US5525422A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Self-adhesive tape which can be partially detackified by radiation (dicing tape)
Assignee: Beiersdorf AG
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Filing: 1994-10-27
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Granted: 1996-06-11
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Expires: 2014-10-27
Abstract
Abstract Radiation-crosslinkable self-adhesive tape (dicing tape) for the temporary fixing of wafers, having a support comprising a radiation-transparent film and a radiation-crosslinkable self-adhesive composition, characterized in that the polymeric self-adhesive composition contains copolymerized radiation initiators.
Inventors
- 👤 Manfred Spies
- 👤 Christian Harder
- 👤 Gunter Guse
- 👤 Claudia Feldt
- 👤 Robert Meyer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 21:03
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/74; H10P72/7402; C; C09; C09J; C09J7/00; C09J7/20; C09J7/22; C09J7/30; C09J7/38; C09J7/381; C09J7/385; C09J2203/00; C09J2203/326; H10P72/7416; Y; Y10; Y10S; Y10S522/00; Y10S522/904; Y10T; Y10T428/00; Y10T428/28; Y10T428/2809; Y10T428/2848; Y10T428/2852; Y10T428/2878; Y10T428/2891
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
91 words
In the method of production of a chip including the steps of temporarily fixing a wafer to a substrate and subsequently separating said wafer from said substrate, wherein the improvement comprises effecting said temporary fixing by means of a pressure sensitive adhesive tape, wherein said pressure sensitive adhesive tape comprises a backing which is a copolymer of ethyl-butyl-acrylate, is stretchable in both directions of its plane, is 5 to 400 μm thick and has coated thereon a self-adhesive composition, said self-adhesive composition comprising a copolymer of stearyl acrylate and benzoin acrylate.
Claim 2
Dependent Claim
91 words
In the method of production of a chip including the steps of temporarily fixing a wafer to a substrate and subsequently separating said wafer from said substrate, wherein the improvement comprises effecting said temporary fixing by means of a pressure sensitive adhesive tape, wherein said pressure sensitive adhesive tape comprises a backing which is a copolymer of ethyl-butyl-acrylate, is stretchable in both directions of its plane, is 5 to 400 μm thick and has coated thereon a self-adhesive composition, said self-adhesive composition comprising a copolymer of stearyl acrylate and benzoin acrylate.
Claim 3
Dependent Claim
17 words
The method according to claim 1, wherein the backing is from 20 to 80 μm in thickness.
Claim 4
Dependent Claim
26 words
The method according to claim 1, wherein the separation of said wafer from said substrate is effected by subjecting said pressure sensitive adhesive tape to radiation.
Claim 5
Dependent Claim
53 words
A pressure sensitive adhesive tape, wherein said pressure sensitive adhesive tape comprises a backing which is a copolymer of ethyl-butyl-acrylate, is stretchable in both directions of its plane, is 5 to 400 μm thick and has coated thereon a self-adhesive composition, said self-adhesive composition comprising a copolymer of stearyl acrylate and benzoin acrylate.
Claim 6
Dependent Claim
53 words
A pressure sensitive adhesive tape, wherein said pressure sensitive adhesive tape comprises a backing which is a copolymer of ethyl-butyl-acrylate, is stretchable in both directions of its plane, is 5 to 400 μm thick and has coated thereon a self-adhesive composition, said self-adhesive composition comprising a copolymer of stearyl acrylate and benzoin acrylate.
Claim 7
Dependent Claim
20 words
A pressure sensitive adhesive tape according to claim 4, wherein the backing is from 20 to 80 μm in thickness.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-06-11 | 1999-12-11 | 2000-06-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-11 | 2003-12-11 | 2004-06-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-11 | 2007-12-11 | 2008-06-11 | $7700.00 | Window Closed / Lapsed |