Actuated mirror array and method for the fabricating thereof

Claim 1

A method for fabricating and mounting an array of M×N mirrors on an array of M×N actuators to thereby form an array of M×N actuated mirrors for use in an optical projection system, wherein M and N are integers; each of the M×N actuators being made of an electrodisplacive material which deforms in response to an electrical signal applied thereto; each of the M×N mirrors having an identical size and reflecting a ray of light incident thereon in accordance with a deformation of each of the M×N actuators coupled thereto to thereby modulate an optical path of the reflected light, and including a reflector having a flat surface for reflecting the ray of light incident thereon; and top of each of the M×N mirrors is substantially larger than that of each of the M×N actuators, said method comprising the steps of: (a) forming a separation layer on a substrate; (b) providing a supporting layer on the separation layer; (c) bonding the array of M×N actuators on the supporting layer; (d) removing the separation layer so as to disengage the substrate by dissolving it with a solvent; (e) patterning the supporting layer into an array of M×N identically sized, disjointed supporting members; and (f) forming a light reflecting metallic layer on top of each of the M×N supporting members.

Claim 2

A method for fabricating and mounting an array of M×N mirrors on an array of M×N actuators to thereby form an array of M×N actuated mirrors for use in an optical projection system, wherein M and N are integers; each of the M×N actuators being made of an electrodisplacive material which deforms in response to an electrical signal applied thereto; each of the M×N mirrors having an identical size and reflecting a ray of light incident thereon in accordance with a deformation of each of the M×N actuators coupled thereto to thereby modulate an optical path of the reflected light, and including a reflector having a flat surface for reflecting the ray of light incident thereon; and top of each of the M×N mirrors is substantially larger than that of each of the M×N actuators, said method comprising the steps of: (a) forming a separation layer on a substrate; (b) providing a supporting layer on the separation layer; (c) bonding the array of M×N actuators on the supporting layer; (d) removing the separation layer so as to disengage the substrate by dissolving it with a solvent; (e) patterning the supporting layer into an array of M×N identically sized, disjointed supporting members; and (f) forming a light reflecting metallic layer on top of each of the M×N supporting members.

Claim 5

A method for fabricating and mounting an array of M×N mirrors on an array of M×N actuators to thereby form an array of M×N actuated mirrors for use in an optical projection system, wherein M and N are integers; each of the M×N actuators being made of an electrodisplacive material which deforms in response to an electrical signal applied thereto; each of the M×N mirrors having an identical size reflecting a ray of light incident thereon in accordance with a deformation of each of the M×N actuators coupled thereto to thereby modulate an optical path of the reflected light, and including a reflector having a flat surface for reflecting the ray of light incident thereon; and top of each of the M×N mirrors is substantially larger than that of each of the M×N actuators, said method comprising the steps of: (a) forming a separation layer on a substrate; (b) providing a reflection layer on top of the separation layer; (c) creating an array of M×N reflectors on the separation layer from the reflection layer formed thereon; (d) providing a supporting layer made of a nonconducting material on the substrate treated in accordance with said steps (a) and (c); (e) patterning the supporting layer into M×N disjointed supporting members, each of the M×N supporting members being commensurate with each of the M×N reflectors so as to define an array of M×N mirrors on the separation layer; (f) bonding the array of M×N actuators on the substrate treated in accordance with said steps (a) to (e) such that each of the M×N actuators is aligned with each of the M×N mirrors; and (g) removing the separation layer so as to disengage the substrate from the array of M×N mirrors by dissolving it with a solvent to thereby provide the array of M×N actuated mirrors.

Claim 6

A method for fabricating and mounting an array of M×N mirrors on an array of M×N actuators to thereby form an array of M×N actuated mirrors for use in an optical projection system, wherein M and N are integers; each of the M×N actuators being made of an electrodisplacive material which deforms in response to an electrical signal applied thereto; each of the M×N mirrors having an identical size reflecting a ray of light incident thereon in accordance with a deformation of each of the M×N actuators coupled thereto to thereby modulate an optical path of the reflected light, and including a reflector having a flat surface for reflecting the ray of light incident thereon; and top of each of the M×N mirrors is substantially larger than that of each of the M×N actuators, said method comprising the steps of: (a) forming a separation layer on a substrate; (b) providing a reflection layer on top of the separation layer; (c) creating an array of M×N reflectors on the separation layer from the reflection layer formed thereon; (d) providing a supporting layer made of a nonconducting material on the substrate treated in accordance with said steps (a) and (c); (e) patterning the supporting layer into M×N disjointed supporting members, each of the M×N supporting members being commensurate with each of the M×N reflectors so as to define an array of M×N mirrors on the separation layer; (f) bonding the array of M×N actuators on the substrate treated in accordance with said steps (a) to (e) such that each of the M×N actuators is aligned with each of the M×N mirrors; and (g) removing the separation layer so as to disengage the substrate from the array of M×N mirrors by dissolving it with a solvent to thereby provide the array of M×N actuated mirrors.