US5505778A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Surface treating apparatus, surface treating method and semiconductor device manufacturing method
Assignee: Hitachi Ltd
•
Filing: 1991-07-15
•
Granted: 1996-04-09
•
Expires: 2011-07-15
Abstract
Abstract An apparatus for treating solid surface using a thermally excited molecular beam according to the present invention is capable of completely preventing flying of contaminant caused by a heating source to a sample. To achieve this, in the present invention, the heating source for exciting the molecules is hermetically separated from the sample. Alternatively, a container where the heating source is housed and a container where the sample is accommodated are separated such that a conductance between the two containers is sufficiently small. In this way, chemical reactions between the molecular beam of the reactive gas which is highly reactive and the heating source heated to high temperatures can be eliminated, and flying of the contaminant to the sample can thus be greatly reduced. As a result, flying of the contaminating substances caused by the heating source to the sample can be prevented, and reduction in the surface treating rate of the sample, caused by the contaminant, can be prevented.
Inventors
- 👤 Tetsuo Ono
- 👤 Susumu Hiraoka
- 👤 Sakae Saito
- 👤 Kunio Harada
- 👤 Mituhiro Tachibana
- 👤 Shigeo Kubota
- 👤 Keizo Suzuki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:10
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/452; C23C16/455; C23C16/45563; C23C16/4557; H; H10; H10P; H10P14/00; H10P14/40; H10P14/42; H10P14/43; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; Y; Y10; Y10S; Y10S438/00; Y10S438/974
Claims Analysis
Total Claims: 91
Claim 1
Independent Claim
111 words
A surface treating apparatus comprising: a first means for supplying a reactive gas used for surface treating a sample to the sample; a second means for heating said first means; a third means for accommodating said second means in a first inner space; a fourth means for surface treating the sample in a second inner space; and a fifth means for supplying an inactive gas into said first inner space, wherein said first inner space is located within said second inner space, and said first inner space and a portion of said second inner space in which the sample is surface treated are hermetically separated from each other by partitioning means.
Claim 2
Dependent Claim
111 words
A surface treating apparatus comprising: a first means for supplying a reactive gas used for surface treating a sample to the sample; a second means for heating said first means; a third means for accommodating said second means in a first inner space; a fourth means for surface treating the sample in a second inner space; and a fifth means for supplying an inactive gas into said first inner space, wherein said first inner space is located within said second inner space, and said first inner space and a portion of said second inner space in which the sample is surface treated are hermetically separated from each other by partitioning means.
Claim 3
Dependent Claim
16 words
A surface treating apparatus according to claim 1, wherein said partitioning means includes a partitioning plate.
Claim 4
Dependent Claim
18 words
The surface treating apparatus according to claim 1, wherein said first means comprises a reactive gas supply tube.
Claim 5
Dependent Claim
18 words
The surface treating apparatus according to claim 1, wherein said fifth means comprises an inactive gas supply tube.
Claim 6
Dependent Claim
105 words
A surface treating apparatus comprising: a first means for supplying a reactive gas used for surface treating to the sample; a second means for heating said first means; a third means for accommodating said second means in a first inner space; a fourth means for surface treating the sample in a second inner space; and a fifth means for evacuating said first inner space, wherein said first inner space is located within said second inner space, and said first inner space and a portion of said second inner space in which the sample is surface treated are hermetically separated from each other by partitioning means.
Claim 7
Dependent Claim
105 words
A surface treating apparatus comprising: a first means for supplying a reactive gas used for surface treating to the sample; a second means for heating said first means; a third means for accommodating said second means in a first inner space; a fourth means for surface treating the sample in a second inner space; and a fifth means for evacuating said first inner space, wherein said first inner space is located within said second inner space, and said first inner space and a portion of said second inner space in which the sample is surface treated are hermetically separated from each other by partitioning means.
Claim 8
Dependent Claim
16 words
A surface treating apparatus according to claim 5, wherein said partitioning means includes a partitioning plate.
Claim 9
Dependent Claim
18 words
The surface treating apparatus according to claim 5, wherein said first means comprises a reactive gas supply tube.
Claim 10
Dependent Claim
16 words
The surface treating apparatus according to claim 5, wherein said fifth means comprises an exhaust tube.
Claim 11
Dependent Claim
94 words
A surface treating method comprising the steps of: (a) preparing a first means for supplying a reactive gas used for surface treating to the sample; (b) preparing a second means for heating said first means in a first inner space; (c) supplying an inactive gas into said first inner space; and (d) surface treating the sample in a second inner space, wherein said first inner space is located within said second inner space, and is hermetically separated from a portion said second inner space in which the sample is surface treated by partitioning means.
Claim 12
Dependent Claim
94 words
A surface treating method comprising the steps of: (a) preparing a first means for supplying a reactive gas used for surface treating to the sample; (b) preparing a second means for heating said first means in a first inner space; (c) supplying an inactive gas into said first inner space; and (d) surface treating the sample in a second inner space, wherein said first inner space is located within said second inner space, and is hermetically separated from a portion said second inner space in which the sample is surface treated by partitioning means.
Claim 13
Dependent Claim
16 words
A surface treating method according to claim 9, wherein said partitioning means includes a partitioning plate.
Claim 14
Dependent Claim
91 words
A surface treating method comprising the steps of: (a) preparing a first means for supplying a reactive gas used for surface treating to the sample; (b) preparing a second means for heating said first means in a first inner space; (c) evacuating said first inner space; and (d) surface treating the sample in a second inner space, wherein said first inner space is located within said second inner space, and is hermetically separated from a portion of said second inner space in which the sample is surface treated by partitioning means.
Claim 15
Dependent Claim
91 words
A surface treating method comprising the steps of: (a) preparing a first means for supplying a reactive gas used for surface treating to the sample; (b) preparing a second means for heating said first means in a first inner space; (c) evacuating said first inner space; and (d) surface treating the sample in a second inner space, wherein said first inner space is located within said second inner space, and is hermetically separated from a portion of said second inner space in which the sample is surface treated by partitioning means.
Claim 16
Dependent Claim
16 words
A surface treating method according to claim 11, wherein said partitioning means includes a partitioning plate.
Claim 17
Dependent Claim
119 words
A surface treating apparatus comprising: a first means for supplying a reactive gas used to surface treat to the sample; a second means for heating said first means; a first space where said second means is accommodated; a second space where surface treating of the sample takes place; a third means for partially communicating said first space with said second space and for separating said first space from said second space at the other portions by a partitioning plate, wherein said first space is located within said second space; a fourth means for preventing the sample in the second space from directly facing said second means; and a fifth means for supplying an inactive gas into said first space.
Claim 18
Dependent Claim
119 words
A surface treating apparatus comprising: a first means for supplying a reactive gas used to surface treat to the sample; a second means for heating said first means; a first space where said second means is accommodated; a second space where surface treating of the sample takes place; a third means for partially communicating said first space with said second space and for separating said first space from said second space at the other portions by a partitioning plate, wherein said first space is located within said second space; a fourth means for preventing the sample in the second space from directly facing said second means; and a fifth means for supplying an inactive gas into said first space.
Claim 19
Dependent Claim
30 words
A surface treating apparatus according to claim 13, wherein a gas conductance per beam source between said second means and said sample is 1×10 -4 m 3 /s or less.
Claim 20
Dependent Claim
18 words
The surface treating apparatus according to claim 13, wherein said first means comprises a reactive gas supply tube.
Claim 21
Dependent Claim
18 words
The surface treating apparatus according to claim 13, wherein said fifth means comprises an inactive gas supply tube.
Claim 22
Dependent Claim
41 words
The surface treating apparatus according to claim 13, wherein said first means extends close to the communicating portion of said third means, and wherein said second means is disposed in the vicinity of an outer peripheral portion of said first means.
Claim 23
Dependent Claim
115 words
A surface treating apparatus comprising: a first means for supplying a reactive gas used to surface treat to the sample; a second means for heating said first means; a first space where said second means, is accommodated; a second space where surface treating of the sample takes place; a third means for partially communicating said first space with said second space and for separating said first space from said second space at the other portions by a partitioning plate, wherein said first space is located within said second space; a fourth means for preventing the sample in the second space from directly facing said second means; and a fifth means for evacuating said first space.
Claim 24
Dependent Claim
115 words
A surface treating apparatus comprising: a first means for supplying a reactive gas used to surface treat to the sample; a second means for heating said first means; a first space where said second means, is accommodated; a second space where surface treating of the sample takes place; a third means for partially communicating said first space with said second space and for separating said first space from said second space at the other portions by a partitioning plate, wherein said first space is located within said second space; a fourth means for preventing the sample in the second space from directly facing said second means; and a fifth means for evacuating said first space.
Claim 25
Dependent Claim
30 words
A surface treating apparatus according to claim 18, wherein a gas conductance per beam source between said second means and said sample is 1×10 -4 m 3 /s or less.
Claim 26
Dependent Claim
18 words
The surface treating apparatus according to claim 18, wherein said first means comprises a reactive gas supply tube.
Claim 27
Dependent Claim
16 words
The surface treating apparatus according to claim 18, wherein said fifth means comprises an exhaust tube.
Claim 28
Dependent Claim
41 words
The surface treating apparatus according to claim 18, wherein said first means extends close to the communicating portion of said third means, and wherein said second means is disposed in the vicinity of an outer peripheral portion of said first means.
Claim 29
Dependent Claim
134 words
A surface treating method comprising the steps of: (a) preparing a first means for supplying a reactive gas used for surface treating to the sample; (b) preparing a second means for heating said first means in a first inner space; (c) preparing a third means for partially communication said first inner space with a second space wherein surface processing of the sample takes place and for separating said first inner space from said second inner space at the other portions by a partitioning plate, wherein said first inner space is located within said second space; (d) preparing a fourth means for preventing the sample in the second space from directly facing said second means; (e) supplying an inactive gas into said first inner space; and (f) surface treating the sample in said second space.
Claim 30
Dependent Claim
134 words
A surface treating method comprising the steps of: (a) preparing a first means for supplying a reactive gas used for surface treating to the sample; (b) preparing a second means for heating said first means in a first inner space; (c) preparing a third means for partially communication said first inner space with a second space wherein surface processing of the sample takes place and for separating said first inner space from said second inner space at the other portions by a partitioning plate, wherein said first inner space is located within said second space; (d) preparing a fourth means for preventing the sample in the second space from directly facing said second means; (e) supplying an inactive gas into said first inner space; and (f) surface treating the sample in said second space.
Claim 31
Dependent Claim
34 words
A surface treating method according to claim 23, wherein said fourth means provides a gas conductance per beam source between said second means and said sample of 1×10 -4 m 3 /s or less.
Claim 32
Dependent Claim
128 words
A surface treating method comprising the steps of: (a) preparing a first means for supplying a reactive gas used for surface treating to the sample; (b) preparing a second means for heating said first means in a first inner space; (c) preparing a third means for partially communicating said first inner space with a second space where surface treating of the sample takes place and for separating said first space from said second space at the other portions by a partitioning plate, wherein said first inner space is located within said second space; (d) preparing a fourth means for preventing the sample in the second space from directly facing said second means; (e) evacuating said first inner space; and (f) surface treating the sample in said second space.
Claim 33
Dependent Claim
128 words
A surface treating method comprising the steps of: (a) preparing a first means for supplying a reactive gas used for surface treating to the sample; (b) preparing a second means for heating said first means in a first inner space; (c) preparing a third means for partially communicating said first inner space with a second space where surface treating of the sample takes place and for separating said first space from said second space at the other portions by a partitioning plate, wherein said first inner space is located within said second space; (d) preparing a fourth means for preventing the sample in the second space from directly facing said second means; (e) evacuating said first inner space; and (f) surface treating the sample in said second space.
Claim 34
Dependent Claim
34 words
A surface treating means according to claim 25, wherein said fourth means provides a gas conductance per beam source between said second means and said sample of 1×10 -4 m 3 /s or less.
Claim 35
Dependent Claim
63 words
A surface treating apparatus comprising: a first means for supplying a reactive gas used in surface treating to the sample; a second means for heating said first means; a third means for accommodating said first and second means in an inner space; and a fourth means for hermetically sealing said second means from a remainder of said inner space by a partitioning means.
Claim 36
Dependent Claim
63 words
A surface treating apparatus comprising: a first means for supplying a reactive gas used in surface treating to the sample; a second means for heating said first means; a third means for accommodating said first and second means in an inner space; and a fourth means for hermetically sealing said second means from a remainder of said inner space by a partitioning means.
Claim 37
Dependent Claim
21 words
A surface treating apparatus according to claim 27, wherein said partitioning means includes a container for hermetically containing said second means.
Claim 38
Dependent Claim
18 words
The surface treating apparatus according to claim 27, wherein said first means comprises a reactive gas supply tube.
Claim 39
Dependent Claim
77 words
A surface treating method comprising the steps of: (a) preparing a first means for supplying a reactive gas used for surface treating to the sample; (b) preparing a second means for heating said first means; (c) preparing a third means for accommodating said first and second means in an inner space; (d) hermetically sealing said second means from a remainder of said inner space; by partitioning means; and (e) surface treating the sample in said inner space.
Claim 40
Dependent Claim
77 words
A surface treating method comprising the steps of: (a) preparing a first means for supplying a reactive gas used for surface treating to the sample; (b) preparing a second means for heating said first means; (c) preparing a third means for accommodating said first and second means in an inner space; (d) hermetically sealing said second means from a remainder of said inner space; by partitioning means; and (e) surface treating the sample in said inner space.
Claim 41
Dependent Claim
21 words
A surface treating method according to claim 30, wherein said partitioning means includes a container for hermetically containing said second means.
Claim 42
Dependent Claim
122 words
A surface treating apparatus comprising: a first means having a first inner space where a sample is to be accommodated; a second means for supplying a reactive gas used for surface treating the sample into said first inner space; a third means for heating the reactive gas supplied into said first inner space; a fourth means for accommodating said third means in a second inner space; and a fifth means for supplying an inactive gas into said second inner space, wherein said second inner space is located within said first inner space, and a portion of said first inner space in which the sample is to be accommodated and said second inner space are hermetically separated from each other by partitioning means.
Claim 43
Dependent Claim
122 words
A surface treating apparatus comprising: a first means having a first inner space where a sample is to be accommodated; a second means for supplying a reactive gas used for surface treating the sample into said first inner space; a third means for heating the reactive gas supplied into said first inner space; a fourth means for accommodating said third means in a second inner space; and a fifth means for supplying an inactive gas into said second inner space, wherein said second inner space is located within said first inner space, and a portion of said first inner space in which the sample is to be accommodated and said second inner space are hermetically separated from each other by partitioning means.
Claim 44
Dependent Claim
16 words
A surface treating apparatus according to claim 32, wherein said partitioning means comprises a heating plate.
Claim 45
Dependent Claim
16 words
The surface treating apparatus according to claim 32, wherein said third means comprises a heating plate.
Claim 46
Dependent Claim
18 words
The surface treating apparatus according to claim 32, wherein a collimator is accommodated in said first inner space.
Claim 47
Dependent Claim
18 words
The surface treating apparatus according to claim 32, wherein said second means comprises a reactive gas supply tube.
Claim 48
Dependent Claim
18 words
The surface treating apparatus according to claim 32, wherein said fifth means comprises an inactive gas supply tube.
Claim 49
Dependent Claim
139 words
A surface treating apparatus comprising: a first means having a first inner space where a sample is to be accommodated; a second means for heating an reactive gas used for surface treating the sample; a third means for accommodating said second means in a second inner space; a fourth means for supplying an inactive gas into said second inner space; a third inner space formed by partitioning means, the partitioning means comprising a heating plate treated by said third means and a collimator, said third inner space communicating with said first inner space through said collimator, said second and third inner spaces being located within said first inner space, and third inner space being hermetically separated from said second inner space by said heating plate; and a fifth means for supplying the reactive gas into said third inner space.
Claim 50
Dependent Claim
139 words
A surface treating apparatus comprising: a first means having a first inner space where a sample is to be accommodated; a second means for heating an reactive gas used for surface treating the sample; a third means for accommodating said second means in a second inner space; a fourth means for supplying an inactive gas into said second inner space; a third inner space formed by partitioning means, the partitioning means comprising a heating plate treated by said third means and a collimator, said third inner space communicating with said first inner space through said collimator, said second and third inner spaces being located within said first inner space, and third inner space being hermetically separated from said second inner space by said heating plate; and a fifth means for supplying the reactive gas into said third inner space.
Claim 51
Dependent Claim
54 words
A surface treatment apparatus according to claim 38, wherein said partitioning means further comprises an enclosure for sealing said third inner space from said first inner space such that said third inner space communicates with a portion of said first inner space in which the sample is to be accommodated only through said collimator.
Claim 52
Dependent Claim
18 words
The surface treating apparatus according to claim 38, wherein said fourth means comprises an inactive gas supply tube.
Claim 53
Dependent Claim
18 words
The surface treating apparatus according to claim 38, wherein said fifth means comprises a reactive gas supply tube.
Claim 54
Dependent Claim
118 words
A surface treating apparatus comprising: a first means having a first inner space where a sample is to be accommodated; a second means for supplying a reactive gas used for surface treating the sample into said first inner space; a third means for heating the reactive gas supplied into said first inner space; a fourth means for accommodating said third means in a second inner space; and a fifth means for evacuating said second inner space, wherein said second inner space is located within said first inner space, and a portion of said first inner space in which the sample is to be accommodated and said second inner space are hermetically separated from each other by partitioning means.
Claim 55
Dependent Claim
118 words
A surface treating apparatus comprising: a first means having a first inner space where a sample is to be accommodated; a second means for supplying a reactive gas used for surface treating the sample into said first inner space; a third means for heating the reactive gas supplied into said first inner space; a fourth means for accommodating said third means in a second inner space; and a fifth means for evacuating said second inner space, wherein said second inner space is located within said first inner space, and a portion of said first inner space in which the sample is to be accommodated and said second inner space are hermetically separated from each other by partitioning means.
Claim 56
Dependent Claim
16 words
A surface treating apparatus according to claim 42, wherein said partitioning means includes a heating plate.
Claim 57
Dependent Claim
16 words
The surface treating apparatus according to claim 42, wherein said third means comprises a heating plate.
Claim 58
Dependent Claim
18 words
The surface treating apparatus according to claim 42, wherein a collimator is accommodated in said first inner space.
Claim 59
Dependent Claim
18 words
The surface treating apparatus according to claim 42, wherein said second means comprises a reactive gas supply tube.
Claim 60
Dependent Claim
16 words
The surface treating apparatus according to claim 42, wherein said fifth means comprises an exhaust tube.
Claim 61
Dependent Claim
135 words
A surface treating apparatus comprising: a first means having a first inner space where a sample is to be accommodated; a second means for heating an reactive gas used for surface treating the sample; a third means for accommodating said second means in a second inner space; a fourth means for evacuating said second inner space; a third inner space formed by partitioning means, the positioning means comprising a heating plate treated by said third means and a collimator, said third inner space communicating with said first inner space through said collimator, said second and third inner spaces being located within said first inner space, and third inner space being hermetically separated from said second inner space by said heating plate; and a fifth means for supplying the reactive gas into said third inner space.
Claim 62
Dependent Claim
135 words
A surface treating apparatus comprising: a first means having a first inner space where a sample is to be accommodated; a second means for heating an reactive gas used for surface treating the sample; a third means for accommodating said second means in a second inner space; a fourth means for evacuating said second inner space; a third inner space formed by partitioning means, the positioning means comprising a heating plate treated by said third means and a collimator, said third inner space communicating with said first inner space through said collimator, said second and third inner spaces being located within said first inner space, and third inner space being hermetically separated from said second inner space by said heating plate; and a fifth means for supplying the reactive gas into said third inner space.
Claim 63
Dependent Claim
54 words
A surface treatment apparatus according to claim 48, wherein said partitioning means further comprises an enclosure for sealing said third inner space from said first inner space such that said third inner space communicates with a portion of said first inner space in which the sample is to be accommodated only through said collimator.
Claim 64
Dependent Claim
16 words
The surface treating apparatus according to claim 48, wherein said fourth means comprises an exhaust tube.
Claim 65
Dependent Claim
18 words
The surface treating apparatus according to claim 48, wherein said fifth means comprises a reactive gas supply tube.
Claim 66
Dependent Claim
109 words
A surface treating apparatus comprising: a first means for supplying a reactive gas used for surface treating to the sample; a second means for heating said first means; a third means for accommodating said second means in a first inner space; a fourth means for surface treating the sample in a second inner space; and a fifth means for supplying an inactive gas into said first inner space, wherein said second inner space is located within said first inner space, and a portion of said first inner space in which said second means are accommodated and said second inner space are hermetically separated from each other by partitioning means.
Claim 67
Dependent Claim
109 words
A surface treating apparatus comprising: a first means for supplying a reactive gas used for surface treating to the sample; a second means for heating said first means; a third means for accommodating said second means in a first inner space; a fourth means for surface treating the sample in a second inner space; and a fifth means for supplying an inactive gas into said first inner space, wherein said second inner space is located within said first inner space, and a portion of said first inner space in which said second means are accommodated and said second inner space are hermetically separated from each other by partitioning means.
Claim 68
Dependent Claim
27 words
A surface treating apparatus according to claim 52, wherein said partitioning means includes an inner container provided within said first inner space for defining said inner space.
Claim 69
Dependent Claim
18 words
The surface treating apparatus according to claim 52, wherein a collimator is accommodated in said second inner space.
Claim 70
Dependent Claim
18 words
The surface treating apparatus according to claim 52, wherein said first means comprises a reactive gas supply tube.
Claim 71
Dependent Claim
18 words
The surface treating apparatus according to claim 52, wherein said fifth means comprises an inactive gas supply tube.
Claim 72
Dependent Claim
105 words
A surface treating apparatus comprising: a first means for supplying a reactive gas used for surface processing to the sample; a second means for heating said first means; a third means for accommodating said second means in a first inner space; a fourth means for surface treating the sample in a second inner space; and a fifth means for evacuating said first inner space, wherein said second inner space is located within said first inner space, and a portion of said first inner space in which said second means are accommodated and said second inner space are hermetically separated from each other by partitioning means.
Claim 73
Dependent Claim
105 words
A surface treating apparatus comprising: a first means for supplying a reactive gas used for surface processing to the sample; a second means for heating said first means; a third means for accommodating said second means in a first inner space; a fourth means for surface treating the sample in a second inner space; and a fifth means for evacuating said first inner space, wherein said second inner space is located within said first inner space, and a portion of said first inner space in which said second means are accommodated and said second inner space are hermetically separated from each other by partitioning means.
Claim 74
Dependent Claim
28 words
A surface treating apparatus according to claim 57, wherein said partitioning means includes an inner container provided within said first inner space for defining said second inner space.
Claim 75
Dependent Claim
18 words
The surface treating apparatus according to claim 57, wherein a collimator is accommodated in said second inner space.
Claim 76
Dependent Claim
18 words
The surface treating apparatus according to claim 57, wherein said first means comprises a reactive gas supply tube.
Claim 77
Dependent Claim
16 words
The surface treating apparatus according to claim 57, wherein said fifth means comprises an exhaust tube.
Claim 78
Dependent Claim
85 words
A surface treating apparatus, comprising: a reaction chamber having a sample base provided therein; an evacuating device for evacuating said reaction chamber; at least one nozzle for introducing a reactive gas into said reactive chamber for treating a surface of a sample disposed on said sample base; at least one heating wire for heating said reactive gas, said heating wire being provided within said reaction chamber; and partitioning means for hermetically separating said at least one heating wire and said sample base from each other.
Claim 79
Dependent Claim
85 words
A surface treating apparatus, comprising: a reaction chamber having a sample base provided therein; an evacuating device for evacuating said reaction chamber; at least one nozzle for introducing a reactive gas into said reactive chamber for treating a surface of a sample disposed on said sample base; at least one heating wire for heating said reactive gas, said heating wire being provided within said reaction chamber; and partitioning means for hermetically separating said at least one heating wire and said sample base from each other.
Claim 80
Dependent Claim
23 words
A surface treating apparatus according to claim 62, wherein said partitioning means comprises an inner container within which said sample base is provided.
Claim 81
Dependent Claim
37 words
A surface treating apparatus according to claim 62, wherein said at least one heating wire is wound around said at least one nozzle at a portion adjacent a distal end of said nozzle in said reaction chamber.
Claim 82
Dependent Claim
69 words
A surface treating apparatus according to claim 64, wherein said at least one heating wire and said portion of said at least one nozzle around which said at least one heating wire is wound are provided within an inner space within said reaction chamber hermetically separated from a remainder of said reaction chamber, said sample base being provided in said remainder of said reaction chamber by said partitioning means.
Claim 83
Dependent Claim
21 words
A surface treating apparatus according to claim 65, further comprising a passage for providing an inactive gas into said inner space.
Claim 84
Dependent Claim
26 words
A surface treating apparatus according to claim 65, further comprising an evacuating device for evacuating said inner space separately from said remainder of said reaction chamber.
Claim 85
Dependent Claim
16 words
A surface treating apparatus according to claim 65, wherein said partitioning means comprises a partitioning plate.
Claim 86
Dependent Claim
54 words
A surface treating apparatus according to claim 62, wherein said partitioning means comprises at least one container, and said at least one heating wire is provided hermetically sealed in said at least one container, each of said at least one nozzle passing through a central portion of each of said at least one container.
Claim 87
Dependent Claim
68 words
A surface treating apparatus according to claim 62, wherein said partitioning means comprises a heating plate, and said at least one heating wire is provided within an inner space hermetically separated from said sample base by said heating plate and wherein said apparatus further comprises a collimator for orienting reactive gas thermally excited by said heating plate and for directing thermally excited reactive gas towards said sample base.
Claim 88
Dependent Claim
21 words
A surface treating apparatus according to claim 70, further comprising a passage for providing an inactive gas into said inner space.
Claim 89
Dependent Claim
25 words
A surface treating apparatus according to claim 65, further comprising an evacuating device for evacuating said inner space separately from remainder of said reaction chamber.
Claim 90
Dependent Claim
112 words
A surface treating apparatus, comprising: a reaction chamber having a sample base provided therein; an evacuating device for evacuating said reaction chamber; at least one nozzle for introducing a reactive gas into said reactive chamber for treating a surface of a sample disposed on said sample base; at least one heating wire for heating said reactive gas, said heater being provided within said reaction chamber; and means for separating said sample base from said at least one heating wire by a partitioning plate such that said sample base does not directly face said at least one heating wire and gas conductance therebetween per nozzle is 1×10 -4 m 3 /s or less.
Claim 91
Dependent Claim
112 words
A surface treating apparatus, comprising: a reaction chamber having a sample base provided therein; an evacuating device for evacuating said reaction chamber; at least one nozzle for introducing a reactive gas into said reactive chamber for treating a surface of a sample disposed on said sample base; at least one heating wire for heating said reactive gas, said heater being provided within said reaction chamber; and means for separating said sample base from said at least one heating wire by a partitioning plate such that said sample base does not directly face said at least one heating wire and gas conductance therebetween per nozzle is 1×10 -4 m 3 /s or less.
References Cited (Backward Citations)
US4668480A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-04-09 | 1999-10-09 | 2000-04-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-04-09 | 2003-10-09 | 2004-04-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-04-09 | 2007-10-09 | 2008-04-09 | $7700.00 | Window Closed / Lapsed |