US5520054A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Increased wall thickness for robust bond for micromachined sensor
Assignee: Rosemount Inc
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Filing: 1994-03-29
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Granted: 1996-05-28
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Expires: 2014-03-29
Abstract
Abstract A micromachined device is described receiving a pressurizable fluid has a plurality of layers bonded together along at least one bond interface, the bond interface having a terminus bordering the pressurizable fluid. In a vicinity of at least one bond interface at least one layer has a shape that reduces a stress magnitude near the bond terminus. In a preferred embodiment a width of at least one layer increases toward the bond interface, to increase the pressure at which the device can operate without fracturing. In another embodiment, both layers bordering the bond interface have widths in the vicinity of the bond interface that increase toward the bond interface. Alternately, the layers have walls shaped such that, for a reference line perpendicular to the bond interface and passing through an end of the bond interface bordering the cavity, the cavity protrudes between the reference line and at least one of the walls.
Inventors
- 👤 Mark G. Romo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 14:55
CPC Classifications
G; G01; G01L; G01L9/00; G01L9/0041; G01L9/0042
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
110 words
A micromachined device adapted to receive a pressurized fluid, comprising: a first layer means; and a second layer means bonded to the first layer means along a bond interface, the bond interface having a terminus; wherein one of the first and second layer means defines a pressure sensitive diaphragm and wherein the second layer means has a cavity therein to receive the pressurized fluid and a wall with a wall face bordering the cavity, and wherein in the vicinity of the portion of the bond interface nearest the diaphragm, a vector normal to the wall face extends inwardly into the cavity and away from the plane of the bond interface.
Claim 2
Dependent Claim
110 words
A micromachined device adapted to receive a pressurized fluid, comprising: a first layer means; and a second layer means bonded to the first layer means along a bond interface, the bond interface having a terminus; wherein one of the first and second layer means defines a pressure sensitive diaphragm and wherein the second layer means has a cavity therein to receive the pressurized fluid and a wall with a wall face bordering the cavity, and wherein in the vicinity of the portion of the bond interface nearest the diaphragm, a vector normal to the wall face extends inwardly into the cavity and away from the plane of the bond interface.
Claim 3
Dependent Claim
27 words
The device of claim 1, wherein the second layer means has a wall width in the vicinity of the bond interface that increases toward the bond interface.
Claim 4
Dependent Claim
15 words
The device of claim 2, wherein the increase in wall width is continuous with length.
Claim 5
Dependent Claim
14 words
The device of claim 2, wherein the increase in wall width is substantially stepwise.
Claim 6
Dependent Claim
52 words
The device of claim 4, wherein the substantially stepwise increase in wall width defines a tab having a length in a direction generally parallel to the bond interface and a thickness in a direction generally normal to the bond interface, the tab length being equal to or greater than the tab thickness.
Claim 7
Dependent Claim
23 words
The device of claim 1, wherein a geometric angle between the wall face and the bond interface has a value less than 90°.
Claim 8
Dependent Claim
15 words
The device of claim 6, wherein the angle has a value between 5° and 70°.
Claim 9
Dependent Claim
27 words
The device of claim 1, wherein the cavity protrudes between the wall face and a reference line perpendicular to the bond interface and passing through the terminus.
Claim 10
Dependent Claim
30 words
The device of claim 8, wherein the cavity also protrudes between the reference line and a wall face of the first layer proximate the bond interface and facing the cavity.
Claim 11
Dependent Claim
36 words
The device of claim 1, further comprising: third layer means bonded to the second layer means along a second bond interface such that the second layer means is sandwiched between the first and third layers means.
Claim 12
Dependent Claim
59 words
The device of claim 10, wherein the second bond interface has a second terminus, and wherein, in a vicinity of the second bond interface, at least one layer means of the second and the third layer means define a wall having a wall width in the vicinity of the second bond interface that increases toward the second bond interface.
Claim 13
Dependent Claim
50 words
The device of claim 11, wherein the at least one layer means has a wall face proximate the second bond interface and bordering the cavity, and wherein the cavity protrudes between the wall face and a reference line perpendicular to the second bond interface and passing through the second terminus.
Claim 14
Dependent Claim
27 words
The device of claim 1, wherein the second layer means comprises a material selected from the group consisting of silicon, gallium arsenide, sapphire, ceramic, glass, and quartz.
Claim 15
Dependent Claim
20 words
The device of claim 1, further including: a thin layer of material sandwiched between the first and second layer means.
Claim 16
Dependent Claim
21 words
The device of claim 1, further including a pressure-responsive device mechanically coupled at least in part to the second layer means.
Claim 17
Dependent Claim
20 words
The device of claim 15, further including measurement circuitry coupled to the pressure-responsive device to provide an indication of pressure.
Claim 18
Dependent Claim
90 words
A micromachined device having a cavity therein capable of being pressurized, the device comprising: a plurality of layer means bonded together along at least one bond interface therebetween; wherein, one of the plurality of layer means defines a pressure responsive diaphragm, and wherein for each bond interface that borders the cavity, at least one of the plurality of layer means is provided with means for reducing the stress magnitude at an edge of each such bond interface to permit the device to operate at an increased fluid pressure without fracturing.
Claim 19
Dependent Claim
90 words
A micromachined device having a cavity therein capable of being pressurized, the device comprising: a plurality of layer means bonded together along at least one bond interface therebetween; wherein, one of the plurality of layer means defines a pressure responsive diaphragm, and wherein for each bond interface that borders the cavity, at least one of the plurality of layer means is provided with means for reducing the stress magnitude at an edge of each such bond interface to permit the device to operate at an increased fluid pressure without fracturing.
Claim 20
Dependent Claim
17 words
The device of claim 17, wherein the device is at least a portion of a pressure transducer.
Claim 21
Dependent Claim
12 words
The device of claim 17, wherein the device comprises 2 layer means.
Claim 22
Dependent Claim
14 words
The device of claim 17, wherein the device comprises at least 3 layer means.
Claim 23
Dependent Claim
109 words
A micromachined device adapted to receive pressurized fluid, comprising: first layer means; and second layer means bonded to the first layer means along a bond interface, the bond interface having a terminus; wherein the device has a cavity to receive the pressurized fluid, wherein the second layer means has a wall face proximate the bond interface and bordering the cavity, wherein the cavity protrudes between the wall face and a reference line perpendicular to the bond interface and passing through the terminus, and wherein the cavity also protrudes between the reference line and a wall face of the first layer means proximate the bond interface and facing the cavity.
Claim 24
Dependent Claim
109 words
A micromachined device adapted to receive pressurized fluid, comprising: first layer means; and second layer means bonded to the first layer means along a bond interface, the bond interface having a terminus; wherein the device has a cavity to receive the pressurized fluid, wherein the second layer means has a wall face proximate the bond interface and bordering the cavity, wherein the cavity protrudes between the wall face and a reference line perpendicular to the bond interface and passing through the terminus, and wherein the cavity also protrudes between the reference line and a wall face of the first layer means proximate the bond interface and facing the cavity.
Claim 25
Dependent Claim
155 words
A micromachined device adapted to receive pressurized fluid, comprising: first layer means; second layer means bonded to the first layer means along a first bond interface, the first bond interface having a first terminus; and third layer means bonded to the second layer means along a second bond interface such that the second layer means is bonded between the first and third layer means; wherein in the vicinity of the first bond interface, at least one of the first and second layer means defines a wall having a wall width in the vicinity of the first bond interface that increases toward the first bond interface; wherein the second bond interface has a second terminus, wherein, in a vicinity of the second bond interface, at least one of the second and third layer means defines a wall having a wall width in the vicinity of the second bond interface that increases toward the second bond interface.
Claim 26
Dependent Claim
155 words
A micromachined device adapted to receive pressurized fluid, comprising: first layer means; second layer means bonded to the first layer means along a first bond interface, the first bond interface having a first terminus; and third layer means bonded to the second layer means along a second bond interface such that the second layer means is bonded between the first and third layer means; wherein in the vicinity of the first bond interface, at least one of the first and second layer means defines a wall having a wall width in the vicinity of the first bond interface that increases toward the first bond interface; wherein the second bond interface has a second terminus, wherein, in a vicinity of the second bond interface, at least one of the second and third layer means defines a wall having a wall width in the vicinity of the second bond interface that increases toward the second bond interface.
Claim 27
Dependent Claim
185 words
A micromachined device adapted to receive pressurized fluid, comprising: first layer means; second layer means bonded to the first layer means along a first bond interface, the first bond interface having a first terminus; and third layer means bonded to the second layer means along a second bond interface such that the second layer means is bonded between the first and third layers means; wherein the device has a cavity to receive the pressurized fluid, wherein at least one of the first and second layer means has a wall face proximate the first bond interface and bordering the cavity, and wherein the cavity protrudes between the wall face and a first reference line perpendicular to the first bond interface and passing through the first terminus; and wherein the second bond interface has a second terminus, wherein at least one of the second and third layer means has a wall face proximate the second bond interface and bordering the cavity, and wherein the cavity protrudes between the wall face and a second reference line perpendicular to the second bond interface and passing through the second terminus.
Claim 28
Dependent Claim
185 words
A micromachined device adapted to receive pressurized fluid, comprising: first layer means; second layer means bonded to the first layer means along a first bond interface, the first bond interface having a first terminus; and third layer means bonded to the second layer means along a second bond interface such that the second layer means is bonded between the first and third layers means; wherein the device has a cavity to receive the pressurized fluid, wherein at least one of the first and second layer means has a wall face proximate the first bond interface and bordering the cavity, and wherein the cavity protrudes between the wall face and a first reference line perpendicular to the first bond interface and passing through the first terminus; and wherein the second bond interface has a second terminus, wherein at least one of the second and third layer means has a wall face proximate the second bond interface and bordering the cavity, and wherein the cavity protrudes between the wall face and a second reference line perpendicular to the second bond interface and passing through the second terminus.
References Cited (Backward Citations)
US4600912A
Cited
US4800758A
Cited
US4773269A
Cited
US4823230A
Cited
US5062302A
Cited
JPH03282342A
Cited
GB2253739A
Cited
JPH0560635A
Cited
JPH05142074A
Cited
US5257547A
Cited
US5375473A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-05-28 | 1999-11-27 | 2000-05-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-05-28 | 2003-11-27 | 2004-05-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-05-28 | 2007-11-27 | 2008-05-28 | $7700.00 | Window Closed / Lapsed |