US5500559A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor device and method for manufacturing the same
Assignee: Ebara Corp
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Filing: 1994-05-25
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Granted: 1996-03-19
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Expires: 2014-05-25
Abstract
Abstract In a semiconductor device and a method for manufacturing the same according to the present invention, for example, an insulating film is deposited on a silicon substrate, and a concave groove is formed in the insulating film in accordance with a predetermined wiring pattern. Titanium and palladium are deposited in sequence on the insulating film to form a titanium film and a palladium film, respectively. A silver film is formed on the palladium film by electroplating, and a groove-shaped silver wiring layer is formed by polishing. The resultant structure is annealed at a temperature of about 700° C., and an intermetallic compound is formed by alloying the titanium film and palladium film with each other. Consequently, a burying type wiring layer whose resistance is lower than that of aluminum, is constituted by the silver wiring layer and intermetallic compound.
Inventors
- 👤 Masahiro Miyata
- 👤 Hirokazu Ezawa
- 👤 Naoaki Ogure
- 👤 Manabu Tsujimura
- 👤 Takeyuki Ohdaira
- 👤 Hiroaki Inoue
- 👤 Yukio Ikeda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 23:34
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032; H10W20/042; H10W20/043; H10W20/033; H10W20/047; H10W20/049; H10W20/056; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W20/4432; H10W20/4435
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
80 words
A semiconductor device comprising: a substrate; an insulating film on the substrate, the insulating film having a wiring groove portion; and a wiring layer embedded in the wiring groove portion, and including an intermetallic compound layer comprising a first metal and a second metal and a metal layer comprising a third metal on the intermetallic compound layer, wherein said third metal layer comprises silver wherein the third metal is capable of forming a continuous solid solution with the second metal.
Claim 2
Dependent Claim
80 words
A semiconductor device comprising: a substrate; an insulating film on the substrate, the insulating film having a wiring groove portion; and a wiring layer embedded in the wiring groove portion, and including an intermetallic compound layer comprising a first metal and a second metal and a metal layer comprising a third metal on the intermetallic compound layer, wherein said third metal layer comprises silver wherein the third metal is capable of forming a continuous solid solution with the second metal.
Claim 3
Dependent Claim
32 words
The semiconductor device according to claim 1, wherein an amount of the first metal of the intermetallic compound layer is equal to or larger than an amount of the second metal thereof.
Claim 4
Dependent Claim
67 words
A semiconductor device comprising: a substrate; an insulating film formed on the substrate, the insulating film having a wiring groove portion; and a wiring layer embedded in the wiring groove portion, and including an intermetallic compound layer comprising of titanium and palladium and a metal layer comprising silver on the intermetallic compound layer, wherein the silver is capable of forming a continuous solid solution with the palladium.
Claim 5
Dependent Claim
67 words
A semiconductor device comprising: a substrate; an insulating film formed on the substrate, the insulating film having a wiring groove portion; and a wiring layer embedded in the wiring groove portion, and including an intermetallic compound layer comprising of titanium and palladium and a metal layer comprising silver on the intermetallic compound layer, wherein the silver is capable of forming a continuous solid solution with the palladium.
Claim 6
Dependent Claim
30 words
The semiconductor device according to claim 3, wherein an amount of the titanium of the intermetallic compound layer is equal to or larger than an amount of the palladium thereof.
Claim 7
Dependent Claim
73 words
A semiconductor device comprising: a substrate; an insulating film formed on said substrate; and a wiring layer having a structure of Ag-(Ti×Pd), which is at least embedded in a wiring groove portion formed in said insulating film, and includes a (Ti×Pd) layer of an intermetallic compound formed by Ti and Pd layers and an Ag layer formed on the (Ti×Pd) layer and capable of forming a continuous solid solution with the Pd layer.
Claim 8
Dependent Claim
73 words
A semiconductor device comprising: a substrate; an insulating film formed on said substrate; and a wiring layer having a structure of Ag-(Ti×Pd), which is at least embedded in a wiring groove portion formed in said insulating film, and includes a (Ti×Pd) layer of an intermetallic compound formed by Ti and Pd layers and an Ag layer formed on the (Ti×Pd) layer and capable of forming a continuous solid solution with the Pd layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-03-19 | 1999-09-18 | 2000-03-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-03-19 | 2003-09-18 | 2004-03-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-03-19 | 2007-09-18 | 2008-03-19 | $7700.00 | Window Closed / Lapsed |