US5517280A
Expired / Lapsed
US
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Photolithography system
Assignee: Leland Stanford Junior University
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Filing: 1994-04-12
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Granted: 1996-05-14
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Expires: 2014-04-12
Abstract
Abstract A photolithography system includes a plurality of cantilevers, preferably formed in a silicon wafer. Each cantilever includes a tip located near the free end of the cantilever and a waveguide which extends along the length of the cantilever and intersects the tip. An aperture is formed at the apex of the tip so that light travelling through the waveguide may exit the tip. A light switch is included in the waveguide to control the passage of light to the tip of the cantilever. The array of cantilevers is positioned adjacent a wafer which is to be lithographed, in the manner of an atomic force microscope operating in the attractive mode. Each cantilever is a compound structure, including a thick portion and a thin portion, the latter having a preselected mechanical resonant frequency. The cantilevers are caused to vibrate at their resonant frequency and the actual frequency of vibration is detected and used to maintain a uniform spacing between the tip of the cantilever and the surface of a photoresist layer which is to be exposed. Preferably, both the vibrational motion and the control of the tip-photoresist spacing are effected by means of a capacitive plate located adjacent the cantilever. The cantilever array is scanned over a photoresist layer on the wafer, preferably in a raster pattern, and the individual light switches are operated so as to expose individual pixels on the photoresist layer.
Inventors
- 👤 Calvin F. Quate
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 17:36
CPC Classifications
G; G01; G01Q; G01Q70/00; G01Q70/06; B; B82; B82Y; B82Y35/00; G01Q20/00; G01Q20/02; G03; G03F; G03F7/00; G03F7/20; G03F7/2049; G03F7/70; G03F7/70216; G03F7/70358; G03F7/70375; B82Y10/00; G01Q80/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/855; Y10S977/859; Y10S977/86; Y10S977/868
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
118 words
A photolithography system comprising: (a) a plurality of cantilevers formed in a wafer, each of said cantilevers comprising: a tip located near a free end of said cantilever, said tip extending in a direction perpendicular to a longitudinal axis of said cantilever; a waveguide extending along said cantilever to an apex of said tip; an aperture in said waveguide at said apex of said tip so as to allow electromagnetic energy to escape from said waveguide at said apex of said tip; and a piezoresistor, the resistance of said piezoresistor varying as said cantilever bends; (b) a light switch positioned in each of said waveguides; and (c) a controller for opening and closing each of said light switches.
Claim 2
Dependent Claim
118 words
A photolithography system comprising: (a) a plurality of cantilevers formed in a wafer, each of said cantilevers comprising: a tip located near a free end of said cantilever, said tip extending in a direction perpendicular to a longitudinal axis of said cantilever; a waveguide extending along said cantilever to an apex of said tip; an aperture in said waveguide at said apex of said tip so as to allow electromagnetic energy to escape from said waveguide at said apex of said tip; and a piezoresistor, the resistance of said piezoresistor varying as said cantilever bends; (b) a light switch positioned in each of said waveguides; and (c) a controller for opening and closing each of said light switches.
Claim 3
Dependent Claim
39 words
The photolithography system of claim 1 further comprising a capacitive plate positioned adjacent each of said cantilevers, said capacitive plate being adapted to cause said cantilever to vibrate when said capacitive plate is energized by an oscillating voltage signal.
Claim 4
Dependent Claim
20 words
The photolithography system of claim 2 further comprising a source of a superimposed AC-DC voltage connected to said capacitive plate.
Claim 5
Dependent Claim
29 words
The photolithography system of claim 3 wherein a frequency of the AC portion of said superimposed AC-DC voltage is equal to one-half of a resonant frequency of said cantilever.
Claim 6
Dependent Claim
27 words
The photolithography system of claim 3 wherein a frequency of the AC portion of said superimposed AC-DC voltage is greater than a resonant frequency of said cantilever.
Claim 7
Dependent Claim
16 words
The photolithography system of claim 1 further comprising a means for vibrating each of said cantilevers.
Claim 8
Dependent Claim
19 words
The photolithography system of claim 1 wherein each of said cantilevers comprises a thick section and a thin section.
Claim 9
Dependent Claim
20 words
The photolithography system of claim 7 wherein said piezoresistor is located within said thin section of each of said cantilever.
Claim 10
Dependent Claim
17 words
The photolithography system of claim 1 further comprising a resistance detector connected to each of said piezoresistors.
Claim 11
Dependent Claim
14 words
The photolithography system of claim 9 wherein said resistance detector comprises a bridge circuit.
Claim 12
Dependent Claim
33 words
The photolithography system of claim 1 further comprising a detector positioned near an end of each of said cantilevers, said detector being actuated when said switch allows electromagnetic energy to reach said tip.
Claim 13
Dependent Claim
12 words
The photolithography system of claim 11 wherein said detector comprises a diode.
Claim 14
Dependent Claim
35 words
The photolithography system of claim 1 further comprising a large planar waveguide, said large planar waveguide comprising a plurality of lenses, each of said lenses being for directing light energy into one of said waveguides.
Claim 15
Dependent Claim
20 words
The photolithography system of claim 13 further comprising a collimating lens for directing light energy to each of said lenses.
Claim 16
Dependent Claim
17 words
The photolithography system of claim 1 further comprising a flat substrate positioned under each of said tips.
Claim 17
Dependent Claim
22 words
The photolithography system of claim 15 further comprising a scanner for scanning said cantilevers in a plane parallel to the flat substrate.
Claim 18
Dependent Claim
17 words
The photolithography system of claim 16 wherein said scanner comprises a stepping component and an oscillating component.
Claim 19
Dependent Claim
20 words
The photolithography system of claim 17 wherein said stepping component drives said wafer and said oscillating component drives said substrate.
Claim 20
Dependent Claim
16 words
The photolithography system of claim 15 wherein said substrate is coated with a layer of resist.
Claim 21
Dependent Claim
47 words
The photolithography system of claim 1 wherein said cantilever comprises a metal layer, said metal layer being connected to a source of an error signal, said error signal being applied to said metal layer, causing said metal layer to heat up and causing said cantilever to bend.
Claim 22
Dependent Claim
46 words
The photolithography system of claim 1 wherein said cantilever comprises a piezoelectric layer, said piezoelectric layer being connected to a source of an error signal, said error signal being applied to said piezoelectric material, causing said piezoelectric material to expand and causing said cantilever to bend.
Claim 23
Dependent Claim
17 words
The photolithography system of claim 1 further comprising a light source for emitting light into said waveguides.
Claim 24
Dependent Claim
14 words
The photolithography system of claim 22 wherein said light source comprises a laser diode.
Claim 25
Dependent Claim
27 words
The photolithography system of claim 22 wherein a diameter of said aperture is less than one-half of a wavelength of said light emitted by said light source.
Claim 26
Independent Claim
146 words
A method of exposing a layer of photoresist on the surface of a substrate, said method comprising the steps of: providing a cantilever, said cantilever having a tip positioned near a free end thereof, and a waveguide extending along said cantilever to an apex of said tip, said waveguide having an aperture located at said apex of said tip so as to allow electromagnetic energy to escape from said waveguide at said apex of said tip; positioning said cantilever over said substrate, with said apex of said tip being positioned near a surface of said layer of photoresist; scanning said cantilever over said substrate by causing a movement of said cantilever, said substrate, or both said cantilever and said substrate; and alternatively allowing electromagnetic energy to enter said waveguide and preventing said energy from entering said waveguide so as to expose selected areas of said photoresist.
Claim 27
Independent Claim
146 words
A method of exposing a layer of photoresist on the surface of a substrate, said method comprising the steps of: providing a cantilever, said cantilever having a tip positioned near a free end thereof, and a waveguide extending along said cantilever to an apex of said tip, said waveguide having an aperture located at said apex of said tip so as to allow electromagnetic energy to escape from said waveguide at said apex of said tip; positioning said cantilever over said substrate, with said apex of said tip being positioned near a surface of said layer of photoresist; scanning said cantilever over said substrate by causing a movement of said cantilever, said substrate, or both said cantilever and said substrate; and alternatively allowing electromagnetic energy to enter said waveguide and preventing said energy from entering said waveguide so as to expose selected areas of said photoresist.
Claim 28
Dependent Claim
46 words
The method of claim 25 further comprising the steps of: causing said cantilever to vibrate; detecting the resonant frequency of vibration of said cantilever; and using the detected resonant frequency to adjust a separation between said apex of said tip and said surface of said photoresist.
Claim 29
Dependent Claim
16 words
The method of claim 26 comprising using a capacitive plate to cause said cantilever to vibrate.
Claim 30
Dependent Claim
45 words
The method of claim 25 further comprising the steps of: causing said cantilever to vibrate; detecting the amplitude of the vibrations of said cantilever; and using the detected amplitude to adjust a separation between said apex of said tip and said surface of said photoresist.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-05-14 | 1999-11-13 | 2000-05-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-05-14 | 2003-11-13 | 2004-05-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-05-14 | 2007-11-13 | 2008-05-14 | $7700.00 | Window Closed / Lapsed |