at such frequencies is substantially prevented from propagating in at least one dimension within the region; and at least one optical waveguide formed on or in the substrate proximate to the region with the periodic dielectric lattice structure, such that radiation in the waveguide at a frequency within the frequency band gap is substantially prevented from propagating into the substrate.
Claim 42
Dependent Claim 119 words
An optical circuit, comprising: a substrate having a region with a periodic dielectric lattice structure having a spatially periodic variation in dielectric constant in at least two dimensions in which the lattice dimensions are proportioned to produce a frequency band gap defining a band of frequencies of electromagnetic radiation at which the optical circuit is operable such that radiation at such frequencies is substantially prevented from propagating in at least one dimension within the region; and at least one optical waveguide formed on or in the substrate proximate to the region with the periodic dielectric lattice structure, such that radiation in the waveguide at a frequency within the frequency band gap is substantially prevented from propagating into the substrate.
Claim 43
Dependent Claim 13 words
The optical circuit of claim 38 wherein the optical waveguide comprises a bend.
Claim 44
Dependent Claim 13 words
The optical circuit of claim 38 wherein the optical waveguide comprises a taper.
Claim 45
Dependent Claim 17 words
The optical circuit of claim 38 wherein the periodic dielectric lattice structure is periodic in two dimensions.
Claim 46
Dependent Claim 17 words
The optical circuit of claim 38 wherein the periodic dielectric lattice structure is periodic in three dimensions.
Claim 47
Dependent Claim 13 words
The optical circuit of claim 38 wherein the substrate comprises a semiconductor material.
Claim 48
Dependent Claim 24 words
The optical circuit of claim 38 wherein the region with the frequency band gap comprises a periodic pattern of void regions in the substrate.
Claim 49
Dependent Claim 23 words
The optical circuit of claim 38 wherein the optical waveguide is a channel in the substrate surrounded by the periodic dielectric lattice structure.
Claim 50
Dependent Claim 37 words
The optical circuit of claim 38 wherein the optical waveguide is a channel of material diffused into the substrate, said material having an index of refraction which is higher than the index of refraction of the substrate.
Claim 51
Dependent Claim 40 words
The optical circuit of claim 38 wherein the optical waveguide is a channel of material deposited on a surface of the substrate, said material having an index of refraction which is higher than the index of refraction of the substrate.
Claim 52
Dependent Claim 26 words
The optical circuit of claim 38 wherein the optical waveguide is a channel of material between two substantially parallel trenches in a surface of the substrate.
Claim 53
Dependent Claim 22 words
The method of claim 1 wherein the region with the periodic dielectric lattice structure is formed proximate to the optical integrated circuit.
Claim 54
Dependent Claim 21 words
The method of claim 1 wherein the region with the periodic dielectric lattice structure is formed within the optical integrated circuit.
Claim 55
Dependent Claim 21 words
The optical circuit of claim 25 wherein the region with the periodic dielectric lattice structure is proximate to the optical device.
Claim 56
Dependent Claim 20 words
The optical circuit of claim 25 wherein the region with the periodic dielectric lattice structure is within the optical device.
Claim 57
Dependent Claim 41 words
The method of claim 1 wherein the step of forming a region comprises forming a periodic pattern of holes in the substrate to form a periodic pattern of elements of a dielectric constant different from the dielectric constant of the substrate.
Claim 58
Dependent Claim 17 words
The method of claim 53 wherein the periodic pattern of elements formed is periodic in two dimensions.
Claim 59
Dependent Claim 17 words
The method of claim 53 wherein the periodic pattern of elements formed is periodic in three dimensions.
Claim 60
Dependent Claim 17 words
The method of claim 53 wherein the step of forming a periodic pattern of holes comprises drilling.
Claim 61
Dependent Claim 19 words
The method of claim 53 wherein the step of forming a periodic pattern of holes comprises reactive ion etching.
Claim 62
Dependent Claim 41 words
The method of claim 14 wherein the step of forming a region comprises forming a periodic pattern of holes in the substrate to form a periodic pattern of elements of a dielectric constant different from the dielectric constant of the substrate.
Claim 63
Dependent Claim 17 words
The method of claim 58 wherein the periodic pattern of elements formed is periodic in two dimensions.
Claim 64
Dependent Claim 17 words
The method of claim 58 wherein the periodic pattern of elements formed is periodic in three dimensions.
Claim 65
Dependent Claim 17 words
The method of claim 58 wherein the step of forming a periodic pattern of holes comprises drilling.
Claim 66
Dependent Claim 19 words
The method of claim 58 wherein the step of forming a periodic pattern of holes comprises reactive ion etching.

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